Channeled lift pin

Patent metadata

Field	Value
Publication number	US-12033885-B2
Application number	US-202117140661-A
Country	US
Kind code	B2
Filing date	Jan 4, 2021
Priority date	Jan 6, 2020
Publication date	Jul 9, 2024
Grant date	Jul 9, 2024

Abstract

A reactor system may comprise a reaction chamber enclosed by a chamber sidewall, and a susceptor disposed in the reaction chamber between a reaction space and a lower chamber space comprised in the reaction chamber. The susceptor may comprise a pin hole disposed through the susceptor such that the pin hole is in fluid communication with the reaction space and the lower chamber space, and such that the reaction space is in fluid communication with the lower chamber space. A lift pin may be disposed in the pin hole. The lift pin may comprise a pin body comprising a pin channel, defined by a pin channel surface, disposed in the pin body such that the reaction space is in fluid communication with the lower chamber space when the lift pin is disposed in the pin hole.

First claim

What is claimed is:

1. A reactor system, comprising:
a reaction chamber enclosed by a chamber sidewall;
a susceptor disposed in the reaction chamber, wherein the susceptor is disposed between a reaction space and a lower chamber space comprised in the reaction chamber,
wherein the susceptor comprises a pin hole disposed through the susceptor such that the pin hole is in fluid communication with the reaction space and the lower chamber space, and such that the reaction space is in fluid communication with the lower chamber space; and
a lift pin disposed in the pin hole, wherein the lift pin comprises a pin body, a pin head, and a pin bottom, wherein the pin body spans between the pin head and the pin bottom, wherein the lift pin comprises a groove on an outer surface of the pin body and pin head, extending along a length of the pin body and pin head, defined by a groove surface, disposed in the pin body such that the reaction space is in fluid communication with the lower chamber space when the lift pin is disposed in the pin hole, wherein a cross-sectional dimension of the pin head is greater than a cross-sectional dimension of the pin body, wherein the pin hole comprise a pin body section and a pin head section, wherein an outer surface of the pin body is disposed adjacent to a first pin hole surface defining the pin body section of the pin hole.

2. The reactor system of claim 1 , wherein an outer surface of the pin head is disposed adjacent to a second pin hole surface defining the pin head section of the pin hole.

3. The reactor system of claim 1 , wherein the groove comprises a pie-slice-shape cutout a cross section of the pin body.

4. The reactor system of claim 1 , further comprising a pin recess, wherein the pin recess is disposed within the pin body and adjacent to the pin head, wherein the cross-sectional dimension of the pin body at the pin recess is smaller than the cross-sectional dimension of the pin body not at the pin recess.

5. The reactor system of claim 1 , further comprising a vacuum source in fluid communication with the lower chamber space, wherein the vacuum source is in fluid communication with the reaction space of the reaction chamber through the groove of the lift pin.

6. The lift pin of claim 5 , wherein the reaction chamber and the vacuum source are configured such that the pressure in the reaction space remains the same, or decreases at less of a rate than the pressure in the lower chamber space, while the vacuum source is causing fluid flow out of the lower chamber space.

7. The reactor system of claim 1 , wherein the pin head is disposed at a top end of the pin body, wherein the groove extends through the pin head, wherein the pin head is disposed at least partially in the pin hole of the susceptor, wherein the pin head forms at least a partial seal with the susceptor.

8. The reactor system of claim 1 , wherein the chamber sidewall is disposed proximate a susceptor outer side surface of the susceptor.

9. The reactor system of claim 8 , further comprising a space disposed between the chamber sidewall and the susceptor outer side surface such that the reaction space and the lower chamber space of the reaction chamber are in fluid communication via the space.

10. The reactor system of claim 8 , wherein fluid flow is restricted between the chamber sidewall and the susceptor outer side surface.

11. The reactor system of claim 1 , wherein the lift pin comprises a top end of the pin body, wherein the lift pin and the susceptor are configured to move relative to one another such that the top end of the lift pin body is able to protrude from a substrate support surface of the susceptor.

12. A lift pin configured to be disposed in a susceptor comprised in a reactor system, comprising:
a pin body defined by a pin outer surface, wherein the pin body comprises a groove in the pin outer surface pin channel, defined by a pin channel groove surface, extending a length of the pin body;
a pin bottom; and
a pin head, wherein the pin head is disposed at a top end of the pin body, wherein the groove extends through the pin head and pin body;
wherein the pin body spans between the pin head and the pin bottom, and
wherein a cross-sectional dimension of the pin head is greater than a cross-sectional dimension of the pin body.

13. The lift pin of claim 12 , wherein the groove spans linearly and parallel to an axis on which the pin body spans.

14. The lift pin of claim 12 , wherein the groove comprises a pie-slice-shaped cutout.

Assignees

• Asm Ip Holding Bv

Inventors

• Singu Govindarajasekhar
• Nandwana Dinkar
• Dunn Todd Robert
• Swaminathan Shankar
• Zope Bhushan
• White Carl Louis

Classifications

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/7612 Primary

  characterised by lifting arrangements, e.g. lift pins · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• C23C16/4583

  the substrate being supported substantially horizontally · CPC title

• C23C14/50

  Substrate holders · CPC title