Thermal chemical vapor deposition coating
US-2018258529-A1 · Sep 13, 2018 · US
Dielectric article
US12473635B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12473635-B2 |
| Application number | US-202117328317-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 24, 2021 |
| Priority date | Jun 3, 2020 |
| Publication date | Nov 18, 2025 |
| Grant date | Nov 18, 2025 |
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Abstract
Official abstract text for this publication.
Dielectric coatings, articles having dielectric coatings, and systems including coating having dielectric coatings are disclosed. The dielectric article includes a substrate having hidden surfaces and a dielectric coating on the hidden surfaces of the substrate. The dielectric coating has a bulk resistivity of at least 108 Ω·cm and a thickness of between 30 nanometers and 3,000 nanometers.
First claim
Opening claim text (preview).
What is claimed is: 1 . A dielectric article, comprising: a substrate having hidden surfaces; and a dielectric coating on the hidden surfaces of the substrate, the dielectric coating having a bulk resistivity of at least 10 8 Ohms·cm and a thickness between 30 nanometers and 3,000 nanometers; wherein the dielectric coating comprises silicon, oxygen, carbon, and hydrogen. 2 . The dielectric article of claim 1 , wherein the substrate further comprises visible surfaces and the dielectric coating is on the visible surfaces. 3 . The dielectric article of claim 1 , wherein the bulk resistivity at least 10 12 Ohms·cm. 4 . The dielectric article of claim 1 , wherein the bulk resistivity at least 10 13 Ohms·cm. 5 . The dielectric article of claim 1 , wherein the thickness is between 50 nanometers and 2,000 nanometers. 6 . The dielectric article of claim 1 , wherein the thickness is between 100 nanometers and 1,500 nanometers. 7 . The dielectric article of claim 1 , wherein the thickness is between 300 nanometers and 1,500 nanometers. 8 . The dielectric article of claim 1 , wherein the thickness is between 400 nanometers and 1,500 nanometers. 9 . The dielectric article of claim 1 , wherein the thickness is between 500 and 1,500 nanometers. 10 . The dielectric article of claim 1 , wherein the dielectric coating comprises multiple layers having amorphous silicon and hydrogen. 11 . The dielectric article of claim 1 , wherein the dielectric coating comprises silicon, nitrogen, and hydrogen. 12 . The dielectric article of claim 1 , wherein the dielectric article is a portion of an antenna. 13 . The dielectric article of claim 1 , wherein the dielectric article is an antenna. 14 . A radio frequency (rf) system containing the dielectric article of claim 1 . 15 . A transmission line containing the dielectric article of claim 1 . 16 . The dielectric article of claim 1 , wherein the substrate is a stainless steel. 17 . The dielectric article of claim 1 , wherein the substrate is an aluminum alloy. 18 . A dielectric article, comprising: a stainless steel substrate having hidden surfaces and visible surfaces; and a silicon-containing dielectric coating on the hidden surfaces and the visible surfaces of the stainless steel substrate, the silicon-containing dielectric coating having a bulk resistivity of at least 10 12 Ohms·cm and a thickness of between 100 nanometers and 1,500 nanometers; wherein the dielectric coating comprises silicon, oxygen, carbon, and hydrogen. 19 . A dielectric article, comprising: a metallic substrate having hidden surfaces and visible surfaces; and a silicon-containing dielectric coating on the hidden surfaces and the visible surfaces of the metallic substrate, the silicon-containing dielectric coating having a bulk resistivity of at least 10 12 Ohms·cm and a thickness of between 100 nanometers and 1,500 nanometers; wherein the dielectric coating comprises multiple layers having amorphous silicon and hydrogen; wherein the dielectric coating comprises silicon, oxygen, carbon, and hydrogen.
Assignees
Inventors
Classifications
1 mil or less · CPC title
Microstrips; Strip lines · CPC title
- C23C16/24Primary
Deposition of silicon only · CPC title
Silicon nitride · CPC title
containing silicon · CPC title
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Frequently asked questions
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- What does patent US12473635B2 cover?
- Dielectric coatings, articles having dielectric coatings, and systems including coating having dielectric coatings are disclosed. The dielectric article includes a substrate having hidden surfaces and a dielectric coating on the hidden surfaces of the substrate. The dielectric coating has a bulk resistivity of at least 108 Ω·cm and a thickness of between 30 nanometers and 3,000 nanometers.
- Who is the assignee on this patent?
- Silcotek Corp
- What technology area does this patent fall under?
- Primary CPC classification C23C16/24. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Nov 18 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 12 related publications on this page (citations in our corpus or others sharing the same primary CPC).