Mask and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-12016239-B2
Application number	US-202318187033-A
Country	US
Kind code	B2
Filing date	Mar 21, 2023
Priority date	Jul 17, 2020
Publication date	Jun 18, 2024
Grant date	Jun 18, 2024

Abstract

A mask includes a first mask that includes a first long side that extends in a first direction and a first short side that extends in a second direction that crosses the first direction and that includes a first edge portion, a first center portion, and a first welded portion, that are sequentially arranged in the first direction. The mask further includes a second mask that includes a second long side that extends in the first direction and a second short side that extends in the second direction and that includes a second welded portion, a second center portion, and a second edge portion, that are sequentially arranged in the first direction. The first welded portion is in contact with the second welded portion.

First claim

What is claimed is:

1. A mask, comprising:
a first mask that includes a first long side that extends in a first direction and a first short side that extends in a second direction that crosses the first direction, wherein the first long side is longer than the first short side, wherein the first mask includes a first edge portion, a first center portion, and a first welded portion, that are sequentially arranged in the first direction; and
a second mask that includes a second long side that extends in the first direction and a second short side that extends in the second direction, wherein the second long side is longer than the second short side, wherein the second mask includes a second welded portion, a second center portion, and a second edge portion, that are sequentially arranged in the first direction,
wherein the first welded portion is in contact with the second welded portion,
wherein the first welded portion includes a first concave-convex portion that has an oscillating shape in a plane, the second welded portion includes a second concave-convex portion that has an oscillating shape in a plane, and the first concave-convex portion is engaged with the second concave-convex portion.

2. The mask of claim 1 , wherein
the first welded portion extends from the first center portion, one end of the first welded portion is the first short side,
the second welded portion extends from the second center portion, and one end of the second welded portion is the second short side.

3. The mask of claim 1 , wherein the first short side of the first mask is in contact with the second short side of the second mask.

4. The mask of claim 1 , wherein the first long side is aligned with the second long side in the first direction.

5. The mask of claim 1 , wherein
the first mask further includes a first alignment mark disposed on an upper surface of the first welded portion, wherein the first alignment mark is in contact with the first short side,
the second mask further includes a second alignment mark disposed on an upper surface of the second welded portion, wherein the second alignment mark is in contact with the second short side,
wherein the first alignment mark is in contact with the second alignment mark.

6. The mask of claim 1 , wherein
the first welded portion further includes a first half-etching portion, and
the second welded portion further includes a second half-etching portion.

7. The mask of claim 1 ,
wherein each of the first welded portion and the second welded portion includes one of an inclined surface or steps,
wherein the inclined surface or steps of the first welded portion and the inclined surface or steps of the second welded portion overlaps each other.

8. The mask of claim 1 , wherein
the first mask further includes a first perforated hole formed through the first concave-convex portion,
the second mask further includes a second perforated hole formed through the second concave-convex portion, and
the first perforated hole overlaps the second perforated hole.

9. The mask of claim 1 , further comprising a metallic film that overlaps the first and second concave-convex portions and is disposed on an upper surface of each of the first and second masks.

10. The mask of claim 9 , wherein
the first mask further includes a first perforated hole formed through the first welded portion,
the second mask further includes a second perforated hole formed through the second welded portion,
wherein the first perforated hole and the second perforated hole overlap each other.

11. The mask of claim 10 , wherein a plurality of each of the first perforated holes and the second perforated hole are provided.

12. The mask of claim 1 , wherein
the first center portion includes a first open area in which an opening is formed and a first non-open area adjacent to the first open area, and
the second center portion includes a second open area in which another opening is formed and a second non-open area adjacent to the second open area.

13. The mask of claim 1 , wherein each of the first and second masks has a thickness equal to or less than about 50 micrometers.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Seil
• Kim Euigyu
• Lee Kwanhee
• Yi Sang Min
• Ko Junhyeuk
• Hong Seungju

Classifications

• H10K71/166 Primary

  using selective deposition, e.g. using a mask · CPC title

• C23C14/042 Primary

  using masks · CPC title

• H10K71/164

  using vacuum deposition · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title