Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structures
US-12500109-B2 · Dec 16, 2025 · US
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Minsky Caleb patents
Minsky Caleb is listed as an inventor on 11 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Minsky Caleb |
| Total patents | 11 |
| First publication | Nov 11, 2021 |
| Latest publication | Dec 16, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Electrostatic chuck with a charge dissipation structure
US-12444636-B2 · Oct 14, 2025 · US
High clamp force electrostatic chuck for non-flat substrates
US-2025191957-A1 · Jun 12, 2025 · US
Methods and apparatus for processing an electrostatic chuck
US-2024286398-A1 · Aug 29, 2024 · US
Electrostatic chuck having a gas flow feature, and related methods
US-11837492-B2 · Dec 5, 2023 · US
Electrostatic chuck with a charge dissipation structure
US-2023274967-A1 · Aug 31, 2023 · US
Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structures
US-2023136703-A1 · May 4, 2023 · US
Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methods
US-11612972-B2 · Mar 28, 2023 · US
Methods and apparatus for processing an electrostatic chuck
US-2023060192-A1 · Mar 2, 2023 · US
Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methods
US-2022063035-A1 · Mar 3, 2022 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Entegris Inc | 11 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 11 |
| H01L21/6833 | 9 |
| H10P72/72 | 8 |
| H10P72/7616 | 8 |
| H10P72/0434 | 6 |