Wafer with regions of low oxygen concentration

US12359343B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-12359343-B2
Application numberUS-202017634044-A
CountryUS
Kind codeB2
Filing dateAug 9, 2020
Priority dateAug 9, 2019
Publication dateJul 15, 2025
Grant dateJul 15, 2025

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Abstract

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A single crystal silicon wafer has a thickness between a first surface and an opposite second surface from 50 μm to 300 μm. The wafer includes a first region extending a first depth from the first surface. The first region has a reduced oxygen concentration relative to an adjacent region of the wafer. The wafer has a bulk minority carrier lifetime greater than 100 μs.

First claim

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What is claimed is: 1. A semiconductor material comprising: a single crystal silicon ribbon floating on molten silicon, wherein the single crystal silicon ribbon has a thickness between a first surface and a second surface from 50 μm to 300 μm, the first surface and the second surface are opposite each other, the single crystal silicon ribbon includes a first region extending a first depth from the first surface toward the second surface, the first region has a reduced oxygen concentration relative to a bulk region of the single crystal silicon ribbon, and the single crystal silicon ribbon has a bulk minority carrier lifetime greater than 100 μs. 2. The semiconductor material of claim 1 , wherein the first surface and the second surface are flat. 3. The semiconductor material of claim 1 , wherein the first region has an oxygen concentration from 0.1 to 8.0 ppma. 4. The semiconductor material of claim 1 , wherein the bulk region of the single crystal silicon ribbon has an oxygen concentration from 8 to 25 ppma. 5. The semiconductor material of claim 1 , wherein the first depth is at least 5 μm. 6. The semiconductor material of claim 1 , wherein the first depth is from 10% to 90% of the thickness. 7. The semiconductor material of claim 6 , wherein the first depth is approximately 30% of the thickness. 8. The semiconductor material of claim 1 , wherein the first region has a reduced concentration of bulk micro defects relative to the bulk region of the single crystal silicon ribbon. 9. The semiconductor material of claim 1 , further comprising a second region extending a second depth from the second surface toward the first surface, and wherein the second region has a reduced oxygen concentration relative to the bulk region of the single crystal silicon ribbon disposed between the first region and the second region. 10. The semiconductor material of claim 9 , wherein the second region has an oxygen concentration from 0.1 to 8.0 ppma. 11. The semiconductor material of claim 9 , wherein the second depth is at least 5 μm. 12. The semiconductor material of claim 9 , wherein the first depth and the second depth combined is from 10% to 90% of the thickness. 13. The semiconductor material of claim 9 , wherein the second depth is approximately 10% of the thickness. 14. The semiconductor material of claim 9 , wherein the first region and the second region have a reduced concentration of bulk micro defects relative to the bulk region of the single crystal silicon ribbon disposed between the first region and the second region. 15. The semiconductor material of claim 9 , wherein the first depth and the second depth are different distances. 16. The semiconductor material of claim 1 , wherein the single crystal silicon ribbon is rectangular. 17. The semiconductor material of claim 1 , wherein the single crystal silicon ribbon further includes a dopant. 18. The semiconductor material of claim 1 , wherein the single crystal silicon ribbon has an average oxygen precipitate count from 0 to 1e11/cm3 in the first region.

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What does patent US12359343B2 cover?
A single crystal silicon wafer has a thickness between a first surface and an opposite second surface from 50 μm to 300 μm. The wafer includes a first region extending a first depth from the first surface. The first region has a reduced oxygen concentration relative to an adjacent region of the wafer. The wafer has a bulk minority carrier lifetime greater than 100 μs.
Who is the assignee on this patent?
Blue Origin Mfg Llc
What technology area does this patent fall under?
Primary CPC classification H10F77/122. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Jul 15 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 12 related publications on this page (citations in our corpus or others sharing the same primary CPC).