Flow adaptors for gas flows, and related processing chambers, processing systems, apparatus, and methods
US-2026088256-A1 · Mar 26, 2026 · US
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Xia borui patents
Xia borui is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Xia borui |
| Total patents | 7 |
| First publication | Mar 23, 2023 |
| Latest publication | Mar 26, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Gas diffuser assembly
US-D1116010-S · Mar 3, 2026 · US
Dual zone pedestal coolant distribution system
US-2025319563-A1 · Oct 16, 2025 · US
Gas diffuser
US-D1052548-S · Nov 26, 2024 · US
Top magnets for decreased non-uniformity in PVD
US-12112890-B2 · Oct 8, 2024 · US
Process chamber with pressure charging and pulsing capability
US-2024153790-A1 · May 9, 2024 · US
Top magnets for decreased non-uniformity in pvd
US-2023088552-A1 · Mar 23, 2023 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 7 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/345 | 2 |
| H01J37/3405 | 2 |
| H01J37/3452 | 2 |
| H01F7/0221 | 2 |
| C23C14/358 | 2 |