Temperature controlled reaction chamber

Patent metadata

Field	Value
Publication number	US-12125684-B2
Application number	US-202217697725-A
Country	US
Kind code	B2
Filing date	Mar 17, 2022
Priority date	Mar 22, 2021
Publication date	Oct 22, 2024
Grant date	Oct 22, 2024

Abstract

Apparatuses for processing substrates with temperature controlled reaction chambers are provided. In some embodiments, an apparatus for processing a substrate includes a reaction chamber provided with a chamber wall; a gate valve provided to the wall; a substrate transfer chamber operationally connected to the gate valve; a substrate transfer robot disposed within the substrate transfer chamber for transferring the substrate between the reaction chamber and the substrate transfer chamber through the gate valve; a substrate support provided with a heater disposed within the reaction chamber; and a chiller provided to the wall opposite the gate valve.

First claim

What is claimed is:

1. An apparatus for processing a substrate, comprising:
a reaction chamber provided with a first wall and a second wall opposite the first wall, wherein the first wall comprises a passageway;
a first wall heater disposed in the first wall;
a gate valve provided in the passageway of the first wall;
a substrate transfer chamber operationally connected to the gate valve;
a substrate transfer robot disposed within the substrate transfer chamber for transferring the substrate between the reaction chamber and the substrate transfer chamber through the gate valve;
a substrate support provided with a heater disposed within the reaction chamber; and
a chiller provided to the second wall.

2. The apparatus of claim 1 , wherein the chiller is provided with a cooling channel.

3. The apparatus of claim 2 , wherein the apparatus is constructed and arranged to provide a cooling fluid through the cooling channel.

4. The apparatus of claim 3 , wherein the apparatus is constructed and arranged to provide a cooling liquid as the cooling fluid through the cooling channel.

5. The apparatus of claim 4 wherein the apparatus is constructed and arranged to provide the cooling liquid comprising one of water and a perfluorpolyether through the cooling channel.

6. The apparatus of claim 3 , wherein the apparatus is constructed and arranged to provide a cooling gas as the cooling fluid through the cooling channel.

7. The apparatus of claim 6 , wherein the apparatus is constructed and arranged to provide the cooling gas comprising at least one of air, nitrogen, and inert gas through the cooling channel.

8. The apparatus of claim 1 , further comprising a space disposed between the chiller and an inner surface of the second wall.

9. The apparatus of claim 8 , wherein the space is in contact with the chiller and the inner surface of the second wall.

10. The apparatus of claims 1 , further comprising a third wall disposed beneath the substrate processing chamber and spanning between the first wall and the second wall and a second wall heater provided to the third wall.

11. The apparatus of claim 10 , further comprising a third wall heater provided to the second wall.

12. The apparatus of claim 11 , further comprising a controller to control a temperature of the chiller and at least one of the wall heaters.

13. The apparatus of claim 12 , wherein the controller is configured to control the temperature of a first part of the second wall and the temperature of a part of the first wall to the same temperature.

14. The apparatus of claim 13 , further comprising an insulator disposed between the chiller and an inner surface of the second wall,
wherein the chiller is provided with a cooling channel.

15. The apparatus of claim 1 , further comprising a gas supply unit constructed and arranged to face the substrate support and spanning between the first wall and the second wall.

16. The apparatus of claim 15 , wherein the gas supply unit comprise a showerhead provided with a plurality of holes for supplying gas to the substrate.

17. The apparatus of claim 1 , further comprising an insulator disposed between the chiller and an inner surface of the second wall.

18. The apparatus of claim 11 , further comprising a controller to control a temperature of the chiller, the first wall heater, the second wall heater, and the third wall heater.

19. The apparatus of claim 1 , further comprising a second cooling channel in the second wall.

Assignees

• Asm Ip Holding Bv

Inventors

• Yoshikawa Jun

Classifications

• H01J37/3244

  Gas supply means · CPC title

• C23C16/4586

  Elements in the interior of the support, e.g. electrodes, heating or cooling devices · CPC title

• C23C16/45565

  Shower nozzles · CPC title

• C23C16/4411 Primary

  Cooling of the reaction chamber walls (C23C16/45572 takes precedence) · CPC title

• H01J37/32743

  for introducing the material into processing chamber · CPC title