Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method
US-10222701-B2 · Mar 5, 2019 · US
US12578076B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12578076-B2 |
| Application number | US-202318329505-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 5, 2023 |
| Priority date | Jun 5, 2023 |
| Publication date | Mar 17, 2026 |
| Grant date | Mar 17, 2026 |
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A dual-output light source includes a laser-driven light source that generates light from a thermal plasma over an angular range of emission of at least 180 degrees. A first and second off-axis conical mirror are positioned within the at least 180 degrees of emission of the thermal plasma so that light generated by the plasma propagating from a first region of emission strikes a first focal point of the first off-axis conical mirror and light generated by the plasma propagating from a second region of emission strikes a first focal point of the second off-axis conical mirror. The first and second off-axis conical mirrors reflect light in a respective and first and second optical paths. A first optical filter having a first bandwidth is positioned in the first optical path. A second optical filter having a second bandwidth is positioned in the second optical path.
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What is claimed is: 1 . A dual-output light source comprising: a) a laser-driven light source that generates light from a thermal plasma over an angular range of emission of at least 180 degrees; b) a first off-axis conical mirror having a surface with a first coating and being positioned proximate to the thermal plasma so that generated light propagating from a first region of the at least 180-degree angular range of emission strikes a first focal point of the first off-axis conical mirror, the first off-axis conical mirror reflecting light in a first optical path; c) a second off-axis conical mirror having a surface with a second coating and being positioned proximate to the thermal plasma so that light generated by the laser-driven light source propagating from a second region of the at least 180-degree angular range of emission strikes a first focal point of the surface of the second off-axis conical mirror, the second off-axis conical mirror reflecting light in a second optical path; d) a first optical filter having a first bandwidth and having an input positioned in the first optical path, wherein the light transmitting through an output of the first optical filter has a first optical spectrum; e) a first optical output that is positioned at a second focal point of the first off-axis conical mirror in an optical path of light transmitting through the output of the first optical filter; f) a second optical filter having a second bandwidth and having an input positioned in the second optical path, wherein light transmitting through the output of the second optical filter has a second optical spectrum; g) a second optical output that is positioned at a second focal point of the second off-axis conical mirror in an optical path of light transmitting through the output of the second optical filter; and h) an optical combiner having a first input that is optically coupled to the first output and a second input that is optically coupled to the second output, an output of the optical combiner providing a combined output optical beam. 2 . The light source of claim 1 wherein at least one of the first and second off-axis conical mirrors comprise an off-axis ellipsoidal mirror. 3 . The light source of claim 1 wherein at least one of the first and second off-axis conical mirrors comprise an off-axis-parabolic mirror. 4 . The light source of claim 1 wherein the laser-driven light source comprises a broad-band light source that emits ultraviolet light. 5 . The light source of claim 1 wherein the laser-driven light source comprises a broad-band light source that emits visible light. 6 . The light source of claim 1 wherein the laser-driven light source comprises a broad-band light source that emits near-infrared light. 7 . The light source of claim 1 further comprising an optical fiber having an end optically coupled to the first optical output. 8 . The light source of claim 1 further comprising a first optical fiber having an end optically coupled to the first optical output and a second optical fiber having an end optically coupled to the second optical output. 9 . The light source of claim 1 wherein the first bandwidth comprises a bandwidth in the ultraviolet region of the electromagnetic spectrum and the second bandwidth comprises a bandwidth in the visible region of the electromagnetic spectrum. 10 . The light source of claim 1 wherein the first bandwidth comprises a bandwidth in the ultraviolet region of the electromagnetic spectrum and the second bandwidth comprises a bandwidth in the near-infrared region of the electromagnetic spectrum. 11 . The light source of claim 1 wherein the first bandwidth comprises a bandwidth in the near-infrared region of the electromagnetic spectrum and the second bandwidth comprises a bandwidth in the visible region of the electromagnetic spectrum. 12 . The light source of claim 1 wherein the first and second optical filters are configured with an identical bandwidth. 13 . The light source of claim 1 wherein the first optical output is configured with a first numerical aperture and the second optical output is configured with a second numerical aperture that is different from the first numerical aperture. 14 . The light source of claim 1 wherein the optical combiner comprises an optical fiber combiner. 15 . The light source of claim 1 wherein the optical combiner comprises a dichroic mirror. 16 . The light source of claim 1 wherein the first coating comprises a first filter and the second coating comprises a second filter, wherein a filter function of the first filter is different from a filter function of the second filter. 17 . The light source of claim 1 wherein the first coating comprises a first filter and the second coating comprises a second filter, wherein a bandwidth of the first filter is the same as a bandwidth of the second filter. 18 . The light source of claim 1 wherein the first coating is the same as the second coating. 19 . The light source of claim 1 wherein at least one of the first and the second off-axis conical mirrors include a coating comprising gold. 20 . The light source of claim 1 wherein at least one of the first and the second off-axis conical mirrors include a coating comprising aluminum. 21 . The light source of claim 1 wherein the first off-axis conical mirror is movable so that a perpendicular to the surface of the first off-axis conical mirror moves relative to the output aperture of the light source. 22 . The light source of claim 1 wherein the first off-axis conical mirror is movable so that a perpendicular to the surface of the first off-axis conical mirror moves relative to an output aperture of the light source and the second off-axis conical mirror is movable so that a perpendicular to the surface of the second off-axis conical mirror moves relative to an output aperture of the light source. 23 . A method of generating light, the method comprising: a) producing a thermal plasma that generates light over an angular range of emission of at least 180 degrees; b) propagating the generated light to a first mirror that reflects the generated light in a first optical path; c) filtering light in the first optical path to form a first output optical beam with a first optical spectrum; d) propagating the first output optical beam to a second focal point of the first mirror; e) propagating the generated light to a second mirror that reflects the generated light in a second optical path; f) filtering light in the second optical path to form a second output optical beam with a second optical spectrum; g) propagating the second output optical beam to a second focal point of the second mirror; and h) combining the first and second output optical beams. 24 . The method of claim 23 wherein the propagating the generated light to the first mirror comprises propagating to a focal point of the first mirror. 25 . The method of claim 23 further comprising performing optical filtering at the first mirror. 26 . The method of claim 23 further comprising performing optical filtering at the first and second mirrors. 27 . The method of claim 23 further comprising moving at least one of the first and second mirrors. 28 . The method of claim 23 wherein the producing a thermal plasma that generates light comprises generating light w
using light guides · CPC title
Dichroic filters, i.e. devices operating on the principle of wave interference to pass specific ranges of wavelengths while cancelling others · CPC title
Semiconductor lasers · CPC title
with conical or pyramidal surface · CPC title
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