Top magnets for decreased non-uniformity in PVD

Patent metadata

Field	Value
Publication number	US-12112890-B2
Application number	US-202117478047-A
Country	US
Kind code	B2
Filing date	Sep 17, 2021
Priority date	Sep 17, 2021
Publication date	Oct 8, 2024
Grant date	Oct 8, 2024

Abstract

Magnet assemblies comprising a housing with a top plate each comprising aligned openings are described. The housing has a bottom ring and an annular wall with a plurality of openings formed in the bottom ring. The top plate is on the housing and has a plurality of openings aligned with the plurality of openings in the bottom ring of the housing. The magnet assembly may also include a non-conducting base plate and/or a conductive cover plate. Methods for using the magnet assembly and magnetic field tuning are also described.

First claim

What is claimed is:

1. A magnet assembly comprising:
one or more magnets; and
a housing having a bottom ring with a top surface and a bottom surface defining a thickness of the bottom ring, an inner diameter with an inner peripheral face and an outer diameter with an outer peripheral face, the bottom ring having a plurality of openings extending through the thickness of the bottom ring, and a housing annular wall extending a height from the top surface of the bottom ring, the housing annular wall having an inner diameter with an inner peripheral face and an outer diameter with an outer peripheral face defining a wall thickness, and a top flange on a top of the housing annular wall, the top flange extending outwardly from the outer peripheral face of the housing annular wall.

2. The magnet assembly of claim 1 , wherein the plurality of openings are arranged in sets, each set of openings aligned along a vector extending from a center of the bottom ring to the outer peripheral face of the bottom ring, each opening of each set of openings positioned at different distances from the center.

3. The magnet assembly of claim 2 , wherein there are three openings in each set of openings forming three rings of holes around the center, each ring having a different radius from the center.

4. The magnet assembly of claim 2 , wherein there are in the range of 24 to 60 sets of openings.

5. The magnet assembly of claim 1 , wherein the bottom ring has a truncated portion forming a flat on the outer peripheral face.

6. The magnet assembly of claim 1 , wherein the height of the housing annular wall is in the range of 0.5 to 2.5 inches.

7. The magnet assembly of claim 1 , wherein the housing comprises aluminum.

8. The magnet assembly of claim 1 , wherein the thickness of the bottom ring and the wall thickness of the annular wall are in the range of 1/16 inch to ¼ inch.

9. A magnet assembly comprising:
one or more magnets;
a base plate having a top surface and a bottom surface defining a thickness of the base plate;
a housing on the base plate, the housing having a bottom ring with a top surface and a bottom surface defining a thickness of the bottom ring, an inner diameter with an inner peripheral face and an outer diameter with an outer peripheral face, the bottom ring having a plurality of openings extending through the thickness of the bottom ring, and a housing annular wall extending a height from the top surface of the bottom ring, the housing annular wall having an inner diameter with an inner peripheral face and an outer diameter with an outer peripheral face defining a wall thickness;
a top plate on the housing, the top plate having a top surface and a bottom surface defining a thickness of the top plate, and an inner diameter with an inner peripheral face and an outer diameter with an outer diameter face, the top plate having a plurality of openings extending through the thickness of the top plate, the plurality of openings aligned with the plurality of openings in the bottom ring of the housing; and
a cover plate having a cover plate top wall and a cover plate annular wall, the cover plate top wall having a top surface and a bottom surface defining a thickness of the cover plate top wall, the cover plate annular wall having an inner diameter with an inner diameter face and an outer diameter with an outer diameter face defining a wall thickness, the cover plate annular wall extending a height from the bottom surface of the cover plate top wall and having an outer diameter less than the inner diameter of the housing annular wall.

10. The magnet assembly of claim 9 , wherein the plurality of openings in the housing are arranged in sets, each set of openings aligned along a vector extending from a center of the bottom ring to the outer peripheral face of the bottom ring, each opening of each set of openings positioned at different distances from the center, and the plurality of openings in the top plate are arranged in sets aligned with the sets of openings in the housing.

11. The magnet assembly of claim 10 , wherein there are three openings in each set of openings forming three rings of openings around the center, each ring of openings having a different radius from the center.

12. The magnet assembly of claim 10 , wherein there are in the range of 24 to 60 sets of openings.

13. The magnet assembly of claim 10 , wherein the height of the housing annular wall is in the range of 0.5 to 2.5 inches.

14. The magnet assembly of claim 9 , wherein the base plate comprises at least two portions that when assembled form a ring-shaped base plate.

15. The magnet assembly of claim 9 , wherein the base plate comprises a non-conductive material, the housing comprises aluminum, the top plate comprises stainless steel and the cover plate comprises aluminum.

16. The magnet assembly of claim 9 , further comprising at least one shim between the base plate and the housing.

17. The magnet assembly of claim 16 , wherein each of the at least one shim comprises at least two portions that when assembly assembled form a ring-shaped shim.

18. The magnet assembly of claim 16 , further comprising a top flange on a top of the housing annular wall, the top flange extending outwardly from the outer peripheral face of the housing annular wall.

19. The magnet assembly of claim 9 , further comprising a plurality of magnets positioned between the housing and the top plate, each of the magnets positioned within aligned openings in the housing and the top plate.

Assignees

• Applied Materials Inc

Inventors

• Xia borui
• Chan Anthony Chih-Tung
• Yue Shiyu
• Lei Wei
• Kamath Aravind Miyar
• Sundararajan Mukund
• Wang Rongjun
• Allen Adolph Miller

Classifications

• H01J37/345

  Magnet arrangements in particular for cathodic sputtering apparatus (material of magnets or magnets in general H01F1/00, H01F7/00) · CPC title

• H01J37/3405

  Magnetron sputtering · CPC title

• H01J37/3452

  Magnet distribution · CPC title

• H01F7/0221

  Mounting means for PM, supporting, coating, encapsulating PM · CPC title

• C23C14/358

  Inductive energy · CPC title