Compositions and methods for making silicon containing films
US-2015014823-A1 · Jan 15, 2015 · US
US12410515B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12410515-B2 |
| Application number | US-202117159488-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 27, 2021 |
| Priority date | Jan 29, 2020 |
| Publication date | Sep 9, 2025 |
| Grant date | Sep 9, 2025 |
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A contaminant trap system of a reactor system may comprise a baffle plate stack comprising at least one baffle plate comprising an aperture spanning through a baffle plate body of the baffle plate, and a solid body portion; and at least one complementary baffle plate comprising a complementary aperture spanning through a complementary baffle plate body of the complementary baffle plate, and a complementary solid body portion. The at least one baffle plate and the at least one complementary baffle plate may be disposed in a baffle plate order between a first end and a second end of the baffle plate stack in which the baffle plates alternate with the complementary baffle plates, such that no two baffle plates or no two complementary baffle plates are adjacent in the baffle plate order.
Opening claim text (preview).
What is claimed is: 1. A contaminant trap system of a reactor system, comprising: a trap housing comprising a housing outer wall; a plurality of baffle plates disposed in the trap housing, wherein each baffle plate comprises a design comprising: a first plurality of apertures spanning through a baffle plate body between a top baffle plate surface and a bottom baffle plate surface; and a solid body portion, wherein the design for each baffle plate is the same; a plurality of complementary baffle plates disposed in the trap housing between a first end and a second end of the trap housing, wherein each complementary baffle plate comprises a complementary design comprising: a first plurality of complementary apertures spanning through a complementary baffle plate body between a top complementary baffle plate surface and a bottom complementary baffle plate surface; and a complementary solid body portion, wherein the complementary design for each complementary baffle plate is the same, and wherein the complementary design is different than the design for each baffle plate, wherein the plurality of baffle plates and the plurality of complementary baffle plates are comprised in a baffle plate stack and disposed in a baffle plate order between a first end and a second end of the baffle plate stack in which the plurality of baffle plates alternates with the plurality of complementary baffle plates such that no two baffle plates from the plurality of baffle plates and no two complementary baffle plates from the plurality of complementary baffle plates are adjacent in the baffle plate order, wherein a first baffle plate and a second baffle plate, from the plurality of baffle plates, and a first complementary baffle plate, from the plurality of complementary baffle plates, are disposed in the baffle plate order in the trap housing such that the first baffle plate is adjacent to the first complementary baffle plate and the second baffle plate is adjacent to the first complementary baffle plate, and wherein the first baffle plate and the first complementary baffle plate are disposed in a baffle plate orientation such that at least a portion of a first aperture of the first baffle plate and at least a portion of the complementary solid body portion of the first complementary baffle plate are aligned along a first axis spanning between the first end and the second end of the trap housing, and such that at least a portion of the solid body portion of the first baffle plate and the second baffle plate, and at least a portion of a complementary aperture of the first plurality of complementary apertures of the first complementary baffle plate, are aligned along a second axis spanning between the first end and the second end of the trap housing, wherein the first plurality of apertures of each baffle plate is disposed on a radially inward portion of each baffle plate, and wherein the solid body portion is disposed on a radially outward portion of each baffle plate, wherein the radially outward portion of each baffle plate does not comprise an aperture, and wherein the first plurality of complementary apertures of each complementary baffle plate is disposed on a radially outward portion of each complementary baffle plate, and wherein the complementary solid body portion is disposed on a radially inward portion of each complementary baffle plate, wherein the radially inward portion of each complementary baffle plate does not comprise a complementary aperture. 2. The contaminant trap system of claim 1 , further comprising a coupling rod disposed in the trap housing and spanning between the first end and the second end of the trap housing, wherein the first baffle plate comprises a first coupling hole disposed through the first baffle plate body, wherein the coupling rod is disposed through the first coupling hole, and wherein the first complementary baffle plate comprises a first complementary coupling hole disposed through the first complementary baffle plate body, wherein the coupling rod is disposed through the first complementary coupling hole. 3. The contaminant trap system of claim 2 , wherein the coupling rod comprises a noncircular cross-section, wherein the first coupling hole of the first baffle plate and the first complementary coupling hole of the first complementary baffle plate each comprise a shape complementary to the noncircular cross-section of the coupling rod. 4. The contaminant trap system of claim 3 , wherein a reference point of the first coupling hole is disposed in a first orientation, and a complementary reference point of the first complementary coupling hole is disposed in a first complementary orientation, wherein the first orientation and the first complementary orientation dispose the first baffle plate and the first complementary baffle plate about the coupling rod to achieve the baffle plate orientation. 5. The contaminant trap system of claim 4 , further comprising a spacer between the first baffle plate and the first complementary baffle plate to provide a space therebetween. 6. The contaminant trap system of claim 1 , wherein the baffle plate stack further comprises an end plate disposed such that, at least one of: the first baffle plate is between the end plate and the first complementary baffle plate, or the first complementary baffle plate is between the end plate and the first baffle plate, wherein the end plate comprises an end plate aperture and an end plate solid body portion. 7. The contaminant trap system of claim 6 , wherein the housing outer wall of the trap housing comprises an interior wall surface, wherein an outer edge of at least one of the first baffle plate and the first complementary baffle plate is disposed adjacent to the interior wall surface. 8. The contaminant trap system of claim 7 , wherein at least one of the top baffle plate surface, the bottom baffle plate surface, the top complementary baffle plate surface, the bottom complementary baffle plate surface, the outer edge of at least one of the first baffle plate and the first complementary baffle plate, and the interior wall surface is textured. 9. The contaminant trap system of claim 6 , further comprising a heater jacket coupled to the trap housing. 10. The containment trap system of claim 1 , wherein the baffle plate order is palindromic between the first end and the second end of the baffle plate stack.
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