Electrostatic chuck with protective coating
US-2026026304-A1 · Jan 22, 2026 · US
This page is not indexed by search engines while we improve data quality.
Rybczynski Jakub patents
Rybczynski Jakub is listed as an inventor on 25 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Rybczynski Jakub |
| Total patents | 25 |
| First publication | Oct 15, 2015 |
| Latest publication | Jan 22, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structures
US-12500109-B2 · Dec 16, 2025 · US
Electrostatic chuck with a charge dissipation structure
US-12444636-B2 · Oct 14, 2025 · US
Electrostatic chuck with reduced charge injection into dielectric layer
US-2025273500-A1 · Aug 28, 2025 · US
High clamp force electrostatic chuck for non-flat substrates
US-2025191957-A1 · Jun 12, 2025 · US
Electrostatic chuck prepared by additive manufacturing, and related methods and structures
US-12322634-B2 · Jun 3, 2025 · US
Laser ablation applications for electrostatic chucks
US-2025144746-A1 · May 8, 2025 · US
Electrostatic chuck having a gas flow feature, and related methods
US-11837492-B2 · Dec 5, 2023 · US
Electrostatic chuck with a charge dissipation structure
US-2023274967-A1 · Aug 31, 2023 · US
Electrostatic chuck with charge dissipation coating
US-11742781-B2 · Aug 29, 2023 · US
Recent patents
Latest publications not already listed above.
Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structures
US-2023136703-A1 · May 4, 2023 · US
Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methods
US-11612972-B2 · Mar 28, 2023 · US
Electrostatic chuck and related methods and structures
US-2023084930-A1 · Mar 16, 2023 · US
Spiraling polyphase electrodes for electrostatic chuck
US-11417557-B2 · Aug 16, 2022 · US
Electrostatic chuck prepared by additive manufacturing, and related methods and structures
US-2022208592-A1 · Jun 30, 2022 · US
Spiraling polyphase electrodes for electrostatic chuck
US-2022189811-A1 · Jun 16, 2022 · US
Grounding mechanism for multi-layer for electrostatic chuck, and related methods
US-11309207-B2 · Apr 19, 2022 · US
Electrostatic chuck with embossments that comprise diamond-like carbon and deposited silicon-based material, and related methods
US-2022063035-A1 · Mar 3, 2022 · US
Electrostatic chuck having a gas flow feature, and related methods
US-2021351061-A1 · Nov 11, 2021 · US
Grounding mechanism for multi-layer for electrostatic chuck, and related methods
US-2021028046-A1 · Jan 28, 2021 · US
Electrostatic chuck with charge dissipation coating
US-2020161158-A1 · May 21, 2020 · US
Electrostatic chuck and method of making same
US-10497598-B2 · Dec 3, 2019 · US
Electrostatic chuck with photo-patternable soft protrusion contact surface
US-9721821-B2 · Aug 1, 2017 · US
Electrostatic Chuck and Method of Making Same
US-2016336210-A1 · Nov 17, 2016 · US
Electrostatic Chuck With Photo-Patternable Soft Protrusion Contact Surface
US-2015294891-A1 · Oct 15, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Entegris Inc | 25 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 22 |
| H01L21/6833 | 22 |
| H10P72/7616 | 14 |
| H10P72/72 | 12 |
| H10P72/7614 | 9 |