Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structures

Patent metadata

Field	Value
Publication number	US-12500109-B2
Application number	US-202217974019-A
Country	US
Kind code	B2
Filing date	Oct 26, 2022
Priority date	Oct 28, 2021
Publication date	Dec 16, 2025
Grant date	Dec 16, 2025

Abstract

Described are electrostatic chuck devices that are useful to support a workpiece while processing the workpiece, upper ceramic layer components of electrostatic chuck assemblies, the upper ceramic layer having a deposited dielectric layer, a relatively smooth finish, or both, and related methods.

First claim

The invention claimed is:

1 . An electrostatic chuck comprising:
a ceramic layer comprising an upper surface and a substantially smooth lower surface, wherein the substantially smooth lower surface of the ceramic layer has a surface roughness (Ra) less than or equal to 0.05 micron, an electrode at the lower surface of the ceramic layer, and a dielectric layer disposed between the ceramic layer and the electrode such that an upper surface of the dielectric layer is in contact with the substantially smooth lower surface of the ceramic layer and a lower surface of the dielectric layer is in contact with the electrode.

2 . The electrostatic chuck of claim 1 , wherein the dielectric layer is a CVD dielectric layer, an ALD dielectric layer, or a PECVD dielectric layer deposited onto the lower surface.

3 . The electrostatic chuck of claim 1 , wherein the dielectric layer has a thickness of less than 200 nanometers.

4 . The electrostatic chuck of claim 1 , wherein the dielectric layer comprises dielectric material that is different from ceramic material of the ceramic layer.

5 . The electrostatic chuck of claim 1 , wherein the dielectric layer comprises: alumina (Al 2 O 3 ), a silicon-based ceramic material (e.g., SiO, SiN), a metal oxide such as zirconium oxide or hafnium oxide.

6 . The electrostatic chuck of claim 1 , wherein the ceramic layer comprises alumina and the dielectric layer comprises alumina.

7 . The electrostatic chuck of claim 1 , wherein the electrode comprises metal having a work function of at least 4.5 electron volts.

8 . The electrostatic chuck of claim 7 , wherein the electrode comprises metal selected from Ni, Co, W, Pb, Pt, Ir, and Au.

9 . The electrostatic chuck of claim 1 , wherein the ceramic layer comprises alumina.

10 . The electrostatic chuck of claim 1 , wherein the dielectric layer is an alumina ALD dielectric layer.

11 . A method of using an electrostatic chuck of claim 1 , the method comprising:
supporting a semiconductor wafer at the upper surface, applying a voltage to the electrode to induce an opposite voltage in the semiconductor wafer, processing the semiconductor wafer, removing the voltage from the electrode, and lifting the wafer from the upper surface.

12 . The method of claim 11 , wherein the voltage is a direct current voltage.

13 . A method of preparing an electrostatic chuck, the method comprising:
on a ceramic layer that comprises an upper surface and a substantially smooth lower surface, forming a dielectric layer on the lower surface, wherein the substantially smooth lower surface of the ceramic layer has a surface roughness (Ra) less than or equal to 0.05 micron, and forming an electrode layer on the dielectric layer such that the dielectric layer is disposed between the ceramic layer and the electrode wherein an upper surface of the dielectric layer is in contact with the lower surface of the ceramic layer and a lower surface of the dielectric layer is in contact with the electrode.

14 . The method of claim 13 , comprising forming the dielectric layer by a method selected from chemical vapor deposition, plasma-assisted chemical vapor deposition, and atomic layer deposition.

15 . The method of claim 13 , further comprising forming the dielectric layer by atomic layer deposition.

16 . The method of claim 13 , further comprising depositing the electrode layer by a method selected from chemical vapor deposition, plasma-enhanced chemical vapor deposition, and atomic layer deposition.

17 . The method of claim 13 , wherein the dielectric layer comprises: alumina (Al 2 O 3 ), a silicon-based ceramic material (e.g., SiO, SiN), a metal oxide such as zirconium oxide or hafnium oxide.

18 . The method of claim 13 , wherein the dielectric layer has a thickness of less than 200 nanometers.

19 . The method of claim 13 , wherein the electrode comprises metal having a work function of at least 4.5 electron volts.

20 . The method of claim 19 , wherein the electrode comprises: Ni, Co, W, Pb, Pt, Ir, or Au.

Assignees

• Entegris Inc

Inventors

• Liu Yan
• Rybczynski Jakub
• Minsky Caleb
• Donnell Steven

Classifications

• H10P72/70

  for supporting or gripping · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title

• C23C16/403

  of aluminium, magnesium or beryllium · CPC title