Organometallic solution based high resolution patterning compositions and corresponding methods

Patent metadata

Field	Value
Publication number	US-12487522-B2
Application number	US-202418634119-A
Country	US
Kind code	B2
Filing date	Apr 12, 2024
Priority date	Oct 23, 2014
Publication date	Dec 2, 2025
Grant date	Dec 2, 2025

Abstract

Organometallic radiation resist compositions are described based on tin ions with alkyl ligands. Some of the compositions have branched alkyl ligands to provide for improved patterning contrast while maintaining a high degree of solution stability. Blends of compounds with distinct alkyl ligands can provide further improvement in the patterning. High resolution patterning with a half-pitch of no more than 25 nm can be achieved with a line width roughness of no more than about 4.5 nm. Synthesis techniques have been developed that allow for the formation of alkyl tin oxide hydroxide compositions with very low metal contamination.

First claim

What is claimed is:

1 . A radiation-sensitive structure comprising a substrate and a film supported by the substrate, the film comprising a composition having one or more Sn—C bonds and at least one Sn—O bond, wherein the film has a refractive index greater than 1.65 or an extinction coefficient greater than zero for a wavelength of equal to or less than 248 nm, and wherein the composition condenses upon absorption of radiation.

2 . The structure of claim 1 wherein the substrate comprises a silicon wafer.

3 . The structure of claim 1 wherein the film has a refractive index maximum at a wavelength equal to or less than 248 nm.

4 . The structure of claim 1 wherein the composition has at least one radiation sensitive Sn—C bond.

5 . The structure of claim 1 wherein the film comprises one or more functional non-tin metals.

6 . The structure of claim 5 wherein the functional non-tin metals comprise at least one of In, Sb, Hf, Ti, V, Mo, and W.

7 . The structure of claim 1 wherein the film is sensitive to EUV, UV, or e-beam radiation.

8 . The structure of claim 1 wherein the film has an average thickness from about 1 nm to about 250 nm.

9 . The structure of claim 1 wherein the film has an average thickness from about 2 nm to about 40 nm.

10 . The structure of claim 1 wherein the film has a thickness variation of no more than about 50% from the average thickness.

11 . The structure of claim 1 wherein the film comprises a metal oxo-hydroxo network and organic ligands with metal cations having organic ligands forming metal carbon bonds, wherein the metal oxo-hydroxo network has Sn—O—H linkages, Sn—O—Sn linkages, and radiation sensitive Sn—C bonds.

12 . The structure of claim 11 wherein the organic ligands forming the metal carbon bonds comprise an alkyl group, where the alkyl group is bonded to the tin at a secondary or tertiary carbon atom.

13 . A radiation-sensitive structure comprising a substrate and a film supported by the substrate, the film comprising a plurality of Sn—C bonds and Sn—O bonds, wherein the film has a refractive index greater than 1.65 or an extinction coefficient greater than zero for a wavelength of equal to or less than 248 nm, and wherein at least a portion of carbon atoms forming the Sn—C bonds comprise secondary or tertiary carbon atoms.

14 . The structure of claim 13 wherein the substrate comprises a silicon wafer.

15 . The structure of claim 13 wherein the film comprises one or more functional non-tin metals.

16 . The structure of claim 15 wherein the functional non-tin metals comprise at least one of In, Sb, Hf, Ti, V, Mo, or W.

17 . The structure of claim 13 wherein the film has an average thickness from about 1 nm to about 250 nm.

18 . The structure of claim 13 wherein the film has an average thickness from about 2 nm to about 40 nm.

Assignees

• Inpria Corp

Inventors

• Meyers Stephen T
• Anderson Jeremy T
• Edson Joseph B
• Jiang Kai
• Keszler Douglas A
• Kocsis Michael K
• Telecky Alan J
• Cardineau Brian J

Classifications

• G03F7/32

  Liquid compositions therefor, e.g. developers · CPC title

• G03F7/2004

  characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light · CPC title

• G03F7/322

  Aqueous alkaline compositions · CPC title

• G03F7/0043 Primary

  Chalcogenides; Silicon, germanium, arsenic or derivatives thereof; Metals, oxides or alloys thereof (G03F7/0044 takes precedence) · CPC title

• G03F7/325

  Non-aqueous compositions · CPC title