Automated application of drift correction to sample studied under electron microscope

Patent metadata

Field	Value
Publication number	US-12010430-B2
Application number	US-202217822237-A
Country	US
Kind code	B2
Filing date	Aug 25, 2022
Priority date	Aug 16, 2019
Publication date	Jun 11, 2024
Grant date	Jun 11, 2024

Abstract

Control system configured for sample tracking in an electron microscope environment registers a movement associated with a region of interest located within an active area of a sample under observation with an electron microscope. The registered movement includes at least one directional constituent. The region of interest is positioned within a field of view of the electron microscope. The control system directs an adjustment of the electron microscope control component to one or more of dynamically center and dynamically focus the view through the electron microscope of the region of interest. The adjustment comprises one or more of a magnitude element and a direction element.

First claim

What is claimed is:

1. A control system configured for tracking a sample under observation during an experimental session in an electron microscope, the control system comprising:
a memory; and
a processor;
wherein the processor of the control system is configured for:
tracking movement of the sample under observation as the sample changes during the experimental session,
wherein the movement of the sample is tracked within a region of interest positioned within a field of view of the electron microscope,
wherein the movement of the sample is tracked by comparing a live image of the sample against a template image of the region of interest;

determining a drift vector of the sample based on the tracked movement, wherein the drift vector includes an X-direction component and a Y-direction component;
adjusting the region of interest to correct for drift of the sample during the experimental session using the determined drift vector; and
morphing the template image to approximate the live image of the sample under observation using image filters.

2. The control system of claim 1 , wherein the processor of the control system is further configured for adjusting a plurality of settings of the electron microscope in response to the determined drift vector to improve the live image of the sample.

3. The control system of claim 1 , wherein the template image is morphed using frame averaging over the region of interest.

4. The control system of claim 1 , wherein the processor of the control system is further configured for recording the movement of the sample over a period of time during the experimental session to generate a map of the movement.

5. The control system of claim 4 , wherein the generated map is a two-dimensional map of a history of movements occurring in the region of interest.

6. The control system of claim 4 , wherein the generated map is a three-dimensional map of a history of movements occurring in the region of interest.

7. The control system of claim 1 , wherein the drift vector further includes a Z-direction component.

8. The control system of claim 7 , wherein the processor of the control system is further configured for adjusting a focus level of the electron microscope in the Z-direction to an optimal focus height for the region of interest in response to the determined drift vector.

9. The control system of claim 1 , wherein the processor of the control system is further configured for analyzing variance of pixel intensities in the live image to determine a focus score for the region of interest.

10. The control system of claim 9 , wherein the focus score is determined using at least one of the following: a Fast Fourier Transform calculation of the pixel intensities, a contrast transfer function analysis of the pixel intensities, and a beam tilt analysis of the pixel intensities.

11. A method of tracking a sample under observation during an experimental session in an electron microscope, the method comprising:
tracking movement of the sample under observation as the sample changes during the experimental session,
wherein the movement of the sample is tracked within a region of interest positioned within a field of view of the electron microscope,
wherein the movement of the sample is tracked by comparing a live image of the sample against a template image of the region of interest;

determining a drift vector of the sample based on the tracked movement, wherein the drift vector includes an X-direction component and a Y-direction component;
adjusting the region of interest to correct for drift of the sample during the experimental session using the determined drift vector; and
morphing the template image to approximate the live image of the sample under observation using image filters.

12. The method of claim 11 , further comprising adjusting a plurality of settings of the electron microscope in response to the determined drift vector to improve the live image of the sample.

13. The method of claim 11 , wherein the template image is morphed using frame averaging over the region of interest.

14. The method of claim 11 , further comprising recording the movement of the sample over a period of time during the experimental session to generate a map of the movement.

15. The method of claim 14 , wherein the generated map is a two-dimensional map of a history of movements occurring in the region of interest.

16. The method of claim 14 , wherein the generated map is a three-dimensional map of a history of movements occurring in the region of interest.

17. The method of claim 11 , wherein the drift vector further includes a Z-direction component.

18. The method of claim 17 , further comprising adjusting a focus level of the electron microscope in the Z-direction to an optimal focus height for the region of interest in response to the determined drift vector.

19. The method of claim 11 , further comprising analyzing variance of pixel intensities in the live image to determine a focus score for the region of interest.

20. The method of claim 19 , wherein the focus score is determined using at least one of the following: a Fast Fourier Transform calculation of the pixel intensities, a contrast transfer function analysis of the pixel intensities, and a beam tilt analysis of the pixel intensities.

Assignees

• Protochips Inc

Inventors

• Walden Ii Franklin Stampley
• Damiano Jr John
• Nackashi David P
• Gardiner Daniel Stephen
• Uebel Mark
• Franks Alan Philip
• Jacobs Benjamin

Classifications

• G06T2207/10061

  from scanning electron microscope · CPC title

• G06T7/337

  involving reference images or patches · CPC title

• G06T7/215

  Motion-based segmentation · CPC title

• H01J2237/2811

  Large objects · CPC title

• H01J2237/221

  Image processing · CPC title