Device for analysing surfaces using fast atom diffraction in a high-pressure environment

Patent metadata

Field	Value
Publication number	US-12584872-B2
Application number	US-202218566853-A
Country	US
Kind code	B2
Filing date	Jun 2, 2022
Priority date	Jun 4, 2021
Publication date	Mar 24, 2026
Grant date	Mar 24, 2026

Abstract

A device for characterizing a surface of a sample, including; —a chamber comprising a medium for the sample, the chamber being connected to a pump, referred to as the primary pump, suitable for maintaining a pressure below 10-2 mbar within the chamber; —a source for generating an incident beam of neutral atoms or molecules having an energy of between 50 eV and 5 keV, with a divergence less than or equal to 0.05°, the source being arranged to direct the incident beam within the chamber through an inlet to the surface to be characterized with an angle of incidence less than or equal to 10° relative to the plane of the surface.

First claim

The invention claimed is:

1 . A device for characterizing a surface of a sample comprising:
a chamber comprising a support for said sample, said chamber being connected to a primary pump adapted to maintain a pressure of less than 10-2 mbar within said chamber; a source for generating an incident beam of neutral molecules or atoms having an energy of between 50 eV and 5 keV, with a divergence of less than or equal to 0.05°, said source being arranged to direct said incident beam within said chamber via an inlet and towards said surface to be characterized with an angle of incidence of less than or equal to 10° relative to the plane of said surface, the neutral molecules or atoms of said incident beam, forwardly scattered by said surface, forming a diffracted beam; and a detection enclosure connected to said chamber and connected to a so-called UHVP pump comprising: a set of concentric tubes, each tube having an inlet end with an opening, said set comprising a smaller radius tube, having length L; a position-sensitive detector adapted to detect a diffraction pattern of neutral molecules or atoms of said diffracted beam; said length L and said openings being adapted to transport said diffracted beam to the detector without losing information on said surface, said openings and said UHVP pump being adapted to maintain a pressure of less than 10-5 mbar within the detection enclosure.

2 . The device according to claim 1 , wherein said opening of each tube has a diameter different from the others and decreasing as a function of a radius of the tubes.

3 . The device according to claim 1 , wherein a smaller diameter opening has a diameter of less than or equal to 5 mm.

4 . The device according to claim 1 , wherein a so-called high pressure distance between said inlet and an inlet end of the tubes is less than a length of decoherence of the incident beam and the diffracted beam.

5 . The device according to claim 4 , wherein said high pressure distance is less than 10 cm.

6 . The device according to claim 1 , wherein each tube has a so-called outlet end with a collar extending in a direction essentially perpendicular to the tubes so as to guide a gas stream in this direction at the outlet of each tube, a coupling port of said UHVP pump being disposed in said detection enclosure facing a space formed by said collars.

7 . The device according to claim 1 , wherein said detector comprises a wafer of microchannels, coupled to a fluorescent screen observed by a camera.

8 . The device according to claim 1 , wherein said generation source is adapted so that said angle of incidence can be varied, said device also comprising a translation and/or rotation stage for said set of tubes so as to adjust a position of said openings as a function of said angle of incidence.

9 . A magnetron plasma deposition system comprising a device according claim 1 , arranged to characterize said surface of the sample while being deposited.

Assignees

• Centre Nat Rech Scient
• Univ Paris Saclay
• Cy Cergy Paris Univ
• Centre National De Recherche Scient

Inventors

• Khemliche Hocine
• Momeni Anouchah
• Minea Tiberiu
• Staicu-Casagrande Elena-Magdalena
• Lupone Sylvain

Classifications

• G01N23/207

  Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions · CPC title

• G01N23/2055

  Analysing diffraction patterns · CPC title

• C23C14/35

  by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title

• H01J37/3405

  Magnetron sputtering · CPC title

• H01J37/32816

  Pressure · CPC title