Member for plasma processing apparatus, plasma processing apparatus with the same and method for using sintered body
US-11434174-B2 · Sep 6, 2022 · US
Ceramic sintered body and plasma-generating electrode
US12492149B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12492149-B2 |
| Application number | US-202519013139-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 8, 2025 |
| Priority date | Jan 15, 2024 |
| Publication date | Dec 9, 2025 |
| Grant date | Dec 9, 2025 |
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- Title
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Abstract
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A ceramic sintered body contains a first particular element consisting of five or six elements selected from among titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W); a second particular element consisting of one element selected from yttrium (Y) and aluminum (Al); and elemental carbon (C). The total amount of the first particular element, the second particular element, and elemental carbon is 98 at % or more. The ceramic sintered body has a plurality of microstructures having respective compositions different from one another. One of the plurality of microstructures includes a solid solution containing at least three members of the first particular element.
First claim
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What is claimed is: 1 . A ceramic sintered body, which comprises a first particular element consisting of five or six elements selected from among the group consisting of titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W); a second particular element consisting of one element selected from the group consisting of yttrium (Y) and aluminum (Al); and elemental carbon (C), wherein a total amount of the first particular element, the second particular element, and elemental carbon is 98 at % or more; the ceramic sintered body has a plurality of microstructures having respective compositions different from one another; one of the plurality of microstructures includes a solid solution containing at least three members of the first particular element. 2 . The ceramic sintered body according to claim 1 , wherein another one of the plurality of microstructures has undergone spinodal decomposition. 3 . The ceramic sintered body according to claim 2 , wherein another one of the plurality of microstructures includes a solid solution containing at least two members of the first particular element. 4 . The ceramic sintered body according to claim 2 , which contains the second particular element in an amount of 3,000 at. ppm or less. 5 . The ceramic sintered body according to claim 2 , which contains elemental carbon in an amount of 45 at % or more and 55 at % or less. 6 . The ceramic sintered body according to claim 2 , which contains elemental iron (Fe) in an amount of 800 at. ppm or less. 7 . A plasma-generating electrode, comprising: a ceramic sintered body as recited in claim 2 . 8 . The ceramic sintered body according to claim 1 , wherein another one of the plurality of microstructures includes a solid solution containing at least two members of the first particular element. 9 . The ceramic sintered body according to claim 1 , which contains the second particular element in an amount of 3,000 at. ppm or less. 10 . The ceramic sintered body according to claim 1 , which contains elemental carbon in an amount of 45 at % or more and 55 at % or less. 11 . The ceramic sintered body according to claim 1 , which contains elemental iron (Fe) in an amount of 800 at. ppm or less. 12 . A plasma-generating electrode, comprising: a ceramic sintered body as recited in claim 1 .
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Classifications
mainly consisting of carbon-silicon compounds, carbon or silicon · CPC title
Tungsten carbides · CPC title
Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina · CPC title
Stabilised zirconias, e.g. YSZ or cerium stabilised zirconia · CPC title
Refractory metal carbides · CPC title
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- What does patent US12492149B2 cover?
- A ceramic sintered body contains a first particular element consisting of five or six elements selected from among titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W); a second particular element consisting of one element selected from yttrium (Y) and aluminum (Al); and elemental carbon (C). The total amount of the first part…
- Who is the assignee on this patent?
- Niterra Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H01J37/3255. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Dec 09 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).