Apparatus and method to process wafers

Patent metadata

Field	Value
Publication number	US-12512350-B2
Application number	US-202016983438-A
Country	US
Kind code	B2
Filing date	Aug 3, 2020
Priority date	Aug 14, 2019
Publication date	Dec 30, 2025
Grant date	Dec 30, 2025

Abstract

The disclosure relates to an apparatus for processing wafers with a process chamber to process wafers held in a wafer boat; a cassette handler chamber to handle wafer cassettes; and, a wafer handler chamber provided with a wafer handler to transfer wafers from wafer cassettes to the wafer boat. The wafer handler is constructed and arranged to transfer wafers between a wafer storage, the wafer boat and wafer cassettes.

First claim

What is claimed is:

1 . A method for processing production wafers comprising:
providing an apparatus comprising:
a process chamber constructed and arranged to process a plurality of wafers within a wafer boat;
a cassette handler chamber to handle wafer cassettes with wafers; and,
a wafer handler chamber provided with a wafer handler to transfer wafers from the wafer cassettes to the wafer boat, wherein the wafer handler chamber is provided with a wafer storage, and the wafer handler is constructed and arranged to transfer wafers between the wafer storage, the wafer boat, and/or wafer cassettes, wherein the wafer handler chamber is provided with a wall and the wafer storage is fixed in or to the wall, and wherein the wafer storage is provided as a box with box opening in the wall in the direction of the wafer handler;
loading a plurality of filler and/or test wafers from a first wafer cassette to the wafer storage with the wafer handler, wherein the wafer storage comprises 2 to 50 wafer holders for holding wafers; after loading filler and/or test wafers to the wafer storage, loading production wafers contained in a second wafer cassette from the second wafer cassette directly to the wafer boat with the wafer handler; after loading the production wafers to the wafer boat, loading at least one filler and/or test wafers from the wafer storage to the wafer boat with the wafer handler; moving the wafer boat into the process chamber; processing the production, the filler and/or tests wafers in the wafer boat in the process chamber; moving the wafer boat out of the process chamber; unloading the filler and/or test wafers from the wafer boat to the wafer storage; and, after unloading the filler and/or test wafers, unloading the production wafers from the wafer boat to the second wafer cassette with the wafer handler.

2 . The method according to claim 1 , further comprising:
after unloading the production wafers from the wafer boat to the first wafer cassette, loading a second set of production wafers from a third wafer cassette to the wafer boat with the wafer handler; loading filler and/or test wafers from the wafer storage to the wafer boat with the wafer handler; moving the wafer boat out of the process chamber; processing the second set of production wafers and the filler and/or test wafers in the wafer boat in the process chamber.

3 . The method according to claim 1 , wherein the step of loading filler and/or test wafers from the wafer storage comprises inserting the filler wafers in a top and a bottom of the wafer boat.

4 . The method according to claim 1 , further comprising unloading the filler and/or test wafers from the wafer boat to the wafer storage with the wafer handler.

5 . The method according to claim 4 , further comprising loading the filler and/or test wafers form the wafer storage to a third wafer cassette with the wafer handler and filler/and or test wafers, in the range of 10 to 25, that have been through the process chamber and are unloaded into the wafer storage.

6 . The method according to claim 1 , wherein in the step of loading production wafers, all production wafers contained in the second wafer cassette are loaded from the second wafer cassette directly to a wafer boat.

7 . The method according to claim 1 , wherein loading the plurality of filler and/or test wafers from the first wafer cassette to a wafer storage comprises loading the plurality of filler and/or test wafers from the first wafer cassette directly to the wafer storage.

8 . The method according to claim 1 , wherein a pitch of the wafer storage is less than a pitch of the wafer cassettes.

9 . The method according to claim 8 , wherein the pitch of the wafer storage is between 4 to 8 mm.

10 . The method according to claim 8 , wherein the pitch of the wafer storage is between 5 to 7 mm.

11 . The method according to claim 1 , wherein loading at least one filler and/or test wafers from the wafer storage to the wafer boat with the wafer handler comprises loading a plurality of filler and/or test wafer storage to the wafer boat with the wafer handler.

12 . The method according to claim 1 , wherein loading a plurality of fillers and/or test wafers from the wafer storage to the wafer boat with the wafer handler comprises loading at least one filler and/or test wafers into a top of the wafer boat and loading at least one filler and/or test wafers into a bottom of the wafer boat.

13 . A method for processing production wafers comprising:
providing an apparatus comprising:
a process chamber constructed and arranged to process a plurality of wafers within a wafer boat;
a cassette handler chamber to handle wafer cassettes with wafers, and
a wafer handler chamber provided with a wafer handler to transfer wafers from the wafer cassettes to the wafer boat, wherein the wafer handler chamber is provided with a wafer storage, and the wafer handler is constructed and arranged to transfer wafers between the wafer storage, the wafer boat, and/or wafer cassettes, wherein the wafer handler chamber is provided with a wall and the wafer storage is fixed in or to the wall, and wherein the wafer storage is provided as a box with box opening in the wall in the direction of the wafer handler;
loading a plurality of filler and/or test wafers to the wafer storage with the wafer handler; processing a batch of wafers, wherein processing a batch of wafers comprises:
loading production wafers to the wafer boat with the wafer handler;
after loading the production wafers to the wafer boat, loading at least one filler and/or test wafers from the wafer storage to the wafer boat with the wafer handler,
moving the wafer boat into the process chamber,
processing the production wafers and the at least one filler and/or test wafers in the wafer boat in the process chamber,
moving the wafer boat out of the process chamber,
unloading the at least one filler and/or test wafers from the wafer boat to the wafer storage, and,
unloading the production wafers from the wafer boat with the wafer handler.

14 . The method according to claim 13 , further comprising:
repeating the step of processing a batch of wafers a plurality of times, wherein the production wafers and the at least one filler and/or test wafers have not been processed in a previous step of processing a batch of wafers; after 10 to 25 test and/or filler wafers have been processed, removing the plurality of test and/or filler wafers form the wafer storage.

15 . The method according to claim 13 , wherein a pitch of the wafer storage is less than a pitch of the wafer cassettes.

16 . The method according to claim 15 , wherein the pitch of the wafer storage is between 4 to 8 mm.

Assignees

• Asm Ip Holding Bv

Inventors

• Oosterlaken Theodorus G M

Classifications

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P72/0616

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/19 Primary

  closed carriers · CPC title

• H10P72/3404

  Storage means · CPC title