Multilayer structure for reducing film roughness in magnetic devices

Patent metadata

Field	Value
Publication number	US-12356865-B2
Application number	US-201816221868-A
Country	US
Kind code	B2
Filing date	Dec 17, 2018
Priority date	Nov 23, 2015
Publication date	Jul 8, 2025
Grant date	Jul 8, 2025

Abstract

A seed layer stack with a uniform top surface having a peak to peak roughness of 0.5 nm is formed by sputter depositing an amorphous layer on a smoothing layer such as Mg where the latter has a resputtering rate 2 to 30× that of the amorphous layer. The uppermost seed layer is NiW, NiMo, or one or more of NiCr, NiFeCr, and Hf while the bottommost seed layer is one or more of Ta, TaN, Zr, ZrN, Nb, NbN, Mo, MON, TIN, W, WN, and Ru. Accordingly, perpendicular magnetic anisotropy in an overlying magnetic layer is substantially maintained during high temperature processing up to 400° C. and is advantageous for magnetic tunnel junctions in embedded MRAMs, spintronic devices, or in read head sensors. The amorphous seed layer is SiN, TaN, or CoFeM where M is B or another element with a content that makes CoFeM amorphous as deposited.

First claim

We claim:

1. A multilayer structure for reducing film roughness in a magnetic device, comprising:
a buffer layer that includes a material selected from one of Zr, ZrN, Nb, NbN, Mo, MON, TiN, W, WN, Ru, Ta and TaN;
a first smoothing layer made of a material with a first bond energy, and having a first surface with an “as deposited” first peak to peak roughness, the first smoothing layer is formed on the buffer layer;
a second smoothing layer that is non-crystalline or nano-crystalline and is made of a material with a second bond energy that is greater than the first bond energy such that deposition of the second smoothing layer results in resputtering of the first smoothing layer to give the first smoothing layer a second surface having a second peak to peak roughness less than the “as deposited” first peak to peak roughness, and the second smoothing layer formed on the second surface, the second smoothing layer has a third surface with the second peak to peak roughness; and
a template layer disposed over the second smoothing layer, the template layer has a ( 111 ) crystal orientation.

2. The multilayer structure of claim 1 , further comprising a magnetic layer disposed over the template layer, wherein the magnetic layer contacts a top surface of the template layer and is a reference layer in a first magnetic tunnel junction (MTJ) having a bottom spin valve configuration or is a free layer in a second MTJ with a top spin valve configuration.

3. The multilayer structure of claim 2 , wherein the first MTJ further includes a tunnel barrier layer on the reference layer, a free layer on the tunnel barrier layer, and a capping layer.

4. The multilayer structure of claim 3 , wherein the reference layer has a synthetic antiparallel (SyAP) configuration with a first reference layer contacting the top surface of the template layer, a middle anti-ferromagnetic coupling layer, and a second reference layer disposed over the middle anti-ferromagnetic coupling layer.

5. The multilayer structure of claim 1 , further comprising a magnetic layer disposed over the template layer, wherein the magnetic layer is a reference layer, a free layer, or a dipole layer in a magnetic random access memory (MRAM) device, a spin torque oscillator (STO), a spintronic device, or a read head sensor.

6. The multilayer structure of claim 1 , further comprising a magnetic layer disposed over the template layer, wherein the magnetic layer comprises a laminated stack (D/X) n where D is Co, CoFe, or CoFeR, X is Pt, Pd, Ni, NiCo, Ni/Pt, or NiFe, n is from 2 to 30, and R is one of Mo, Mg, Ta, W, or Cr.

7. A device, comprising:
a bottom electrode;
a seed layer stack disposed on and directly contacting the bottom electrode, wherein the seed layer stack includes:
a smoothing layer structure that includes at least one sub-smoothing layer and at least one amorphous sub-smoothing layer alternately stacked on the bottom electrode, wherein:
one of the at least one sub-smoothing layer forms a bottom of the smoothing layer structure and is disposed on and directly contacting the bottom electrode;
one of the at least one an amorphous sub-smoothing layer forms a top of the smoothing layer structure; and
the at least one sub-smoothing layer is made of a first material having a first bond energy and a first weight, the at least one amorphous sub-smoothing layer is made of a second material having a second bond energy and a second weight, the second bond energy is greater than the first bond energy, and the second weight is greater than the first weight, and

