Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports

Patent metadata

Field	Value
Publication number	US-12308264-B2
Application number	US-202017438639-A
Country	US
Kind code	B2
Filing date	Mar 10, 2020
Priority date	Mar 15, 2019
Publication date	May 20, 2025
Grant date	May 20, 2025

Abstract

A substrate processing system includes a processing chamber, a substrate support including a plurality of heater zones arranged in the processing chamber, a gas delivery system configured to deliver process gases to the processing chamber, and a controller configured to communicate with the gas delivery system and the plurality of heater zones, initiate a first treatment step of a process during a transient temperature period after a substrate is arranged on the substrate support and prior to the substrate reaching a steady-state temperature of the substrate support, and adjust heating to each of the plurality of heater zones during the first treatment step based on average heat functions determined for corresponding ones of the plurality of heater zones during a period corresponding to the first treatment step.

First claim

What is claimed is:

1. A substrate processing system comprising:
a processing chamber;
a substrate support including a plurality of heater zones arranged in the processing chamber;
a gas delivery system configured to deliver process gases to the processing chamber; and
a controller configured to:
communicate with the gas delivery system and the plurality of heater zones;
initiate a first treatment step of a process during a transient temperature period after a substrate is arranged on the substrate support and prior to the substrate reaching a steady-state temperature of the substrate support, wherein the first treatment step includes performing a trim step using process gases from the gas delivery system to modify features on the substrate, and the features each define a critical dimension;
initiate a deposition step after the trim step, wherein a temperature of the substrate during the deposition step is greater than the temperature of the substrate during the trim step and less than the steady-state temperature of the substrate support;
for each of the plurality of heater zones, determine an average heat function for the heater zone according to an integral of temperature of the heater zone during the transient temperature period after a substrate is arranged on the substrate support and prior to the substrate reaching the steady-state temperature of the substrate support; and
adjust heating to each of the plurality of heater zones during the first treatment step by increasing heating supplied to each heater zone having a determined average heat function corresponding to feature critical dimensions above a normalized critical dimension of features of the substrate, based on an inverse correlation between the average heat functions and the normalized critical dimension, to generate uniform critical dimensions of the features in each of the plurality of heater zones, wherein the average heat functions are determined for corresponding ones of the plurality of heater zones during the transient temperature period corresponding to the first treatment step.

2. The substrate processing system of claim 1 further comprising:
a plasma generator configured to generate plasma in the processing chamber, wherein the controller is further configured to cause the plasma generator to generate plasma during the first treatment step.

3. The substrate processing system of claim 1 , wherein the first treatment step comprises etching.

4. The substrate processing system of claim 1 , wherein the controller is further configured to execute a first heater adjustment during the first treatment step.

5. The substrate processing system of claim 4 , wherein the controller is further configured to:
adjust heating to each of the plurality of heater zones during the deposition step based on an average heat function determined for corresponding ones of the plurality of heater zones during a second transient temperature period corresponding to the second deposition step.

6. The substrate processing system of claim 5 , wherein the controller is further configured to execute a second heater adjustment during the deposition step, wherein the second heater adjustment is different than the first heater adjustment.

7. The substrate processing system of claim 1 , wherein the process comprises a multi-patterning process.

Assignees

• Lam Res Corp

Inventors

• Kumar Ravi
• Agarwal Pulkit
• Lavoie Adrien
• Chandrasekharan Ramesh
• Roberts Michael Philip

Classifications

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• H10P72/0602 Primary

  Temperature monitoring · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P76/4085 Primary

  characterised by the processes involved to create the masks · CPC title