Method for treating a surface and device implemented

Patent metadata

Field	Value
Publication number	US-2016102012-A1
Application number	US-201414895258-A
Country	US
Kind code	A1
Filing date	Jun 6, 2014
Priority date	Jun 7, 2013
Publication date	Apr 14, 2016
Grant date	—

Abstract

The present invention relates to a method for treating a surface of an object which comprises the steps consisting of bringing the surface to be treated in contact with a diffusion intermediate and then maintaining said surface to be treated in contact with said diffusion intermediate without any movement relatively to each other, said diffusion intermediate being impregnated with a corrosive solution prior to contacting or during said contacting. The present invention also relates to a device implemented during such a method.

First claim

1 . A method for treating a surface of an object, comprising
contacting the surface to be treated with a diffusion intermediate and maintaining said surface to be treated in contact with said diffusion intermediate without any movement relative to each other,
said diffusion intermediate being impregnated with a corrosive solution prior to contacting or during said contacting.

2 . The method according to claim 1 , wherein said surface is a surface in a metal, a noble metal, an oxidized metal, a transition metal or a metal alloy.

3 . The method according to claim 1 , wherein said surface is a surface in silicon (Si), in silicon carbide (SiC), in gallium arsenide (AsGa), in gallium (Ga), in indium phosphide (InP), in mixtures thereof or alloys thereof.

4 . The method according to claim 1 , wherein said surface is a surface in silicon dioxide (SiO 2 ), in aluminium oxide (Al 2 O 3 ), in magnesium oxide (MgO), in glass, in silica glass, in ceramic, in diamond, in mixtures thereof or in alloys thereof.

5 . The method according to claim 1 , wherein said corrosive solution is an acid corrosive solution selected from among hydrochloric acid (HCl), nitric acid (HNO 3 ), hydrofluoric acid (HF), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), ammonium fluoride (NH 4 F), ammonium difluoride (NH 4 HF 2 ), an aqueous HCl solution, an aqueous HNO 3 solution, an aqueous HF solution, an aqueous H 2 SO 4 solution, an aqueous H 3 PO 4 solution, an aqueous NH 4 F solution, an aqueous NH 4 HF 2 solution and mixtures thereof.

6 . The method according to claim 1 , wherein said corrosive solution is an alkaline corrosive solution selected from an aqueous solution of sodium hydroxide (NaOH), an aqueous solution of potassium hydroxide (KOH), an aqueous solution of calcium hydroxide (Ca(OH) 2 ), an aqueous solution of cesium hydroxide (CsOH), an aqueous solution of lithium hydroxide (LiOH), a solution of sodium hydride (NaH) in molten NaOH and mixtures thereof.

7 . The method according to claim 1 , wherein said diffusion intermediate is a porous solid support in a material selected from the group consisting of paper comprising cellulose; cotton paper; agarose; gelatin; cellulose; methylcellulose; carboxymethylcellulose; nitrocellulose; cellulose acetate ester; an alginate; a polyolefin; an ion exchange porous membrane; a sephadex resin packaged as a membrane or a membrane of a perfluorinated polymer; a membrane in an organic polymer; a felt fabric; a glass fiber fabric; a nylon fabric; a polyacrylamide gel; a sepharose gel and mixtures thereof.

8 . The method according to claim 1 , wherein said method comprises the successive steps consisting of:
a 1 ) impregnating the diffusion intermediate with a corrosive solution; b 1 ) bringing the surface of the object to be treated in contact with the impregnated diffusion intermediate obtained subsequently to step (a 1 ) and then maintaining said surface of the object to be treated in contact with said impregnated diffusion intermediate without any movement relatively to each other.

9 . The method according to claim 1 , wherein said method comprises the successive steps consisting of:
a 2 ) bringing the surface of the object to be treated in contact with the diffusion intermediate and then maintaining said surface of the object to be treated in contact with said diffusion intermediate without any movement relatively to each other; and b 2 ) impregnating, during said contacting, the diffusion intermediate with a corrosive solution.

10 . A device comprising:
(i) a fixed base on which is deposited a diffusion intermediate; and (ii) an element comprising a movable portion on which is attached an object to be treated and capable of bringing the surface of said object to be treated into contact with said diffusion intermediate, said device not comprising any element capable of displacing said surface put into contact with said diffusion intermediate relatively to said diffusion intermediate.

11 . The device according to claim 10 , wherein said device further comprises an applicator capable of impregnating the diffusion intermediate with the corrosive solution.

Assignees

• Commissariat à l'énergie atomique et aux énergies alternatives

Inventors

• Pilon Fabien
• Belleville Philippe
• Lambert Sébastien
• Rondeau Olivier
• Thomas Sandrine

Classifications

• C09K13/02

  containing an alkali metal hydroxide · CPC title

• C09K13/08

  containing a fluorine compound · CPC title

• C23F1/08

  Apparatus, e.g. for photomechanical printing surfaces (photo- mechanical reproduction G03F) · CPC title

• C23F1/20

  for etching aluminium or alloys thereof · CPC title

• C03C15/02 Primary

  for making a smooth surface · CPC title