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Curvature measurement apparatus and method
US2015276388A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2015276388-A1 |
| Application number | US-201514670897-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 27, 2015 |
| Priority date | Mar 27, 2014 |
| Publication date | Oct 1, 2015 |
| Grant date | — |
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Abstract
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A curvature measurement apparatus according to an embodiment includes: a laser beam emitting portion emitting a laser beam; a first polarization beam splitter separating the emitted laser beam into first and second laser beams in different polarization directions and in different travel directions; a mirror reflecting the first laser beam so that the first and second laser beams travel side by side to a substrate; a second polarization beam splitter transmitting the second laser beam mirror-reflected from the substrate and reflecting the first laser beam, mirror-reflected from the substrate, in a direction different from a travel direction of the second laser beam; a one-dimensional first position detection device detecting an incident position of the reflected first laser beam on the first position detection device; and a one-dimensional second position detection device detecting an incident position of the transmitted second laser beam on the second position detection device.
First claim
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What is claimed is: 1 . A curvature measurement apparatus, comprising: a light emitting portion configured to emit a laser beam; a first polarization beam splitter configured to separate the laser beam emitted from the light emitting portion into a first laser beam and a second laser beam which are in different polarization directions and in different travel directions; a reflection portion configured to reflect any one of the first and second laser beams so that the first a…
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- What does patent US2015276388A1 cover?
- A curvature measurement apparatus according to an embodiment includes: a laser beam emitting portion emitting a laser beam; a first polarization beam splitter separating the emitted laser beam into first and second laser beams in different polarization directions and in different travel directions; a mirror reflecting the first laser beam so that the first and second laser beams travel side by …
- Who is the assignee on this patent?
- Nuflare Technology Inc
- What technology area does this patent fall under?
- Primary CPC classification G01B11/24. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Oct 01 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).