Computationally Efficient X-ray Based Overlay Measurement
US-2016320319-A1 · Nov 3, 2016 · US
US9528950B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9528950-B2 |
| Application number | US-201214237915-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 11, 2012 |
| Priority date | Nov 1, 2011 |
| Publication date | Dec 27, 2016 |
| Grant date | Dec 27, 2016 |
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The present invention provides a method for evaluating the rebound resilience, hardness, or energy loss of polymer materials, capable of sufficiently evaluating the difference in performance between samples with excellent measurement accuracy. The present invention relates to a method for evaluating the rebound resilience, hardness, or energy loss of a polymer material, including irradiating the polymer material with X-rays or neutrons to perform X-ray scattering measurement or neutron scattering measurement.
Opening claim text (preview).
The invention claimed is: 1. A method for evaluating rebound resilience of a polymer material, comprising the steps of: irradiating the polymer material with X-rays or neutrons performing X-ray scattering measurement or neutron scattering measurement of the polymer material to obtain a scattering intensity curve I(q); determining a radius of gyration R g1 by curve fitting Formula 1-2 and Formula 1-3 to the scattering intensity curve I (q) ; evaluating rebound resilience based on the radius of gyration R g1 using a relationship that the rebound resilience increases as the radius of gyration R g1 decreases, q = 4 πsin ( θ / 2 ) λ Formula 1 - 1 wherein θ is a scattering angle; and λ is a wavelength of X-rays or neutrons, I ( q ) = P 1 [ { erf ( qR g 0 6 ) 3 / q } ] D f 1 exp ( - q 2 R g 1 2 3 ) + G 1 exp ( - q 2 R g 1 2 3 ) + P 2 [ ( erf (
by measuring small-angle scattering · CPC title
tyres · CPC title
using neutrons · CPC title
X-ray · CPC title
neutrons · CPC title
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