a template layer disposed on and directly contacting the one of at least one amorphous sub-smoothing layer, wherein the template layer is made of a third material, wherein the first material, the second material, and the third material are different;
a reference layer that includes a synthetic antiparallel (SyAP) stack, wherein the synthetic antiparallel (SyAP) stack includes a first perpendicular magnetic anisotropy (PMA) layer disposed on and directly contacting the template layer of the seed layer stack, an anti-ferromagnetic coupling layer disposed on and directly contacting the first PMA layer, and a second PMA layer disposed on and directly contacting the anti-ferromagnetic coupling layer;
a tunnel barrier layer disposed on and directly contacting the reference layer;
a free layer disposed on and directly contacting the tunnel barrier layer; and a top electrode disposed over the free layer.

8. The device of claim 7 , wherein the at least one amorphous sub-smoothing layer has a top surface having a peak to peak roughness between peaks of 0.5 nm over a 100 nm range.

9. The device of claim 7 , wherein the at least one amorphous sub-smoothing layer has a grain size of less than 5 nm.

10. The device of claim 7 , wherein the at least one sub-smoothing layer and the at least one amorphous sub-smoothing layer each comprise one layer.

11. The device of claim 9 , wherein the at least one sub-smoothing layer and at least one amorphous sub-smoothing layer each comprise two layers.

12. The device of claim 7 , wherein the first PMA layer is a laminated stack (M1/M2) n, wherein M1 is cobalt, M2 is one of Pt, Pd, Ni, NiCo, Ni/Pt and NiFe, and n is from 2-30.

13. The device of claim 7 , wherein:
the sub-smoothing layer has a first resputtering rate; and
the amorphous sub-smoothing layer has a second resputtering rate, wherein the first resputtering rate is greater than the second resputtering rate.

14. The device of claim 7 , further comprising:
an additional seed layer stack disposed between the free layer and the top electrode, wherein the additional seed layer stack includes:
a smoothing layer structure that includes at least one sub-smoothing layer and at least one amorphous sub-smoothing layer alternately stacked on the free layer, wherein:
one of the at least one sub-smoothing layer forms a bottom of the smoothing layer structure of the additional seed layer stack, wherein the at least one sub-smoothing layer is made of the first material having the first bond energy and the first weight; and
one of the at least one amorphous sub-smoothing layer forms a top of the smoothing layer structure of the additional seed layer stack, wherein the at least one amorphous sub-smoothing layer is made of the second material having the second bond energy and the second weight, and
an additional template layer disposed on and directly contacting the one of the at least one second amorphous sub-smoothing layer of the additional seed layer stack, wherein the additional template layer is made of the third material.

15. A device, comprising:
a seed layer stack that includes:
a buffer layer having a top surface with a first top surface roughness;
a smoothing layer structure that includes a pair of smoothing layers, wherein the pair of smoothing layers includes:
a sub-smoothing layer having a first bond energy, and
an amorphous sub-smoothing layer disposed on and directly contacting the sub-smoothing layer, wherein the amorphous sub-smoothing layer has a second bond energy that is greater than the first bond energy;

wherein the sub-smoothing layer of the smoothing layer structure is disposed on and directly contacting the buffer layer; and
a template layer disposed on and directly contacting the amorphous sub-smoothing layer of the smoothing layer structure, wherein the template layer has a second top surface roughness that is less than the first top surface roughness.

16. The device of claim 15 , wherein the amorphous sub- smoothing layer has a top surface with a third top surface roughness, whe

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Zhu Jian
• Jan Guenole
• Lee Yuan-Jen
• Liu Huanlong
• Tong Ru-Ying
• IWATA Jodi Mari
• Sundar Vignesh
• Thomas Luc
• Wang Yu-Jen
• Patel Sahil

Classifications

• H01F10/32

  Spin-exchange-coupled multilayers, e.g. nanostructured superlattices {(applying spin-exchange-coupled multilayers to substrates H01F41/302)} · CPC title

• H01F10/16

  containing cobalt ({H01F10/126} , H01F10/13 take precedence) · CPC title

• G11C11/161

  details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell · CPC title

• H10N50/85

  Materials of the active region · CPC title

• H10N50/10

  Magnetoresistive devices · CPC title