Method of manufacturing electronic devices and corresponding electronic device

Patent metadata

Field	Value
Publication number	US-12017910-B2
Application number	US-202218079704-A
Country	US
Kind code	B2
Filing date	Dec 12, 2022
Priority date	Apr 1, 2019
Publication date	Jun 25, 2024
Grant date	Jun 25, 2024

Abstract

A first electronic component, such as a sensor having opposed first and second surfaces and a first thickness, is arranged on a support member with the second surface facing towards the support member. A second electronic component, such as an integrated circuit mounted on a substrate and having a second thickness less than the first thickness, is arranged on the support member with a substrate surface opposed the second electronic component facing towards the support member. A package molding material is molded onto the support member to encapsulate the second electronic component while leaving exposed the first surface of the first electronic component. The support member is then removed to expose the second surface of the first electronic component and the substrate surface of the substrate.

First claim

The invention claimed is:

1. A device, comprising:
a first electronic component having opposed first and second surfaces, wherein the first electronic component has a first thickness between the opposed first and second surfaces;
a substrate;
a second electronic component mounted on a first surface of the substrate, wherein the substrate and the second electronic component mounted thereon combined have a second thickness that is less than the first thickness; and
a package molding material that encapsulates the first and second electronic components and the substrate but leaves exposed the opposed first and second surfaces of the first electronic component and a second surface of the substrate opposite the first surface of the substrate, wherein the package molding material has a third thickness between the first and second surfaces of the package molding material that is equal to the first thickness; and
wherein the first surface of the package molding material is coplanar with the first surface of the first electronic component but covers the first surface of the second electronic component; and
wherein the second surface of the package molding material is coplanar with the second surface of the first electronic component and coplanar with the second surface of the substrate.

2. The device of claim 1 , further comprising electrically-conductive formations between the second electronic component and the substrate, wherein the package molding material encapsulates said electrically-conductive formations.

3. The device of claim 1 , further comprising electrically-conductive formations between the first electronic component and the substrate, wherein the package molding material encapsulates said electrically-conductive formations.

4. The device of claim 1 , further comprising electrically-conductive formations between the first electronic component and the second electronic component, wherein the package molding material encapsulates said electrically-conductive formations.

5. The device of claim 1 , further comprising an electromagnetic shield over at least one of the opposed first and second surfaces of the first electronic component and over at least one of the first and second surfaces of the package molding material.

6. The device of claim 1 , wherein the first electronic component comprises a pressure sensor, and wherein a pressure port is provided at one or more of the opposed first and second surfaces.

7. The device of claim 1 , wherein the first electronic component comprises a sensor and the second electronic component comprises a semiconductor integrated circuit chip.

8. The device of claim 1 , where the sensor is a Micro Electro-Mechanical Systems (MEMS) sensor and wherein the semiconductor integrated circuit chip is an Application Specific Integrated Circuit (ASIC).

9. A device, comprising:
a first electronic component having opposed first and second surfaces, wherein the first electronic component has a first thickness between the opposed first and second surfaces;
a substrate;
a second electronic component mounted on the substrate, wherein the substrate and the second electronic component mounted thereon together have a second thickness which is less than the first thickness;
package molding material encapsulating the first and second electronic components and having opposed third and fourth surfaces, said package molding material leaving exposed the opposed first and second surfaces of the first electronic component and the substrate surface of the substrate opposed the second electronic component, wherein the package molding material has a third thickness between the opposed third and fourth surfaces that is equal to the first thickness;
electrically-conductive formations between:
the second electronic component and the substrate; and
the first electronic component and the substrate; and
the first electronic component and the second electronic component;
wherein said package molding material encapsulates said electrically-conductive formations.

10. The device of claim 9 , further comprising electromagnetic shielding material over at least one of the opposed first and second surfaces of the first electronic component.

11. The device of claim 9 , wherein the first electronic component comprises a pressure sensor, and wherein at least one of the opposed first and second surfaces includes a pressure port.

12. The device of claim 9 , wherein:
the first electronic component comprises a sensor; and
the second electronic component comprises a semiconductor chip.

13. The device of claim 12 , wherein the sensor comprises a Micro Electro-Mechanical Systems (MEMS) device.

14. The device of claim 12 , semiconductor chip comprises an Application Specific Integrated Circuit (ASIC).

15. An integrated circuit package having an exposed top surface and an exposed bottom surface, comprising;
a first electronic component having opposed first and second surfaces and a first thickness between the first surface of the first electronic component and the second surface of the first electronic component;
wherein the first surface of the first electronic component is exposed at the exposed top surface of the integrated circuit package;
wherein the second surface of the first electronic component is exposed at the exposed bottom surface of the integrated circuit package;
a substrate having opposed first and second surfaces;
a second electronic component mounted on the first surface of the substrate;
wherein the second surface of the substrate is exposed at the exposed bottom surface of the integrated circuit package; and
a package molding material that encapsulates the first and second electronic components and the substrate and has a second thickness between the exposed top surface of the integrated circuit package and the exposed bottom surface of the integrated circuit package, said second thickness being equal to the first thickness.

16. The device of claim 15 , further comprising electrically-conductive formations between the second electronic component and the substrate, wherein the package molding material encapsulates said electrically-conductive formations.

17. The device of claim 15 , further comprising electrically-conductive formations between the first electronic component and the substrate, wherein the package molding material encapsulates said electrically-conductive formations.

18. The device of claim 15 , further comprising electrically-conductive formations between the first electronic component and the second electronic component, wherein the package molding material encapsulates said electrically-conductive formations.

19. The device of claim 15 , wherein:
the first electronic component comprises a Micro Electro-Mechanical Systems (MEMS) sensor; and
the second electronic component comprises an Application Specific Integrated Circuit (ASIC) semiconductor chip.

Assignees

• Stmicroelectronics Malta Ltd
• St Microelectronics Srl

Inventors

• Formosa Kevin
• Del Sarto Marco

Classifications

• B81C2203/0792

  Forming interconnections between the electronic processing unit and the micromechanical structure · CPC title

• B81C2203/0154

  Moulding a cap over the MEMS device · CPC title

• B81B2207/07

  Interconnects · CPC title

• B81B2207/012

  the micromechanical device and the control or processing electronics being separate parts in the same package · CPC title

• B81B2201/0264

  Pressure sensors · CPC title