Apparatus and method of manufacturing display apparatus

Patent metadata

Field	Value
Publication number	US-12494394-B2
Application number	US-202117213726-A
Country	US
Kind code	B2
Filing date	Mar 26, 2021
Priority date	Jul 3, 2020
Publication date	Dec 9, 2025
Grant date	Dec 9, 2025

Abstract

An apparatus for manufacturing a display apparatus includes a substrate. A mask assembly includes an opening, a mask frame surrounding the opening, and at least one mask coupled to the mask frame. An electrostatic chuck is configured to attach the substrate to the at least one mask. A first driver is configured to drive the electrostatic chuck. At least a partial portion of the mask frame does not overlap the electrostatic chuck in a thickness direction of the substrate.

First claim

What is claimed is:

1 . An apparatus for manufacturing a display apparatus, the apparatus comprising:
a substrate; a mask assembly including an opening, a mask frame surrounding the opening, and at least one mask coupled to the mask frame, the mask frame supporting the at least one mask; an electrostatic chuck generating an electrostatic force to attach the substrate to the mask; and a first driver driving the electrostatic chuck, wherein the electrostatic chuck includes:
a body portion that does not overlap the mask frame in a thickness direction of the substrate and has a first thickness; and
a connection portion at least partially overlaps the mask frame and the substrate in the thickness direction of the substrate, an entirety of the connection portion has a second thickness that is less than the first thickness and an inner end of the connection portion and an outer end of the body portion are integral with each other, wherein a portion of the connection portion that overlaps the substrate is spaced apart from the substrate in the thickness direction of the substrate by an amount equal to a difference between the first thickness and the second thickness;
wherein an inner end of the mask frame is spaced apart from the outer end of the body portion of the electrostatic chuck in a cross-sectional view, wherein an empty space is defined between the inner end of the mask frame and the outer end of the body portion of the electrostatic chuck in the cross-sectional view, wherein the mask frame and the substrate are at least partially overlapped in the cross-sectional view, and wherein an outermost end of the connection portion is disposed more outwardly than an outermost end of the mask frame.

2 . The apparatus of claim 1 , wherein the connection portion at least partially surrounds the body portion.

3 . The apparatus of claim 1 , wherein the first driver is coupled to a lateral surface of the electrostatic chuck.

4 . The apparatus of claim 1 , wherein the first driver moves the electrostatic chuck upward or downward.

5 . The apparatus of claim 1 , further comprising a first plate attaching the substrate to the at least one mask by application of magnetic force.

6 . The apparatus of claim 5 , wherein the electrostatic chuck and the first plate are driven independently from each other.

7 . The apparatus of claim 6 , further comprising a second driver driving the first plate,
wherein the second driver moves the first plate upward or downward.

8 . An apparatus for manufacturing a display apparatus, the apparatus comprising:
a substrate; a mask assembly including an opening, a mask frame surrounding the opening, and at least one mask coupled to the mask frame, the mask frame supporting the at least one mask; and an electrostatic chuck generating an electrostatic force to attach the substrate to the mask, the electrostatic chuck including a first portion overlapping the opening in a thickness direction of the substrate to increase an adhesive force attaching the substrate to the at least one mask and a second portion overlapping the mask frame in the thickness direction of the substrate and at least partially overlapping the substrate in the thickness direction of the substrate, wherein an outer end of the first portion and an inner end of the second portion are integral with each other, wherein an entirety of the second portion of the electrostatic chuck has a second thickness that is less than a first thickness of the first portion of the electrostatic chuck, wherein a portion of the second portion that overlaps the substrate is spaced apart from the substrate in the thickness direction of the substrate by an amount equal to a difference between the first thickness and the second thickness; wherein an inner end of the mask frame is spaced apart from the outer end of the first portion of the electrostatic chuck in a cross-sectional view, wherein an empty space is defined between the inner end of the mask frame and the outer end of the first portion of the electrostatic chuck in the cross-sectional view, wherein the mask frame and the substrate are at least partially overlapped in the cross-sectional view, and wherein an outermost end of the second portion is disposed more outwardly than an outermost end of the mask frame.

Assignees

• Samsung Display Co Ltd

Inventors

• Ko Junhyeuk
• Kim Euigyu
• Kim Minseok
• Kim Bongjun
• Yoo Haram
• Chung Kyunghoon

Classifications

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title

• H10K71/166 Primary

  using selective deposition, e.g. using a mask · CPC title

• C23C14/50

  Substrate holders · CPC title

• C23C14/042

  using masks · CPC title