Methods for forming a silicon substrate with reduced grown-in nuclei for epitaxial defects and methods for forming an epitaxial wafer

Patent metadata

Field	Value
Publication number	US-11987900-B2
Application number	US-202017125590-A
Country	US
Kind code	B2
Filing date	Dec 17, 2020
Priority date	Nov 11, 2020
Publication date	May 21, 2024
Grant date	May 21, 2024

Abstract

Methods for preparing single crystal silicon substrates for epitaxial growth are disclosed. The methods may involve control of the (i) a growth velocity, v, and/or (ii) an axial temperature gradient, G, during the growth of an ingot segment such that v/G is less than a critical v/G and/or is less than a value of v/G that depends on the boron concentration of the ingot. Methods for preparing epitaxial wafers are also disclosed.

First claim

What is claimed is:

1. A method for forming a silicon substrate with reduced grown-in nuclei for epitaxial defects, the method comprising:
adding an initial charge of polycrystalline silicon to a crucible disposed in an ingot puller apparatus;
heating the crucible comprising the initial charge of polycrystalline silicon to cause a silicon melt to form in the crucible;
adding a single dopant to the crucible, the single dopant being boron, boron being added to the crucible to prepare a doped silicon melt having a boron concentration of at least 3.8×10 18 atoms/cm 3 ;
contacting a silicon seed crystal with the doped silicon melt;
withdrawing the silicon seed crystal to grow a single crystal silicon ingot, the ingot having a constant diameter portion;
controlling (i) a growth velocity, v, and/or (ii) an axial temperature gradient, G, during the growth of a segment of the constant diameter portion of the ingot having a boron concentration of less than 8.0×10 18 atoms/cm 3 , the ratio of v/G being controlled such that the ratio v/G is less than a critical v/G and interstitials are the dominant intrinsic point defect in the segment;
pulling the segment through a hotzone of the ingot puller apparatus, the segment of the constant diameter portion of the ingot being cooled from its solidification temperature to 950° C. or less as the segment is pulled through the hotzone, wherein the dwell time the segment of the constant diameter portion of the ingot is in the temperature range from 1150° C. to 950° C. is less than 160 minutes; and
slicing the substrate from the single crystal silicon ingot.

2. The method as set forth in claim 1 wherein the constant diameter portion has a length D, the length of the segment being at least 0.9*D.

3. The method as set forth in claim 1 wherein the dwell time the segment of the constant diameter portion of the ingot is in the temperature range from 1150° C. to 950° C. is less than 90 minutes.

4. The method as set forth in claim 1 wherein the concentration of boron in the segment of the constant diameter portion is from 2.8×10 18 atoms/cm 3 to 5.4×10 18 atoms/cm 3 , the (i) a growth velocity, v, and/or (ii) an axial temperature gradient, G, being controlled such that v/G is less than 0.20 mm 2 /(min*K).

5. The method as set forth in claim 1 wherein the length of the segment is the entire constant diameter portion of the ingot.

6. A method for preparing an epitaxial structure, the method comprising:
forming a silicon substrate by the method of claim 1 ; and
contacting a front surface of the silicon substrate with a silicon-containing gas, the silicon-containing gas decomposing to form an epitaxial silicon layer on the silicon substrate.

7. The method as set forth in claim 1 wherein the concentration of boron in the segment of the constant diameter portion is from 5.4×10 18 atoms/cm 3 to 8.0×10 18 atoms/cm 3 , the (i) a growth velocity, v, and/or (ii) an axial temperature gradient, G, being controlled such that v/G is less than 0.25 mm 2 /(min*K).

Assignees

• Globalwafers Co Ltd

Inventors

• Valcozzena Pietro
• Porrini Maria
• Duchini Januscia

Classifications

• C30B29/06 Primary

  Silicon · CPC title

• C30B15/007

  Pulling on a substrate · CPC title

• C30B15/04

  adding doping materials, e.g. for n-p-junction · CPC title

• C30B15/14

  Heating of the melt or the crystallised materials · CPC title

• C30B15/203 Primary

  the relationship of pull rate (v) to axial thermal gradient (G) · CPC title