Electrostatic chuck system and method of manufacturing organic light-emitting display apparatus by using the electrostatic chuck system

Patent metadata

Field	Value
Publication number	US-9530988-B2
Application number	US-201514936585-A
Country	US
Kind code	B2
Filing date	Nov 9, 2015
Priority date	Mar 26, 2015
Publication date	Dec 27, 2016
Grant date	Dec 27, 2016

Abstract

Provided are an electrostatic chuck system and a method of manufacturing an organic light-emitting display apparatus by using the electrostatic chuck system. The electrostatic chuck system comprises: a stage in which a first electrode and a second electrode are arranged, the first electrode having a first polarity and the second electrode having a second polarity that is different from the first polarity; a display substrate on the stage, the display substrate including a pixel electrode on a surface thereof; and an optical mask over the surface of the display substrate, the optical mask including a reflection layer and a transfer layer to be transferred to the display substrate, wherein the display substrate has one of the first and second polarities, and the optical mask has the other of the first and second polarities as the display substrate.

First claim

What is claimed is:

1. A method of manufacturing an organic light-emitting display apparatus by using an electrostatic chuck system, the method comprising:
forming a pixel electrode on a display substrate;
forming a reflection layer and a transfer layer on an optical mask;
aligning the display substrate on a stage with the optical mask;
supplying a voltage to the stage to adhere the display substrate to the stage;
supplying a voltage having a first polarity to the display substrate and supplying a voltage having a second polarity that is different from the first polarity to the optical mask; and
forming an intermediate layer on an emission area of the display substrate by irradiating light to the optical mask to transfer the transfer layer from the optical mask to the display substrate.

2. The method of claim 1 , wherein the aligning of the display substrate with the optical mask comprises aligning the reflection layer of the optical mask with a non-emission area of the display substrate.

3. The method of claim 1 , wherein the supplying of the voltage to the stage comprises supplying a voltage having a first polarity to a first electrode and supplying a voltage having a second polarity that is different from the first polarity to a second electrode by using a bipolar method.

4. The method of claim 1 , wherein the supplying of the voltage to the display substrate and to the optical mask comprises connecting the pixel electrode of the display substrate to a first power supply and connecting the reflection layer of the optical mask to the first power supply.

5. The method of claim 4 , wherein the pixel electrode and the reflection layer are independently connected to the first power supply.

6. The method of claim 1 , wherein the supplying of the voltage to the display substrate and to the optical mask comprises charging the display substrate and the optical mask by using a monopolar method.

7. The method of claim 1 , wherein in the forming of the intermediate layer on the emission area of the display substrate, the transfer layer is transferred to the emission area of the display substrate as light irradiated to the optical mask is absorbed by a light absorption layer which is in contact with the transfer layer.

8. The method of claim 7 , wherein in the forming of the intermediate layer on the emission area of the display substrate, the transfer layer is transferred to the emission area of the display substrate as light irradiated to the optical mask passes through a patterned opening in the reflection layer.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Duckjung
• Yun Kiyoung
• Park Jungsun

Classifications

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/72 Primary

  using electrostatic chucks · CPC title

• H10P72/70 Primary

  for supporting or gripping · CPC title

• H10K59/8731

  multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title