Continuous-wave laser-sustained plasma illumination source

Patent metadata

Field	Value
Publication number	US-10217625-B2
Application number	US-201615064294-A
Country	US
Kind code	B2
Filing date	Mar 8, 2016
Priority date	Mar 11, 2015
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.

First claim

What is claimed is:

1. An optical system for generating broadband light via light-sustained plasma formation, comprising:
a chamber, the chamber configured to contain a buffer material in a first phase and a plasma-forming material in a second phase, wherein the second phase is at least one of a solid phase or a liquid phase;
an illumination source configured to generate continuous-wave pump illumination;
a set of focusing optics configured to focus the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material;
a set of collection optics configured to receive broadband radiation emanated from the plasma; and
a flow subsystem configured to direct a flow of the buffer material to the plasma, the flow subsystem including a nozzle directed at the plasma so that the flow of the buffer material intersects with an illumination path of the continuous-wave pump illumination at the interface between the buffer material and the plasma-forming material.

2. The optical system of claim 1 , wherein a phase of the buffer material comprises:
at least one of a gas phase or a liquid phase.

3. The optical system of claim 1 , wherein a phase of the plasma-forming material comprises:
a solid phase.

4. The optical system of claim 3 , wherein the plasma-forming material comprises:
a cylindrically-symmetric element.

5. The optical system of claim 3 , wherein the cylindrically-symmetric element comprises:
at least one of a cylinder, a drum, or a disk.

6. The optical system of claim 3 , wherein the plasma-forming material comprises:
a wire.

7. The optical system of claim 1 , wherein the phase of the plasma-forming material comprises:
a liquid phase.

8. The optical system of claim 7 , wherein the plasma-forming material comprises:
an aqueous solution of a plasma-forming element.

9. The optical system of claim 8 , wherein the plasma-forming element is in a salt form.

10. The optical system of claim 7 , wherein the plasma-forming material includes a solvent.

11. The optical system of claim 7 , further comprising:
a liquid flow assembly configured to direct a flow of the plasma-forming material to the plasma.

12. The optical system of claim 11 , wherein the liquid flow assembly includes a rotating element at least partially immersed in the plasma-forming material.

13. The optical system of claim 12 , wherein a rotation of the rotating element forms a flowing layer of the plasma-forming material adjacent to the surface of the rotating element.

14. The optical system of claim 11 , wherein the liquid flow subsystem includes a nozzle.

15. The optical system of claim 7 , wherein the flow of the plasma-forming material is a liquid jet.

16. The optical system of claim 1 , wherein the plasma-forming material comprises:
at least one of nickel, copper, or beryllium.

17. The optical system of claim 1 , wherein the buffer material comprises:
at least one of argon, nitrogen, or xenon.

18. The optical system of claim 1 , further comprising:
a cooling assembly, wherein the cooling assembly controls a temperature of the plasma-forming material.

19. The optical system of claim 18 , wherein the cooling assembly controls the temperature of the plasma-forming material through liquid cooling.

20. The optical system of claim 18 , wherein the cooling assembly controls the temperature of the plasma-forming material through air cooling.

21. The optical system of claim 1 , wherein a portion of the plasma-forming material is removed by the generation of the plasma.

22. The optical system of claim 21 , wherein the plasma-forming material is translated such that the portion of the plasma-forming material removed by the generation of the plasma is replenished.

23. The optical system of claim 1 , wherein the broadband radiation collected by the set of collection optics is directed to a sample.

24. The optical system of claim 1 , wherein the broadband radiation collected by the set of collection optics is utilized by at least one of an inspection tool, a metrology tool, or a semiconductor device fabrication line tool.

25. An optical system for generating broadband light via light-sustained plasma formation, comprising:
a chamber, the chamber configured to contain a buffer gas;
an illumination source configured to generate continuous-wave pump illumination;
a plasma-forming material disposed within the chamber, wherein a phase of the plasma-forming material includes at least one of a solid phase or a liquid phase, wherein at least a portion of the plasma-forming material is removed from a portion of a surface of the plasma-forming material proximate to the plasma;
a set of focusing optics configured to focus the continuous-wave pump illumination onto the at least a portion of the plasma-forming material removed from the portion of the surface of the plasma-forming material to generate a plasma;
a set of collection optics configured to receive broadband radiation emanated from the plasma; and
a gas flow subsystem configured to direct a flow of the buffer gas to the plasma, the gas flow subsystem including a nozzle directed at the plasma so that the flow of the buffer gas intersects with an illumination path of the continuous-wave pump illumination at the plasma.

26. The optical system of claim 25 , wherein the gas flow subsystem directs the plasma-forming material removed from the portion of the surface of the plasma-forming material proximate to the plasma away from at least one of the set of focusing optics or the set of collection optics.

27. The optical system of claim 25 , wherein removal of the plasma-forming material provides a vapor pressure of the plasma-forming material of 10 atm.

28. The optical system of claim 25 , wherein the phase of the plasma-forming element comprises:
a solid phase.

29. The optical system of claim 28 , wherein at least a portion of the plasma-forming material is removed from the portion of the surface of the plasma-forming material proximate to the plasma by sublimation.

30. The optical system of claim 28 , wherein the portion of the surface of the plasma-forming material proximate to the plasma comprises:
a liquid phase, wherein the at least a portion of the plasma-forming material removed from the portion of the surface of the plasma-forming material proximate to the plasma is removed by evaporation.

31. The optical system of claim 28 , wherein the plasma-forming material comprises:
a cylindrically-symmetric element.

32. The optical system of claim 31 , wherein the cylindrically-sym metric element comprises:
at least one of a cylinder, a drum, or a disk.

33. The optical system of claim 28 , wherein the plasma-forming material comprises:
a wire.

34. The optical system of claim 25 , wherein the plasma-forming material is translated such that the at least a portion of the plasma-forming material removed from the portion of the surface of the plasma-forming material proximate to the plasma is replenished.

35. The optical system of claim 25 , wherein the plasma-forming material comprises:
at least one of nickel, copper, or beryllium.

Assignees

• Kla Tencor Corp

Inventors

• Bezel Ilya
• Shchemelinin Anatoly
• Shifrin Eugene
• Panzer Matthew

Classifications

• H01J65/04 Primary

  Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating {plasma display panels} · CPC title

• H05G2/008

  involving an energy-carrying beam in the process of plasma generation · CPC title

• H05G2/0086

  Optical arrangements for conveying the laser beam to the plasma generation location · CPC title