Flange and apparatus for processing substrates

Patent metadata

Field	Value
Publication number	US-12243757-B2
Application number	US-202117323288-A
Country	US
Kind code	B2
Filing date	May 18, 2021
Priority date	May 21, 2020
Publication date	Mar 4, 2025
Grant date	Mar 4, 2025

Abstract

The disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. The flange may be provided with an opening for in use giving access to the process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange. A material with a heat conductivity between 0.1 and 40 W/m K may be at least partially provided in between the cooling fluid and the rest of the flange.

First claim

The invention claimed is:

1. A flange for a process tube in an apparatus for processing substrates, the flange being provided with an opening for in use giving access to a process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange, wherein a material with a heat conductivity between 0.1 and 40 W/m K is at least partially provided in between the cooling fluid and the rest of the flange, wherein the flange has a space that is created in a recess in the outer surface of the flange for at least partially accommodating the cooling channel, and wherein the cooling channel has a substantially circular cross section and the recess has a substantially rectangular cross section with a recess opening slightly smaller than the outer radius of the circular cross section of the cooling channel so that the cooling channel touches the recess opening.

2. The flange according to claim 1 , wherein a material with a heat conductivity between 0.5 and 10 W/m K is at least partially provided in between the cooling fluid and the rest of the flange.

3. The flange according to claim 1 , wherein a material with a heat conductivity between 1 and 6 W/m K is at least partially provided in between the cooling fluid and the rest of the flange.

4. The flange according to claim 1 , wherein the flange has a top and a bottom surface provided with a recess for an O-ring.

5. The flange according to claim 1 , wherein the flange has a substantial circular inner surface creating the opening.

6. The flange according to claim 1 , comprising an electrical heater.

7. The flange according to claim 1 , wherein a part of the space for accommodating the cooling channel is left open creating an open space.

8. The flange according to claim 7 , wherein the open space is provided with the material with a heat conductivity between 0.1 and 40 W/m K.

9. The flange according to claim 1 , wherein the cooling channel has a substantially circular cross section and the space has a substantially rectangular cross section.

10. The flange according to claim 6 , wherein the flange comprises a plurality of heaters comprising the electrical heater.

11. The flange according to claim 1 , wherein the cooling channel comprises a removable enclosure.

12. The flange according to claim 1 wherein the cooling channel is made from metal and is at least partially surrounded by a material with a heat conductivity lower than that of metal.

13. A flange for a process tube in an apparatus for processing substrates, the flange being provided with an opening for in use giving access to a process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange, wherein a material with a heat conductivity between 0.1 and 40 W/m K is at least partially provided in between the cooling fluid and the rest of the flange, wherein the space for accommodating the cooling channel is created in a recess in the outer surface of the flange, and wherein the cooling channel has a substantially circular cross section and the recess has a substantially rectangular cross section with a recess opening equal or bigger than the outer radius of the circular cross section of the cooling channel so that the cooling channel fits in the recess.

14. The flange according to claim 1 wherein the cooling channel is made from a material with a heat conductivity between 0.1 and 40 W/m K.

15. The flange according to claim 1 , wherein a heater is provided in a recess in the outer surface of the flange.

16. The flange according to claim 1 , wherein the flange is provided with a gas opening for providing or removing gases from the process tube.

17. The flange according to claim 1 , wherein the material at least partially provided in between the cooling fluid and the rest of the flange is a polymer.

18. An apparatus for processing substrates, comprising:
the process tube creating a process chamber and provided with the opening at a lower end;
a heater surrounding the process tube for heating the process tube; and
the flange of claim 1 .

19. The apparatus according to claim 18 , wherein the apparatus comprises:
a door plate configured to support a wafer boat in the process tube, and the flange has a top and a bottom surface provided with a recess for an O-ring to function as the seal sealing the process chamber.

20. The apparatus according to claim 18 , wherein the apparatus is constructed and arranged to provide water as the cooling fluid through the cooling channel.

Assignees

• Asm Ip Holding Bv

Inventors

• De Jonge Jeroen
• Sachdeva Sumit
• Jdira Lucian
• Keijser Julien Laurentius Antonius Maria
• Oosterlaken Theodorus G M

Classifications

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• H10P72/3312

  Vertical transfer of a batch of workpieces · CPC title

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H10P72/0432

  mainly by conduction · CPC title