Prediction and metrology of stochastic photoresist thickness defects

Patent metadata

Field	Value
Publication number	US-12406197-B2
Application number	US-202117337373-A
Country	US
Kind code	B2
Filing date	Jun 2, 2021
Priority date	Oct 28, 2020
Publication date	Sep 2, 2025
Grant date	Sep 2, 2025

Abstract

A mask pattern for a semiconductor device can be used as an input to determine a photoresist thickness probability distribution using a machine learning module. For example, the machine learning module can determine a probability map of Z-height. This can be used to determine stochastic variation in photoresist thickness for a semiconductor device. The Z-height may be calculated at a coordinate in the X-direction and Y-direction.

First claim

What is claimed is:

1. A method comprising:
inputting a mask pattern for a semiconductor device into a machine learning module, wherein the mask pattern is a design file that includes a polygon shape of a mask; and
determining a photoresist thickness probability distribution for the semiconductor device based on the mask pattern using the machine learning module, wherein the machine learning module includes a first model, a second model, and a third model, wherein the first model predicts a mask diffraction pattern given a rasterized mask image, wherein the second model predicts an image in photoresist given the mask diffraction pattern, and wherein the third model predicts photoresist thickness distribution given the image in photoresist.

2. The method of claim 1 , wherein the machine learning module is configured to operate a general linear model, a neural network, a Bayesian inference, a Bayesian neural network, a deep neural network, a convolutional neural network, or a support vector machine.

3. The method of claim 1 , wherein the machine learning module is further configured to determine a probability map of photoresist thickness.

4. The method of claim 1 , wherein the thickness probability distribution provides photoresist thickness information for a coordinate in the X-direction and Y-direction.

5. The method of claim 1 , wherein the machine learning module is further configured to determine a local intensity for a coordinate in the X-direction and Y-direction.

6. The method of claim 1 , wherein the machine learning module is further configured to determine an image contrast for a coordinate in the X-direction and Y-direction.

7. The method of claim 1 , wherein the machine learning module is further configured to determine an image gradient for a coordinate in the X-direction and Y-direction.

8. The method of claim 1 , wherein the machine learning module is further configured to determine an image log slope for a coordinate in the X-direction and Y-direction.

9. The method of claim 1 , wherein the machine learning module is further configured to determine a normalized image log slope for a coordinate in the X-direction and Y-direction.

10. The method of claim 1 , wherein the thickness probability distribution is determined to approximately 1 ppb accuracy level.

11. The method of claim 1 , further comprising training the machine learning module, wherein the training includes:
generating intermediate data from a simulator using a collection of mask patterns; and
using the intermediate data to train the machine learning module.

12. A computer program product comprising a non-transitory computer readable storage medium having a computer readable program embodied therewith, the computer readable program configured to carry out the method of claim 1 .

13. A system comprising:
a machine learning module operable using a processor that is in electronic communication with an imaging system that includes an energy source and a detector, wherein the machine learning module is configured to determine a photoresist thickness probability distribution for a semiconductor device based on a mask pattern using the machine learning module, wherein the mask pattern is a design file that includes a polygon shape of a mask, wherein the machine learning module includes a first model, a second model, and a third model, wherein the first model predicts a mask diffraction pattern given a rasterized mask image, wherein the second model predicts an image in photoresist given the mask diffraction pattern, and wherein the third model predicts photoresist thickness distribution given the image in photoresist.

14. The system of claim 13 , wherein the machine learning module is configured to operate a general linear model, a neural network, a Bayesian inference, a Bayesian neural network, a deep neural network, a convolutional neural network, or a support vector machine.

15. The system of claim 13 , wherein the machine learning module is further configured to determine a probability map of photoresist thickness.

16. The system of claim 13 , wherein the thickness probability distribution provides photoresist thickness information for a coordinate in the X-direction and Y-direction.

17. The system of claim 13 , wherein the machine learning module is further configured to determine a local intensity, an image contrast, an image gradient, an image log slope, or a normalized image log slope for a coordinate in the X-direction and Y-direction.

18. The system of claim 13 , wherein the thickness probability distribution is determined to approximately 1 ppb of photoresist.

19. The system of claim 13 , wherein the machine learning module is trained using intermediate data from a simulator, wherein the intermediate data is generated from a collection of mask patterns.

Assignees

• Kla Corp

Inventors

• Burov Anatoly
• Parsey Guy
• Bai Kunlun
• Vukkadala Pradeep
• Zhang Cao
• Graves John S
• Li Xiaohan
• Higgins Craig

Classifications

• G06N3/09

  Supervised learning · CPC title

• G06N3/096

  Transfer learning · CPC title

• G06N3/0464

  Convolutional networks [CNN, ConvNet] · CPC title

• G06N20/00

  Machine learning · CPC title

• G03F1/70 Primary

  Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging · CPC title