Mask for evaporation, and method and apparatus for manufacturing the same

Patent metadata

Field	Value
Publication number	US-9259805-B2
Application number	US-96470610-A
Country	US
Kind code	B2
Filing date	Dec 9, 2010
Priority date	Dec 14, 2009
Publication date	Feb 16, 2016
Grant date	Feb 16, 2016

Abstract

Provided is a mask for an evaporation apparatus, which includes a first division mask and a second division mask. The first and second division masks are directly bonded to each other by welding, thereby forming welding portion between the first and the second division masks. A method and apparatus for manufacturing a mask for evaporation are also provided. The division masks according to the embodiment do not use subframes, and are directly bonded to one another by welding, so that a shadow effect does not occur. The apparatus for manufacturing a mask for evaporation includes a work stage, a clamp fixing a first division mask and a second division mask to the work stage, and a laser welding part welding the first division mask to the second division mask. The apparatus may further include a first roller leading the laser welding part and a second roller following the laser welding part.

First claim

What is claimed is:

1. A method of manufacturing a mask for evaporation, comprising:
disposing a master substrate on a top surface of a work stage;
disposing a first division mask and a second division mask on the master substrate;
aligning the first division mask and the second division mask by using a camera installed in a supporter moving along a guide bar;
fixing the first and second division masks to the master substrate with a first clamp and a second clamp, respectively, which are disposed on the work stage, each of the first division mask and the second division mask directly contacting the master substrate, an air gap being formed between the first division mask and the second division mask, the first clamp directly contacting the first division mask and the master substrate, the second clamp directly contacting the second division mask and the master substrate;
disposing a pressing plate on peripheral regions of the first and second division masks to be welded, the first and second division masks being disposed between the pressing plate and the master substrate;
pressing the first and second division masks onto the master substrate with a first roller installed in the supporter while moving into a welding direction;
applying a laser beam generated from a laser welding part installed in the supporter to the air gap between the first and second division masks to weld the first division mask to the second division mask, a beam profile of the laser beam generated from the laser welding part having a plurality of maximum peaks, the beam profile being defined as an intensity of the laser beam as a function of a cross-sectional position to be welded, wherein a welding portion is formed between the first division mask and the second division mask after welding the first division mask to the second division mask; and
planarizing a top surface of the welding portion with a second roller installed in the supporter while moving into a welding direction, the second roller following the laser welding part, the laser welding part installed between in the first roller and the second roller.

2. The method according to claim 1 , wherein the disposing the first division mask and the second division mask comprises:
disposing the master substrate on a top surface of a work stage.

3. The method according to claim 1 , wherein the air gap is about 10% or less of a thickness of the first division mask.

4. The method according to claim 1 , further comprising pressing the first and second division masks onto the master substrate with a first roller while moving into a welding direction, the first roller leading the laser welding part.

5. The method according to claim 1 , wherein a welding portion is formed between the first division mask and the second division mask after welding the first division mask to the second division mask, the method further comprising planarizing a top surface of the welding portion with a second roller while moving into a welding direction, the second roller following the laser welding part.

6. An apparatus for manufacturing a mask for evaporation, comprising:
a master substrate on which a first division mask and a second division mask are disposed, the master substrate disposed on a top surface of a work stage;
a camera installed in a supporter moving along a guide bar to align the first division mask and the second division mask;
a first clamp and a second clamp disposed on the work stage to respectively fix the first division mask and the second division mask to a surface of the master substrate in a manner that an air gap is formed between the first division mask and the second division mask, the first clamp directly contacting the first division mask and the master substrate, the second clamp directly contacting the second division mask and the master substrate;
a pressing plate disposed on peripheral regions of the first and second division masks, the pressing plate pressing the first and second division masks onto the master substrate;
a first roller installed in the supporter to press the first and second division masks onto the master substrate while the first roller is moving into a welding direction;
a laser welding part disposed above the first and second division masks, the laser welding part disposed on the air gap between the first division mask and the second division mask to apply a laser beam generated from the laser welding part to the air gap between the first and second division masks to weld the first division mask to the second division mask, a beam profile of the laser beam generated from the laser welding part having a plurality of maximum peaks, the beam profile being defined as an intensity of the laser beam as a function of a cross-sectional position to be welded; and
a second roller installed in the supporter to planarize a top surface of the welding portion while the second roller is moving into a welding direction, the second roller following the laser welding part, the laser welding part installed between in the first roller and the second roller.

7. The apparatus according to claim 6 , further comprising a work stage on which the first and second division masks and the master substrate are disposed.

8. The apparatus according to claim 6 , wherein none of the maximum peaks is at around a center of the beam profile of the laser beam.

9. The apparatus according to claim 6 , further comprising a first roller positioned in front of the laser welding part and a second roller positioned behind the laser welding part, the first and second rollers disposed on the first and second division masks.

10. The apparatus according to claim 9 , further comprising a supporter, the laser welding part and the first and second rollers being installed in the supporter.

11. The apparatus according to claim 10 , wherein the supporter moves along a welding direction while welding the first division mask to the second division mask, the first roller leading the laser welding part and pressing the first and second division masks onto the master substrate, the second roller following the laser welding part and planarizing a surface of a welding portion formed between the first and second division masks during the welding the first division mask to the second division mask.

Assignees

• Kim Joon-Hyung
• Cho Young-Geun
• Shin Eui-Shin
• Kim Jong-Heon
• Choi Seung-Ho
• Roh Cheol-Lae
• Jo Chang-Mog
• Park Jae-Seok
• Samsung Display Co Ltd

Inventors

• Kim Joon-Hyung
• Cho Young-Geun
• Shin Eui-Shin
• Kim Jong-Heon
• Choi Seung-Ho
• Roh Cheol-Lae
• Jo Chang-Mog
• Park Jae-Seok

Classifications

• B23K26/402 Primary

  involving non-metallic material, e.g. isolators · CPC title

• B23K26/032

  using optical means · CPC title

• B23K26/066

  by using masks · CPC title

• B23K2103/50

  Inorganic materials other than metals or composite materials · CPC title

• B23K26/0661

  disposed on the workpiece · CPC title