Method of analyzing surface modification of a specimen in a charged-particle microscope
US-2016365224-A1 · Dec 15, 2016 · US
Electricity
Electricity · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H01J2237/221 |
| Official title | — |
| Display label | Electricity (mapped technology topic) |
| Total patents | 642 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 45 |
| 2016 | 60 |
| 2017 | 50 |
| 2018 | 40 |
| 2019 | 59 |
| 2020 | 68 |
| 2021 | 68 |
| 2022 | 68 |
| 2023 | 56 |
| 2024 | 51 |
| 2025 | 64 |
| 2026 | 13 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Using wafer geometry to improve scanner correction effectiveness for overlay control
US-9513565-B2 · Dec 6, 2016 · US
Charged particle microscope device and image capturing method
US-9460889-B2 · Oct 4, 2016 · US
Pattern shape evaluation method, semiconductor device manufacturing method, and pattern shape evaluation device
US-9449790-B2 · Sep 20, 2016 · US
Semiconductor inspection apparatus, semiconductor inspection method, and recording medium
US-2016169819-A1 · Jun 16, 2016 · US
Fiducial-based correlative microscopy
US-9368321-B1 · Jun 14, 2016 · US
Charged Particle Beam Device and Image Acquisition Method
US-2016163501-A1 · Jun 9, 2016 · US
Charged particle beam apparatus
US-9342878-B2 · May 17, 2016 · US
Charged-Particle-Beam Device and Specimen Observation Method
US-2016126058-A1 · May 5, 2016 · US
Electron Microscope and Elemental Mapping Image Generation Method
US-2016111248-A1 · Apr 21, 2016 · US
Sample Observation Device
US-2016071688-A1 · Mar 10, 2016 · US
Superposition Measuring Apparatus, Superposition Measuring Method, and Superposition Measuring System
US-2016056014-A1 · Feb 25, 2016 · US
Method for detecting an electrical defect of contact/via plugs
US-9244112-B2 · Jan 26, 2016 · US
Device and Method for Computing Amount of Drift and Charged Particle Beam System
US-2016019696-A1 · Jan 21, 2016 · US
Pattern-Measuring Apparatus and Semiconductor-Measuring System
US-2016005157-A1 · Jan 7, 2016 · US
Charged particle beam device and overlay misalignment measurement method
US-9224575-B2 · Dec 29, 2015 · US
Measurement and inspection device
US-2015371819-A1 · Dec 24, 2015 · US
Fiducial Design for Tilted or Glancing Mill Operations with a Charged Particle Beam
US-2015357159-A1 · Dec 10, 2015 · US
Charged Particle Beam Apparatus and Trajectory Correction Method in Charged Particle Beam Apparatus
US-2015357155-A1 · Dec 10, 2015 · US
Charged-particle microscopy with enhanced electron detection
US-9208993-B2 · Dec 8, 2015 · US
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Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H01J2237/221?
- CPC H01J2237/221 is the Cooperative Patent Classification code for “Electricity.”
- How many patents are filed under CPC H01J2237/221 (Electricity)?
- Our database includes 642 publications tagged with this CPC code.
- Is patent activity under CPC H01J2237/221 growing?
- Publication counts under this code: 51 in 2024 vs 64 in 2025 (latest complete years).