Method to calibrate, predict, and control stochastic defects in EUV lithography
US-12579631-B2 · Mar 17, 2026 · US
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Parsey Guy patents
Parsey Guy is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Parsey Guy |
| Total patents | 12 |
| First publication | Apr 28, 2022 |
| Latest publication | Mar 17, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method to calibrate, predict, and control stochastic defects in EUV lithography
US-12561791-B2 · Feb 24, 2026 · US
Method to calibrate, predict, and control stochastic defects in EUV lithography
US-12561790-B2 · Feb 24, 2026 · US
Prediction and metrology of stochastic photoresist thickness defects
US-12406197-B2 · Sep 2, 2025 · US
Method to calibrate, predict, and control stochastic defects in euv lithography
US-2025104216-A1 · Mar 27, 2025 · US
Method to calibrate, predict, and control stochastic defects in euv lithography
US-2025104214-A1 · Mar 27, 2025 · US
Method to calibrate, predict, and control stochastic defects in euv lithography
US-2025104215-A1 · Mar 27, 2025 · US
Lithography mask repair by simulation of photoresist thickness evolution
US-11966156-B2 · Apr 23, 2024 · US
Lithography mask repair by simulation of photoresist thickness evolution
US-2024061327-A1 · Feb 22, 2024 · US
Systems and methods for setting up a physics-based model
US-11868689-B2 · Jan 9, 2024 · US
Recent patents
Latest publications not already listed above.
Systems and methods for setting up a physics-based model
US-2023112164-A1 · Apr 13, 2023 · US
Prediction and metrology of stochastic photoresist thickness defects
US-2022129775-A1 · Apr 28, 2022 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Corp | 12 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/705 | 6 |
| G06T2207/30242 | 6 |
| G06T7/0006 | 6 |
| G06T2207/20081 | 6 |
| G06T2207/30148 | 6 |