Dry etching with etch byproduct self-cleaning

Patent metadata

Field	Value
Publication number	US-12469715-B2
Application number	US-202318221063-A
Country	US
Kind code	B2
Filing date	Jul 12, 2023
Priority date	Oct 13, 2022
Publication date	Nov 11, 2025
Grant date	Nov 11, 2025

Abstract

A method includes providing, within an etch chamber, a base structure including a target layer disposed on a substrate, and an etch mask disposed on the target layer, dry etching, within the etch chamber, the target layer using thionyl chloride to obtain a processed base structure, and after forming the plurality of features. The processed base structure includes a plurality of features and a plurality of openings defined by the etch mask. The method further includes removing the processed base structure from the etch chamber. In some embodiments, the target layer includes carbon. In some embodiments, the dry etching is performed at a sub-zero degree temperature.

First claim

What is claimed is:

1 . A method comprising:
providing, within an etch chamber, a base structure comprising a target layer disposed on a substrate, and an etch mask disposed on the target layer, wherein the target layer comprises carbon; dry etching, within the etch chamber at a sub-zero degree Celsius temperature, the target layer using thionyl chloride to obtain a processed base structure, the processed base structure comprising a plurality of features and a plurality of openings defined by the etch mask, wherein each feature of the plurality of features has an aspect ratio greater than or equal to about 60:1; and removing the processed base structure from the etch chamber.

2 . The method of claim 1 , wherein the substrate comprises a dielectric layer, and wherein the target layer is disposed directly on the dielectric layer.

3 . The method of claim 1 , wherein providing the base structure comprises forming, on the target layer, an etch mask stack comprising the etch mask, and wherein the etch mask stack comprises the etch mask disposed on a bottom anti-reflective coating (BARC) layer.

4 . The method of claim 1 , wherein the etch mask comprises at least one of: silicon oxynitride or boron nitride.

5 . The method of claim 1 , wherein the target layer is a hardmask.

6 . The method of claim 1 , wherein the sub-zero degree Celsius temperature is less than or equal to about −10° C.

7 . A method comprising:
providing, within an etch chamber, a base structure comprising a target layer disposed on a substrate, and an etch mask disposed on the target layer; and dry etching, within the etch chamber at a sub-zero degree Celsius temperature, the target layer using thionyl chloride to obtain a processed base structure, the processed base structure comprising a plurality of features and a plurality of openings defined by the etch mask, wherein at least one feature of the plurality of features has an aspect ratio greater than or equal to about 60:1.

8 . The method of claim 7 , wherein the substrate comprises a dielectric layer, and wherein the target layer is disposed directly on the dielectric layer.

9 . The method of claim 7 , wherein providing the base structure comprises forming, on the target layer, an etch mask stack comprising the etch mask, and wherein the etch mask stack comprises the etch mask disposed on a bottom anti-reflective coating (BARC) layer.

10 . The method of claim 7 , wherein the sub-zero degree Celsius temperature is less than or equal to about −10° C.

11 . The method of claim 7 , wherein the etch mask comprises at least one of: silicon oxynitride or boron nitride.

12 . The method of claim 7 , wherein the target layer is a hardmask.

Assignees

• Applied Materials Inc

Inventors

• Yao Zhonghua
• Fu Qian
• Saly Mark J
• Yang Yang
• Anthis Jeffrey W
• Knapp David
• Sathiyanarayanan Rajesh

Classifications

• H10P72/0421 Primary

  for drying etching · CPC title

• H10P50/283

  by chemical means · CPC title

• H10P50/73 Primary

  using masks for insulating materials · CPC title

• H10P50/285 Primary

  of materials not containing Si, e.g. PZT or Al2O3 · CPC title

• H01L21/67069

  Electricity · mapped topic