Systems for providing illumination in optical metrology

Patent metadata

Field	Value
Publication number	US-10203247-B2
Application number	US-201615369560-A
Country	US
Kind code	B2
Filing date	Dec 5, 2016
Priority date	Feb 22, 2013
Publication date	Feb 12, 2019
Grant date	Feb 12, 2019

Abstract

A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

First claim

What is claimed is:

1. A system for providing illumination to a measurement head, comprising:
a broadband illumination source;
one or more translatable multi-mode optical fibers configured to deliver illumination from the broadband illumination source along an illumination path to a measurement head; and
a filter mechanism, the filter mechanism configured to allow illumination at a selected wavelength to be delivered along the illumination path, wherein the filtering mechanism includes a fixed dispersive element configured to control a bandwidth of the illumination coupled into the one or more translatable multi-mode optical fibers by controlling dispersion of the illumination spectrum, the fixed dispersive element disposed between the broadband illumination source and the one or more translatable multi-mode optical fibers, the one or more translatable multi-mode optical fibers actuatable to selectively couple illumination of one or more selected wavelengths into a selected multi-mode optical fiber.

2. The system of claim 1 , wherein the filter mechanism includes a plurality of narrowband dielectric thin film filters.

3. The system of claim 1 , wherein the filter mechanism includes a tunable dielectric filter.

4. The system of claim 1 , wherein the filter mechanism is further configured to allow unfiltered illumination to be delivered along the illumination path.

5. The system of claim 1 , wherein the filter mechanism includes a monochromator with a rotating dispersive element.

6. The system of claim 1 , wherein the filter mechanism includes a dispersive element configured to direct portions of illumination at selected wavelengths along a plurality of optical fibers.

7. The system of claim 1 , wherein the one or more multi-mode optical fibers have selected numerical aperture and selected core size based upon etendue of at least one of the broadband illumination source and the measurement head.

8. The system of claim 1 , wherein the broadband illumination source comprises a laser sustained plasma source.

9. The system of claim 8 , wherein the laser sustained plasma source is configured to provide illumination along the axis of plasma emissions of the laser sustained plasma source.

10. The system of claim 8 , wherein the laser sustained plasma source includes:
a pump source configured to provide illumination at at least one selected wavelength and at least one selected power level for generating plasma; and
a gas cell containing pressurized gas, the gas cell configured to receive illumination from the pump source to generate plasma, the gas cell further configured to provide broadband illumination emitted from the generated plasma.

11. The system of claim 10 , wherein the laser sustained plasma source further includes:
an ellipsoidal mirror configured to focus illumination delivered to the gas cell, the ellipsoidal mirror further configured to collect and collimate broadband illumination emitted from the generated plasma.

12. The system of claim 10 , wherein the laser sustained plasma source further includes:
a collimation lens configured to collimate illumination delivered to the gas cell; and
a paraboloidal mirror configured to focus illumination delivered to the gas cell, the paraboloidal mirror further configured to collect and collimate broadband illumination emitted from the generated plasma.

13. The system of claim 10 , wherein the laser sustained plasma source further includes:
a cold mirror configured to separate illumination from the pump source from broadband illumination emitted from the generated plasma, the cold mirror further configured to direct broadband illumination emitted from the generated plasma along an emission path.

14. The system of claim 1 , wherein the filter mechanism includes:
a plurality of dichroic splitters, each dichroic splitter configured to direct a respective range of wavelengths along a respective delivery path; and
a plurality of shutters, each shutter configured to receive illumination from the respective delivery path of a respective one of the plurality of dichroic splitters, the plurality of shutters configured to allow illumination at a selected wavelength to be delivered along the illumination path.

15. The system of claim 1 , wherein the fixed dispersive element comprises at least one of a prism or a diffraction grating.

16. A system for providing illumination to a measurement head, comprising:
one or more translatable multi-mode optical fibers configured to deliver illumination from a broadband illumination source along an illumination path to a measurement head;
a filter mechanism, the filter mechanism configured to allow illumination at a selected wavelength to be delivered along the illumination path, wherein the filtering mechanism includes a fixed dispersive element disposed between the broadband illumination source and the one or more multi-mode optical fibers; and
an actuator, wherein the one or more multi-mode optical fibers are coupled to the actuator, wherein the actuator is configured to scan the one or more translatable multi-mode optical fibers over a spatially dispersed spectrum of illumination caused by the fixed dispersive element, wherein illumination at a selected wavelength is coupled into at least one selected optical fiber of the one or more translatable multi-mode optical fibers.

17. The system of claim 16 , wherein the fixed dispersive element comprises at least one of a prism or a diffraction grating.

18. A system for providing illumination to a measurement head, comprising:
one or more translatable multi-mode optical fibers configured to deliver illumination from a broadband illumination source along an illumination path to a measurement head; and
a filter mechanism, the filter mechanism configured to allow illumination at a selected wavelength to be delivered along the illumination path, wherein the filter mechanism includes a fixed dispersive element disposed between the broadband illumination source and the one or more translatable optical fibers, wherein the one or more translatable multi-mode optical fibers are translatable in a direction perpendicular to a spectral plane of illumination outputted from the dispersive element to vary a bandwidth of illumination coupled into the one or more translatable multi-mode optical fibers.

19. The system of claim 16 , wherein the broadband illumination source comprises a laser sustained plasma source.

20. The system of claim 18 , wherein the fixed dispersive element comprises at least one of a prism or a diffraction grating.

21. The system of claim 20 , wherein the broadband illumination source comprises a laser sustained plasma source.

Assignees

• Kla Tencor Corp

Inventors

• Brady Gregory R
• Shchegrov Andrei V
• Rotter Lawrence D
• Shaughnessy Derrick A
• Shchemelinin Anatoly
• Bezel Ilya
• Arain Muzammil A
• Vasiliev Anatoly A
• Allen James Andrew
• Shulepov Oleg
• Hill Andrew V
• Bachar Ohad
• Markowitz Moshe
• Ish-Shalom Yaron
• Sela Ilan
• Manassen Amnon
• Svizher Alexander
• Khokhlov Maxim
• Abramov Avi
• Tsibulevsky Oleg
• Kandel Daniel
• Ghinovker Mark

Classifications

• G02B6/29332

  Wavelength selective couplers, i.e. based on evanescent coupling between light guides, e.g. fused fibre couplers with transverse coupling between fibres having different propagation constant wavelength dependency · CPC title

• G02B6/29362

  Serial cascade of filters or filtering operations, e.g. for a large number of channels · CPC title

• G02B6/353

  the optical element being a shutter, baffle, beam dump or opaque element (absorbers on light guide termination G02B6/243) · CPC title

• G01J3/12

  Generating the spectrum; Monochromators · CPC title

• F21V13/08

  the elements being filters or photoluminescent elements and reflectors · CPC title