Charged Particle Beam Device

Patent metadata

Field	Value
Publication number	US-2016172154-A1
Application number	US-201514961331-A
Country	US
Kind code	A1
Filing date	Dec 7, 2015
Priority date	Dec 15, 2014
Publication date	Jun 16, 2016
Grant date	—

Abstract

Proposed is a charged particle beam device including an arithmetic processing unit that generates an image of a sample, based on a detection signal that is detected based on irradiation to the sample with a charged particle beam emitted from a charged particle source. The arithmetic processing unit searches a second image as a search target image with use of a first image as a template, and when a region corresponding to the first image is not detected in the second image, the arithmetic processing unit searches a third image that represents a region larger than a region displayed in the second image, with use of a second template.

First claim

What is claimed is:

1 . A charged particle beam device, comprising:
an arithmetic processing unit that generates an image of a sample, based on a detection signal that is detected based on irradiation to the sample with a charged particle beam emitted from a charged particle source, wherein the arithmetic processing unit searches a second image as a search target image with use of a first image as a template, and when a region corresponding to the first image is not detected in the second image, the arithmetic processing unit searches a third image that represents a region larger than a region displayed in the second image, with use of the second image or a second template formed based on the second image.

2 . The charged particle beam device according to claim 1 ,
wherein after the arithmetic processing unit implements a search using the second template, the arithmetic processing unit implements again a search using the first image.

3 . The charged particle beam device according to claim 1 ,
wherein the arithmetic processing unit determines an irradiation position movement signal of the charged particle beam, based on coordinates identified by a search using the second image or the second template and coordinates identified by a search using the first image.

4 . The charged particle beam device according to claim 3 , further comprising:
a deflector that deflects an irradiation position of the charged particle beam, wherein the deflector deflects the charged particle beam, based on the irradiation position movement signal.

5 . A charged particle beam device, comprising:
an arithmetic processing unit that generates an image of a sample, based on a detection signal that is detected based on irradiation to the sample with a charged particle beam emitted from a charged particle source, wherein the arithmetic processing unit creates a template, based on a first image that is generated based on a detection signal obtained by scanning with the charged particle beam, searches a second image that represents a region larger than a region displayed in the first image, with use of the template, and determines an irradiation position movement signal of the charged particle beam, based on a deviation between a first position detected by the search and a pre-registered second position.

Assignees

• Hitachi High Tech Corp

Inventors

• Kakinuma Takefumi
• Hirao Kazuyuki
• Yamamoto Ayana

Classifications

• H01J2237/24592

  Inspection and quality control of devices · CPC title

• H01J2237/24578

  Spatial variables, e.g. position, distance · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/222 Primary

  Image processing arrangements associated with the tube · CPC title