Apparatus for processing a substrate and method of operating the same

Patent metadata

Field	Value
Publication number	US-12392554-B2
Application number	US-202217990481-A
Country	US
Kind code	B2
Filing date	Nov 18, 2022
Priority date	Jun 17, 2019
Publication date	Aug 19, 2025
Grant date	Aug 19, 2025

Abstract

An apparatus for processing a substrate includes a reaction tube, a side cover, a heater, a first gas supplier, a second gas supplier and a controller. The reaction tube is configured to receive a substrate boat in which a plurality of the substrate is received to process the substrate. The side cover is configured to receive the reaction tube. The heater lines the interior of the side cover. The first gas supplier is provided to an upper portion of the side cover to supply a cooling gas at a first supplying rate to a space between the side cover and the reaction tube. The second gas supplier is provided to a lower portion of the side cover to supply the cooling gas at a second supplying rate different from the first supplying rate to the space between the side cover and the reaction tube. The controller controls the reaction tube.

First claim

What is claimed is:

1. An apparatus for processing a substrate, the apparatus including an internal space divided into a plurality of sub-spaces in a vertical direction, the apparatus comprising:
a reaction tube arranged at the internal space, the reaction tube that processes a plurality of substrates stacked in the vertical direction;
a side cover arranged to surround the reaction tube, the side cover including a plurality of gas transmission holes arranged along the vertical direction at a selected portion of the side cover; and
a heater arranged between the reaction tube and the side cover, the heater including a plurality of unit heaters for each of the plurality of sub-spaces, the plurality of unit heaters separated by a is plurality of first holes,
wherein each of the unit heaters includes an adiabatic block for surrounding the reaction tube, the adiabatic block including a plurality of second holes radially formed therein and divided into a plurality of adiabatic regions; and a coil arranged on an inner surface of the adiabatic block,
wherein a cooling gas is transmitted through the plurality of first holes and the plurality of second holes, and temperature of the adiabatic block is lowered by the cooling gas flowing through the plurality of first and second holes.

2. The apparatus of claim 1 , further comprising:
a cooling gas supplier that supplies a first amount of cooling gas to an upper portion of the internal space and supplies a second amount of the cooling gas smaller than the first amount to a lower portion of the internal space.

3. The apparatus of claim 1 , further comprising:
a first gas supplier that supplies the cooling gas to an upper portion of the internal space, the first gas supplier including a first duct installed outside of the side cover to define a first external cooling space between the side cover and the first duct, and at least one first gas line connected to the first duct to transmit injected cooling gas to the first external cooling space; and
a second gas supplier that supplies the cooling gas to the lower portion of the internal space, the second gas supplier including a second duct installed outside of the side cover under the first duct to define a second external cooling space between the side cover and the second duct, and at least one second gas line connected to the second duct to transmit injected cooling gas to the second external cooling space.

4. The apparatus of claim 3 , wherein the first duct and the second duct are installed to cover the plurality of gas transmission holes arranged in the side cover,
wherein the cooling gas in the first and second external cooling spaces transmits to inside of the side cover through the plurality of gas transmission holes.

5. The apparatus of claim 3 , wherein a length of the first duct is longer than a length of the second duct.

6. The apparatus of claim 3 , wherein the number of first transmission holes covered by the first duct is greater than the number of transmission holes covered by the second duct.

7. The apparatus of claim 3 , further comprising:
an exhauster installed on the side cover, the exhauster including a first exhaust line communicating with the internal space and a second exhaust line.

8. The apparatus of claim 7 , wherein a diameter of the first exhaust line is greater than a diameter of the first gas line and a diameter of the second gas line.

9. The apparatus of claim 7 , further comprising:
a lid that seals an opened upper surface of the side cover,
wherein the first exhaust line is inserted into the lid.

10. The apparatus of claim 1 , further comprising:
a controller that controls a cooling rate of the reaction tube.

11. The apparatus of claim 10 , further comprising at least one temperature sensor that measures temperatures of the plurality of sub-spaces.

12. The apparatus of claim 10 , wherein the controller receives measured temperatures from the temperature sensor to independently control the plurality of unit heaters based on the measured temperatures.

13. The apparatus of claim 12 , wherein each of the unit heaters further includes an adhesion pattern for bonding the adiabatic block and the side cover.

14. The apparatus of claim 13 , wherein a thickness of the adhesion pattern is shallower than a thickness of the adiabatic block.

Assignees

• Sk Hynix Inc
• Eugene Technology Co Ltd

Inventors

• Jung Min Jin
• Kim Tae Hwan
• Kang Min Woong
• Yoo Hyun Jun
• Kang Sung Ho
• Park Song Hwan
• Kim Bo Sun
• Lee Hong Won
• Cho Joo Hyun
• Jin Yong Tak

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title

• F27B5/18

  Arrangement of controlling, monitoring, alarm or like devices · CPC title

• F27B5/14

  Arrangements of heating devices · CPC title

• F27B2005/064

  disposed in the furnace, around the chamber, e.g. coils · CPC title