Extreme ultraviolet light generation system, laser beam size controlling method, and electronic device manufacturing method
US-2020393687-A1 · Dec 17, 2020 · US
US12014918B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12014918-B2 |
| Application number | US-202318465022-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 11, 2023 |
| Priority date | May 24, 2021 |
| Publication date | Jun 18, 2024 |
| Grant date | Jun 18, 2024 |
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A method of generating light with a laser-driven light source includes generating a CW sustaining light and propagating the CW sustaining light to a gas filled bulb comprising an ionizing gas. A pump light is generated. A Q-switched laser crystal is irradiated with the generated pump light, thereby generating pulsed laser light. The pulsed laser light is propagated to the gas filled bulb comprising the ionizing gas so as to generate a CW plasma that emits light. The light generated by the CW plasma in the gas filled bulb is detected. The pump light is controlled so as to extinguish the pulsed laser light after the light generated by the CW plasma is detected.
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What is claimed is: 1. A method of generating light with a laser-driven light source, the method comprising: a) generating a continuous wave (CW) sustaining light; b) propagating the CW sustaining light to a gas filled bulb comprising an ionizing gas; c) generating pump light; d) irradiating a Q-switched laser crystal with the generated pump light, thereby generating pulsed laser light; e) propagating the generated pulsed laser light to the gas filled bulb comprising the ionizing gas, thereby generating a CW plasma that emits light; f) detecting light generated by the CW plasma in the gas filled bulb comprising the ionizing gas; and g) controlling the pump light so as to extinguish the pulsed laser light after the light generated by the CW plasma is detected. 2. The method of claim 1 wherein a pulse repetition rate of the pulsed laser light is in a range of 1 kHz to 20 kHz. 3. The method of claim 1 wherein a pulse repetition rate of the pulsed laser light is less than or equal to 1 kHz. 4. The method of claim 1 wherein a pulse energy of the pulsed laser light is in a range of 50 μJoules to 500 μJoules. 5. The method of claim 1 wherein a pulse energy of the pulsed laser light is in a range of 500 μJoules to 5 mJoules. 6. The method of claim 1 wherein a pulse duration of the pulsed laser light is in a range of 0.1 ns to 10 ns. 7. The method of claim 1 wherein a power of the CW sustaining light is in a range of 5 W to 50 W. 8. The method of claim 1 wherein a power of the CW sustaining light is in a range of 5 W to 1500 W. 9. The method of claim 1 wherein the generating pulsed laser light by irradiating the Q-switched laser crystal comprises providing optical gain. 10. The method of claim 1 wherein the generating pulsed laser light by irradiating the Q-switched laser crystal comprises providing saturable absorption. 11. The method of claim 1 wherein the generating pulsed laser light by irradiating the Q-switched laser crystal further comprises narrow-band filtering. 12. The method of claim 11 further comprising reflecting at least some of the plasma light. 13. The method of claim 11 wherein the narrow-band filter blocks wavelengths in a spectrum generated by the gas in the gas-filed bulb. 14. The method of claim 1 wherein a pressure in the gas-filled bulb comprises a pressure in a range of 20 atm to 50 atm. 15. The method of claim 1 wherein the controlling the pump light so as to extinguish the pulsed laser light is performed within a time delay after the light generated by the CW plasma is detected. 16. The method of claim 1 wherein the controlling the pump light so as to extinguish the pulsed laser light comprises extinguishing the pump light.
Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating {plasma display panels} · CPC title
having helium, argon, neon, krypton, or xenon as the principle constituent · CPC title
Coatings on the end-faces, e.g. input/output surfaces of the laser light · CPC title
Crystal lasers or glass lasers (H01S3/063 takes precedence) · CPC title
YAG · CPC title
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