Temperature-controlled flange and reactor system including same

Patent metadata

Field	Value
Publication number	US-10612136-B2
Application number	US-201816024390-A
Country	US
Kind code	B2
Filing date	Jun 29, 2018
Priority date	Jun 29, 2018
Publication date	Apr 7, 2020
Grant date	Apr 7, 2020

Abstract

A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.

First claim

We claim:

1. A flange assembly comprising:
a flange comprising:
a first surface for coupling to a reactor;
an opposing second surface; and
an opening between the first surface and the second surface;

a sealing member;
at least one heater above the opening and at least one heater below the opening; and
at least one cooling channel proximate the sealing member.

2. The flange assembly of claim 1 , wherein the at least heater above the opening is embedded within the flange.

3. The flange assembly of claim 1 , wherein the at least cooling channel comprises a pipe at least partially embedded within the flange.

4. The flange assembly of claim 1 , wherein the first surface comprises a recess to receive the sealing member.

5. The flange assembly of claim 4 , wherein the at least cooling channel is proximate the recess.

6. The flange assembly of claim 1 , wherein the second surface comprises a recess to receive the sealing member.

7. The flange assembly of claim 6 , wherein the at least one cooling channel is proximate the recess.

8. The flange assembly of claim 1 , wherein the flange further comprises an exhaust outlet.

9. The flange assembly of claim 8 , wherein the at least one heater below the opening is proximate the exhaust outlet.

10. The flange assembly of claim 9 , wherein the flange assembly comprises at least two heaters proximate the exhaust outlet.

11. The flange assembly of claim 1 , wherein the flange further comprises at least two additional heaters on opposing sides of the opening.

12. The flange assembly of claim 1 , wherein the flange comprises at least four heaters proximate the opening.

13. The flange assembly of claim 1 , wherein the flange further comprises one or more openings to receive one or more thermocouples.

14. The flange assembly of claim 1 , further comprising a cover plate.

15. The flange assembly of claim 1 , further comprising one or more heater retainers.

16. A reactor system comprising the flange assembly of claim 1 and a controller coupled to the at least one heater above the opening and the at least one heater below the opening, wherein the controller is configured to control flow of a coolant.

17. A flange comprising:
a first surface for coupling to a reactor;
an opposing second surface;
an opening between the first surface and the second surface;
at least one recess to receive a heater above the opening; and
at least one cooling channel below the opening.

18. The flange of claim 17 , wherein the first surface comprises a recess to receive a sealing member.

19. The flange of claim 17 , wherein the second surface comprises a recess to receive a sealing member.

20. The flange of claim 17 , further comprising an exhaust outlet, wherein at least one of the at least one recess to receive a heater is proximate the exhaust outlet.

21. The flange of claim 17 , wherein the flange comprises at least two additional recesses, each of the at least two additional recesses configured to receive one or more heaters, the at least two additional recesses proximate the opening and on opposing sides of the flange.

Assignees

• Asm Ip Holding Bv

Inventors

• Sreeram Sonti
• Tolle John
• Margetis Joe
• Su Junwei

Classifications

• B01J19/0013 Primary

  Controlling the temperature of the process · CPC title

• B01J19/0053

  Details of the reactor · CPC title

• C23C16/4411

  Cooling of the reaction chamber walls (C23C16/45572 takes precedence) · CPC title

• C23C16/455 Primary

  characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber · CPC title

• C23C16/4409 Primary

  characterised by sealing means · CPC title