Wafer heating apparatus and wafer processing apparatus using the same

Patent metadata

Field	Value
Publication number	US-12518985-B2
Application number	US-202318126933-A
Country	US
Kind code	B2
Filing date	Mar 27, 2023
Priority date	Sep 16, 2022
Publication date	Jan 6, 2026
Grant date	Jan 6, 2026

Abstract

Proposed are a wafer heating apparatus and a wafer processing apparatus using the same. More particularly, proposed are a wafer heating apparatus having an improved structure to enable efficient cooling of a terminal block, and a wafer processing apparatus using the same. A wafer heating apparatus for heating a wafer according to one embodiment includes a heater disposed below the wafer and configured to serve as a heat source, a cooling plate disposed below the heater and configured to provide cool air, and a terminal block configured to supply power to the heater and having a lower end portion in contact with the cooling plate.

First claim

What is claimed is:

1 . A wafer heating apparatus for heating a wafer, the wafer heating apparatus comprising:
a heater disposed below the wafer and configured to heat the wafer; a cooling plate disposed below the heater and configured to cool the wafer down; a terminal block configured to supply power to the heater and having a lower end portion in contact with the cooling plate; and a reflector disposed between the heater and the cooling plate and configured to reflect heat emitted from the heater toward the wafer, wherein the reflector has an opening so that the lower end portion of the terminal block is in contact with the cooling plate through the opening.

2 . The wafer heating apparatus of claim 1 ,
wherein the opening has a shape conforming to a sectional shape of the terminal block.

3 . The wafer heating apparatus of claim 1 ,
wherein the cooling plate has a recess depressed downward so that a power cable connected to the terminal block is cooled by the cooling plate while being received in the recess.

4 . The wafer heating apparatus of claim 1 ,
wherein the cooling plate has a recess recessed downward at a position below the opening so that a power cable connected to the terminal block is cooled by the cooling plate while being received in the recess.

5 . The wafer heating apparatus of claim 4 ,
wherein a width of the recess is smaller than a width of the opening.

6 . The wafer heating apparatus of claim 1 ,
wherein the heater comprises a plurality of concentric IR lamp heaters, and the lamp heaters are disposed on the same plane.

7 . The wafer heating apparatus of claim 1 ,
wherein a flow path for flow of cooling water is disposed in the cooling plate.

8 . A wafer processing apparatus comprising:
a chamber configured to provide a processing area; a wafer support unit installed in the processing area of the chamber and configured to support a wafer; a chemical liquid supply unit configured to supply a chemical liquid to the wafer supported by the wafer support unit; and a wafer heating unit configured to heat the wafer, wherein the wafer heating unit comprises: a heater disposed below the wafer and configured to serve as a heat source; a cooling plate disposed below the heater and configured to provide cool air; a terminal block configured to supply power to the heater and having a lower end portion in contact with the cooling plate; and a reflector disposed between the heater and the cooling plate and configured to reflect heat emitted from the heater toward the wafer, wherein the reflector has an opening so that the lower end portion of the terminal block is in contact with the cooling plate through the opening.

9 . The wafer processing apparatus of claim 8 ,
wherein the opening has a shape conforming to a sectional shape of the terminal block.

10 . The wafer processing apparatus of claim 8 ,
wherein the cooling plate has a recess depressed downward so that a power cable connected to the terminal block is cooled by the cooling plate while being received in the recess.

11 . The wafer processing apparatus claim 8 ,
wherein the cooling plate has a recess depressed downward at a position below the opening so that a power cable connected to the terminal block is cooled by the cooling plate while being received in the recess.

12 . The wafer processing apparatus of claim 11 , wherein a width of the recess is smaller than a width of the opening.

13 . The wafer processing apparatus of claim 12 ,
wherein the heater comprises a plurality of concentric infrared (IR) lamp heaters, and the plurality of concentric IR lamp heaters are disposed on the same plane.

14 . The wafer processing apparatus of claim 8 ,
wherein a flow path for flow of cooling water is disposed in the cooling plate.

15 . The wafer processing apparatus of claim 8 ,
wherein the wafer support unit comprises: a spin chuck; and a rotation actuator disposed below the spin chuck and configured to rotate the spin chuck.

16 . A wafer etching apparatus for etching a surface of a wafer, the wafer etching apparatus comprising:
a chamber configured to provide a processing area; a wafer support unit installed in the processing area and configured to support the wafer, the wafer support unit comprising a spin chuck and a rotation actuator configured to rotate the spin chuck; an etching liquid supply unit configured to supply an etching liquid to the wafer supported by the wafer support unit, the etching liquid supply unit comprising a nozzle configured to spray the etching liquid onto the wafer, a nozzle actuator configured to move the nozzle, and an etching liquid heater configured to heat the etching liquid; a recovery unit provided in a shape surrounding the wafer support unit, and configured to recover reaction by-products, which result from reactions between the etching liquid sprayed onto the surface of the wafer by the etching liquid supply unit and the surface of the wafer, or the etching liquid scattered from the wafer; and a wafer heating unit disposed below the spin chuck and configured to heat the wafer, wherein the wafer heating unit comprises: a heater disposed below the wafer support unit, configured to serve as a heat source, and configured as a plurality of concentric IR lamp heaters disposed on the same plane; a cooling plate disposed below the heater, configured to provide cool air, and having a flow path disposed therein for flow cooling water; a terminal block configured to supply power to the heater and having a lower end portion in contact with the cooling plate; and a reflector disposed between the heater and the cooling plate and configured to reflect heat emitted from the heater toward the wafer, wherein the reflector has an opening having a shape conforming to a sectional shape of the terminal block so that the lower end portion of the terminal block is in contact with the cooling plate through the opening, and the cooling plate has a recess depressed downward at a position below the opening and having a width smaller than a width of the opening so that a power cable connected to the terminal block is cooled by the cooling plate while being received in the recess.

Assignees

• Semes Co Ltd

Inventors

• Song Soo Han
• Choi Jung Bong
• Yun Kang Seop
• Lee Young Il
• Kang Min Ok

Classifications

• H10P72/0424

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H01L21/6708

  Electricity · mapped topic

• H01L21/67115 Primary

  Electricity · mapped topic