FIB-SEM 3D tomography for measuring shape deviations of HAR structures

Patent metadata

Field	Value
Publication number	US-12288705-B2
Application number	US-202217707151-A
Country	US
Kind code	B2
Filing date	Mar 29, 2022
Priority date	Oct 31, 2019
Publication date	Apr 29, 2025
Grant date	Apr 29, 2025

Abstract

A 3D tomographic inspection method for the inspection of semiconductor features in an inspection volume of a semiconductor wafer includes obtaining a 3D tomographic image, and selecting a plurality of 2D cross section images. The method also includes identifying contours of HAR structures, and extracting deviation parameters. The deviation parameters describe fabrication errors such as displacement, deviation in radius or diameter, area or shape.

First claim

What is claimed is:

1. A method, comprising:
using a charged particle microscope comprising at least one charged particle optical column to obtain a 3D tomographic image of a semiconductor wafer;
selecting a subset of 2D cross section image segments from the 3D tomographic image, each 2D cross section image section comprising cross section images of a set of HAR structures in the semiconductor wafer;
identifying a contour of each HAR structure within the set of HAR structures in the subset of 2D cross section images;
extracting deviation parameters from the contours of the HAR structures within the set of HAR structures; and
analyzing the deviation parameters,
wherein:
the deviation parameters comprise at least one member selected from the group consisting of a displacement from an ideal position, a deviation in radius or diameter, a deviation from a cross section area, and a deviation from a shape of a cross section;
the HAR structure comprises an internal channel, a first layer around the internal channel, and a second layer around the first layer so that the first layer is between the internal channel and the second layer;
the first layer comprises a first material;
the second layer comprises a second material different from the first material; and
the method comprises identifying the first layer and the second layer based on differences between the first and second materials.

2. The method of claim 1 , wherein step of analyzing the deviation parameters includes performing statistical analysis of at least one deviation parameter of at least one HAR structure of the set of HAR structures.

3. The method of claim 1 , further comprising obtaining the 3D tomographic image.

4. The method of claim 1 , wherein identifying the contour of each HAR structures comprises at least one member selected from the group consisting of image processing, edge detection, and pattern recognition.

5. The method of claim 1 , wherein analyzing the deviation parameters comprises a computation of minimum or maximum values of at least one deviation parameter of at least one HAR structure of the set of HAR structures.

6. The method of claim 1 , wherein extracting the deviation parameters further comprises computing a distance between two adjacent HAR structures and a minimum distance between the two adjacent HAR structures.

7. The method of claim 1 , further comprising detecting and localizing at least one member selected from the group consisting of a local defect in at least one HAR structure of the set of HAR structures, and an inclusion in at least one HAR structure of the set of HAR structures.

8. The method of claim 1 , wherein:
the charged particle microscope comprises a high-resolution scanning electron microscope; and
the method further comprises using the image to identify and localize an internal structure of a HAR structure comprising a core and a layer around the core.

9. The method of claim 8 , further comprising:
extracting a deviation parameter from the contours of the internal structure of the at least one HAR structure; and
analyzing the deviation parameter.

10. The method of claim 1 , further comprising at least one member selected from the group consisting of characterizing a step of a fabrication process, optimizing a fabrication process optimization, and monitoring a fabrication process.

11. One or more non-transitory machine-readable hardware storage devices comprising instructions that are executable by one or more processing devices to perform operations comprising the method of claim 1 .

12. A system, comprising:
one or more processing devices; and
one or more non-transitory machine-readable hardware storage devices comprising instructions that are executable by the one or more processing devices to perform operations comprising the method of claim 1 .

13. The method of claim 1 , wherein the deviation parameter comprises a displacement from an ideal position, and the displacement from the ideal position comprises at least one member selected from the group consisting of a tilt of a HAR structure and a lateral displacement of segments of a HAR structure.

14. The method of claim 1 , wherein:
the first material comprises a conducting material or a semiconducting material; and
the second material comprises a conducting material or a semiconducting material.

15. The method of claim 14 , wherein the deviation parameter comprises a displacement from an ideal position, and the displacement from the ideal position comprises at least one member selected from the group consisting of a tilt of a HAR structure and a lateral displacement of segments of a HAR structure.

16. The method of claim 1 , further comprising a third layer, wherein the third layer is around the first layer so that the third layer is between the first layer and the second layer.

17. The method of claim 16 , wherein:
the first material comprises a conducting material or a semiconducting material;
the second material comprises a conducting material or a semiconducting material; and
the third layer comprises an isolation layer.

18. The method of claim 17 , wherein the deviation parameter comprises a displacement from an ideal position, and the displacement from the ideal position comprises at least one member selected from the group consisting of a tilt of a HAR structure and a lateral displacement of segments of a HAR structure.

19. The method of claim 16 , wherein the deviation parameter comprises a displacement from an ideal position, and the displacement from the ideal position comprises at least one member selected from the group consisting of a tilt of a HAR structure and a lateral displacement of segments of a HAR structure.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Avishai Amir
• Buxbaum Alex
• Foca Eugen
• Klochkov Dmitry
• Korb Thomas
• Lee Keumsil

Classifications

• H10P72/0616 Primary

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• G06T7/0004 Primary

  Industrial image inspection · CPC title

• G06T2207/30172

  Centreline of tubular or elongated structure · CPC title

• H01J2237/2817

  Pattern inspection · CPC title

• H01J37/222

  Image processing arrangements associated with the tube · CPC title