Cleaning fixture for showerhead assemblies

Patent metadata

Field	Value
Publication number	US-12564871-B2
Application number	US-202117537567-A
Country	US
Kind code	B2
Filing date	Nov 30, 2021
Priority date	Dec 2, 2020
Publication date	Mar 3, 2026
Grant date	Mar 3, 2026

Abstract

Cleaning fixtures for cleaning a showerhead assembly are disclosure. The cleaning fixtures include: a fixture body incorporating three or more cavities, each cavity being separate from an adjacent cavity by a partition, and a number of channels associated with each cavity for fluidly connecting the cavities with an upper surface of the fixture body.

First claim

What is claimed is:

1 . A cleaning fixture configured for cleaning a showerhead assembly comprising:
a fixture body configured to be mounted to the showerhead assembly, the fixture body having an upper surface and a lower surface opposite the upper surface, the fixture body comprising:
an inner cavity open to the lower surface of the fixture body, the inner cavity being fluidly connected to the upper surface of the fixture body by one or more inner channels,
an outer cavity open to the lower surface of the fixture body, the outer cavity being fluidly connected to the upper surface of the fixture by one or more outer channels;
one or more intermediate cavities open to the lower surface of the fixture body and positioned between the inner cavity and the outer cavity, the one or more intermediate cavities being fluidly connected to the upper surface of the fixture by one or more intermediate channels; and
two or more partitions separating the one or more intermediate cavities from the inner cavity and the outer cavity,
wherein the two or more partitions extend to the lower surface, and
wherein the one or more intermediate cavities surrounds the inner cavity.

2 . The cleaning fixture of claim 1 , wherein the one or more intermediate cavities comprise an annular ring at least partially surrounding the inner cavity, the one or more intermediate cavities being separate from the inner cavity by an inner partition.

3 . The cleaning fixture of claim 1 , wherein the outer cavity comprises an annular ring at least partially surrounding the one or more intermediate cavities, the outer cavity being separate from the one or more intermediate cavities by an outer partition.

4 . The cleaning fixture of claim 1 , wherein the fixture body is fabricated from at least one of a polymer, a plastic, a metal, or a metal alloy.

5 . The cleaning fixture of claim 1 , further comprising:
an inner conduit connected to the one or more inner channels; one or more intermediate conduits connected to the one or more intermediate channels; and an outer conduit connected to the one or more outer channels; wherein the inner conduit, the one or more intermediate conduits, and the outer conduit, are independent from one another.

6 . A cleaning apparatus comprising:
the cleaning fixture of claim 5 ; a showerhead plate comprising inner showerhead apertures and one or more showerhead exhaust holes, wherein the cleaning fixture is mounted to the showerhead plate by a connector such that the one or inner channels and the one or more intermediate channels are in fluid communication with the inner showerhead apertures and the one or more outer channels are in fluid communication with the one or more showerhead exhaust holes; a reservoir configured for retaining a cleaning chemical; and a mounting clamp configured for mounting the cleaning fixture and the showerhead plate to the reservoir.

7 . The cleaning apparatus of claim 6 , further comprising:
a flow controller configured for regulating the flow of a cleaning chemical through the inner cavity, the one or more intermediate cavities, and the outer cavity.

8 . The cleaning apparatus of claim 7 , wherein the flow controller is configured for independently regulating the flow of a cleaning chemical through each one of the inner cavity, the one or more intermediate cavities, and the outer cavity.

9 . The cleaning apparatus of claim 8 , wherein the flow controller is configured for independently controlling the flow rate of a cleaning chemical through each one of the inner cavity, the one or more intermediate cavities, and the outer cavity.

10 . The cleaning apparatus of claim 8 , wherein the flow controller is configured for independently controlling the period of flow time of the cleaning chemical flows through each one of the inner cavity, the one or more intermediate cavities, and the outer cavity.

11 . The cleaning apparatus of claim 7 , wherein the flow controller comprises:
a single common vacuum source connected to the inner conduit, the one or more intermediate conduits, and the outer conduit; and at least one flow regulator connected to at least one of the inner conduit, the one or more intermediate conduits, and the outer conduit.

12 . The cleaning apparatus of claim 7 , wherein the flow controller comprises, at least one vacuum source connected to each one of the inner conduit, the one or more intermediate conduits, and the outer conduit.

13 . The cleaning apparatus of claim 6 , wherein the cleaning chemical comprises a liquid etchant.

14 . The cleaning apparatus of claim 6 , wherein the showerhead plate comprises a metal or a metal alloy.

15 . The cleaning apparatus of claim 6 , further comprising an undesirable material disposed on a surface of the showerhead plate, the undesirable material having a non-uniform average thickness and comprising a material different from the metal or the metal alloy of the showerhead plate.

16 . The cleaning fixture of claim 1 , wherein a cross-sectional area of the inner cavity is greater than a cross-sectional area of each of the one or more inner channels.

17 . A cleaning fixture for cleaning a showerhead assembly comprising:
a fixture body configured to be mounted to the showerhead assembly, the fixture body having an upper surface and a lower surface opposite the upper surface, the fixture body comprising; three or more cavities open to the lower surface of the fixture body, each cavity being separated from an adjacent cavity by a partition; and one or more channels associated with each cavity, the one or more channels fluidly connecting each of cavities to the upper surface of the fixture body, wherein at least one of the three or more cavities surrounds another of the three or more cavities, and wherein the partition extends to the lower surface.

18 . The cleaning fixture of claim 17 , further comprising at least three independent conduits, each independent conduit connected to the one or more channels associated with each cavity.

19 . A cleaning apparatus comprising:
the cleaning fixture of claim 18 ; a showerhead plate comprising inner showerhead apertures and one or more showerhead exhaust holes, wherein the cleaning fixture is mounted to the showerhead plate by a connector such that the three or more cavities disposed in the lower surface of the fixture body are in fluid communication with the inner showerhead apertures and the one or more showerhead exhaust holes; a reservoir configured for retaining a cleaning chemical; a mounting clamp configured for mounting the cleaning fixture and the showerhead plate to the reservoir; and a flow controller configured for independently regulating the flow of a cleaning chemical through the three or more cavities, such that an undesirable film disposed on a surface of showerhead plate is asymmetrically removed from the showerhead plate.

20 . A method cleaning a showerhead assembly comprising:
providing a showerhead plate with an undesirable material disposed on a surface of the showerhead plate, the undesirable film having a non-uniform average thickness; mounting a cleaning fixture to the shower head plate, the cleaning fixture comprising a fixture body having an upper surface and a lower surface opposite the upper surface, the fixture body comprising;
three or more cavities disposed in the lower surface of the fixture body, each cavity being separated from an adjacent cavity by a partition;
one or more channels associated with each cavity,

Assignees

• Asm Ip Holding Bv

Inventors

• Nandwana Dinkar
• D'Ambra Allen
• Tran Dinh
• Kimtee Ankit
• Shero Eric

Classifications

• H01J37/32853

  Hygiene · CPC title

• C23C16/4407 Primary

  Cleaning of reactor or reactor parts by using wet or mechanical methods · CPC title

• H01J37/3244

  Gas supply means · CPC title

• C23C16/4405

  Cleaning of reactor or parts inside the reactor by using reactive gases · CPC title

• C23C16/45565

  Shower nozzles · CPC title