Electrostatic chuck and base member for use in the same

Patent metadata

Field	Value
Publication number	US-2016118285-A1
Application number	US-201514887514-A
Country	US
Kind code	A1
Filing date	Oct 20, 2015
Priority date	Oct 22, 2014
Publication date	Apr 28, 2016
Grant date	—

Abstract

An electrostatic chuck includes a base member and an electrostatic chuck substrate. The base member includes a cooling path. The electrostatic chuck substrate is connected to an upper surface of the base member through an adhesive layer so as to attract a substrate to be mounted. The cooling path includes an introduction portion, a discharge portion and a conduit. The cooling medium is introduced from an outside of the base member to the introduction portion. The cooling medium is discharged from the discharge portion. The conduit includes a start end portion communicating with the introduction portion and a final end portion communicating with the discharge portion. The introduction portion is inclined toward a lower surface of the base member and at a predetermined angle with respect to an axis perpendicular to the upper surface. The introduction portion extends from the lower surface toward the start end portion.

First claim

What is claimed is:

1 . An electrostatic chuck comprising:
a base member that includes a cooling path through which a cooling medium flows; and an electrostatic chuck substrate that is connected to an upper surface of the base member through an adhesive layer so as to attract and retain a substrate to be mounted on an upper surface of the electrostatic chuck substrate; wherein the cooling path comprises
an introduction portion to which the cooling medium is introduced from an outside of the base member,
a discharge portion from which the cooling medium is discharged to the outside of the base member, and
a conduit including
a start end portion that communicates with the introduction portion, and
a final end portion that communicates with the discharge portion,

the introduction portion is inclined toward a lower surface of the base member and at a predetermined angle with respect to an axis perpendicular to the upper surface of the base member, and the introduction portion extends from the lower surface of the base member toward the start end portion of the conduit.

2 . The electrostatic chuck of claim 1 , wherein the introduction portion is connected to the conduit on a lower surface of the start end portion of the conduit.

3 . The electrostatic chuck of claim 1 , wherein
an upper surface of the start end portion of the conduit is formed on the same plane as an upper surface of the other parts of the conduit than the start end portion, and a lower surface of the start end portion of the conduit is formed on a plane closer to the lower surface of the base member than a lower surface of the other parts of the conduit than the start end portion.

4 . The electrostatic chuck of claim 1 , wherein the discharge portion extends along the axis from the lower surface of the base member toward the final end portion of the conduit.

5 . The electrostatic chuck of claim 1 , wherein
the introduction portion and the discharge portion are formed in a central portion of the base member in a plan view, the conduit is formed into a spiral shape extending from the introduction portion toward an outer circumferential region of the base member, is turned back in the outer circumferential region, and then formed into a spiral shape extending from the outer circumferential region toward the discharge portion, and a part of the conduit extending from the outer circumferential region toward the discharge portion is in parallel with a part of the conduit extending from the introduction portion toward the outer circumferential region.

6 . The electrostatic chuck of claim 1 , wherein
the electrostatic chuck substrate comprises
an electrostatic electrode that attract the substrate, and
a heating element that heats the substrate.

7 . The electrostatic chuck of claim 1 , wherein the predetermined angle is equal to or lager than 25 degrees and less than 90 degrees.

8 . The electrostatic chuck of claim 1 , wherein a depth of a connection portion between the introduction portion and the conduit is deeper than that of a connection portion between the discharge portion and the conduit.

9 . The electrostatic chuck of claim 1 , wherein the introduction portion has an oblique cylindrical shape.

10 . The electrostatic chuck of claim 9 , wherein the discharge portion has a straight cylindrical shape.

11 . A base member for supporting an electrostatic chuck substrate, the base member comprising:
an lower surface; an upper surface that is opposite from the lower surface; and a cooling path including
an introduction portion to which a cooling medium is introduced from an outside,
a discharge portion from which the cooling medium is discharged to the outside, and
a conduit including
a start end portion that communicates with the introduction portion, and
a final end portion that communicates with the discharge portion, the cooling path configured to allow the cooling medium to flow therethrough, wherein

the introduction portion is inclined toward the lower surface and at a predetermined angle with respect to an axis perpendicular to the upper surface, and the introduction portion extends from the lower surface toward the start end portion of the conduit.

Assignees

• Shinko Electric Ind Co

Inventors

• Takada Kazuya

Classifications

• H10P72/0434

  mainly by convection · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title

• H01L21/6833 Primary

  Electricity · mapped topic