Structure and method for random code generation

Patent metadata

Field	Value
Publication number	US-11907685-B2
Application number	US-201916677717-A
Country	US
Kind code	B2
Filing date	Nov 8, 2019
Priority date	Nov 8, 2019
Publication date	Feb 20, 2024
Grant date	Feb 20, 2024

Abstract

Disclosed is a structure for implementing a Physically Unclonable Function (PUF)-based random number generator and a method for forming the structure. The structure includes same-type, same-design devices in a semiconductor layer. While values of a performance parameter exhibited by some devices (i.e., first devices) are within a range established based on the design, values of the same performance parameter exhibited by other devices (i.e., second devices) is outside that range. A random distribution of the first and second devices is achieved by including randomly patterned dopant implant regions in the semiconductor layer. Each first device is separated from the dopant implant regions such that its performance parameter value is within the range and each second device has a junction with dopant implant region(s) such that its performance parameter value is outside the range or vice versa. A random number generator can be operably connected to the devices to generate a PUF-based random number.

First claim

What is claimed is:

1. A structure comprising:
a semiconductor layer;
randomly patterned dopant implant regions in the semiconductor layer; and
a physically unclonable function comprising an array of devices,
wherein the devices comprise corresponding regions of the semiconductor layer and include first devices and second devices different from the first devices,
wherein the corresponding regions of the semiconductor layer of the first devices are devoid of any of the randomly patterned dopant implant regions extending vertically therethrough and the first devices have performance parameter values within a predetermined range,
wherein the corresponding regions of the semiconductor layer of the second devices each have at least a portion of at least one randomly patterned dopant implant region extending vertically therethrough with junctions between the randomly patterned dopant implant regions and the second devices causing the second devices to have performance parameter values outside the predetermined range, and
wherein the first devices and the second devices are randomly distributed across the array.

2. The structure of claim 1 ,
wherein the randomly patterned dopant implant regions have varying sizes and non-uniformseparation distances.

3. The structure of claim 2 ,
wherein the devices in the array comprise field effect transistors with each corresponding region of the semiconductor layer of each field effect transistor including a channel region positioned laterally between a source region and a drain region,
wherein each corresponding region of the semiconductor layer of each first device is devoid of any junctions between the source region, the channel region, and the drain region therein and any of the randomly patterned dopant implant regions,
wherein each corresponding region of the semiconductor layer of each second device has a junction between at least one of the source region, the channel region, and the drain region therein and at least one of the randomly patterned dopant implant regions,
wherein the performance parameter values comprise threshold voltage values,
wherein the predetermined range comprises a predetermined threshold voltage range based on a specific design for the field effect transistors, and
wherein the randomly patterned dopant implant regions cause the threshold voltage values of the second devices to fall outside the predetermined threshold voltage range.

4. The structure of claim 3 , wherein the predetermined threshold voltage range extends from a lowest threshold voltage of a fast field effect transistor to a highest threshold voltage of a slow field effect transistor.

5. The structure of claim 3 , wherein the field effect transistors and the dopant implant regions have a first type conductivity.

6. The structure of claim 3 , wherein the field effect transistors have a first type conductivity and the dopant implant regions have a second type conductivity that is different from the first type conductivity.

7. The structure of claim 2 ,
wherein the devices in the array comprise resistors,
wherein the performance parameter values comprise resistance values,
wherein the predetermined range comprises a predetermined resistance range based on a specific design for the resistors, and
wherein the randomly patterned dopant implant regions cause the resistance values of the second devices to fall outside the predetermined resistance range.

8. A structure comprising:
a semiconductor layer;
randomly patterned dopant implant regions in the semiconductor layer;
an array of devices,
wherein the devices comprise corresponding regions of the semiconductor layer and include first devices and second devices different from the first devices,
wherein the corresponding regions of the semiconductor layer of the first devices are devoid of any of the randomly patterned dopant implant regions extending vertically therethrough and the first devices have performance parameter values within a predetermined range,
wherein the corresponding regions of the semiconductor layer of the second devices each have at least a portion with at least one randomly patterned dopant implant region extending vertically therethrough with junctions between the randomly patterned dopant implant regions and the second devices causing the second devices to have performance parameter values outside the predetermined range, and
wherein the first devices and the second devices are randomly distributed across the array; and

a random number generator operably connected to the array of devices and generating a random number based on distribution of the first devices and the second devices within the array.

9. The structure of claim 8 ,
wherein the randomly patterned dopant implant regions have varying sizes and non-uniform separation distances.

10. The structure of claim 9 ,
wherein the devices in the array comprise field effect transistors with each corresponding region of the semiconductor layer of each field effect transistor including a channel region positioned laterally between a source region and a drain region,
wherein each corresponding region of the semiconductor layer of each first device is devoid of any junctions between the source region, the channel region, and the drain region therein and any of the randomly patterned dopant implant regions,
wherein each corresponding region of the semiconductor layer of each second device has a junction between at least one of the source region, the channel region, and the drain region therein and at least one of the randomly patterned dopant implant regions,
wherein the performance parameter values comprise threshold voltage values,
wherein the predetermined range comprises a predetermined threshold voltage range based on a specific design for the field effect transistors, and
wherein the randomly patterned dopant implant regions cause the threshold voltage values of the second devices to fall outside the predetermined threshold voltage range.

11. The structure of claim 10 , wherein the predetermined threshold voltage range extends from a lowest threshold voltage of a fast field effect transistor to a highest threshold voltage of a slow field effect transistor.

12. A method comprising:
providing a semiconductor layer;
forming randomly patterned dopant implant regions in the semiconductor layer; and
forming a physically unclonable function comprising an array of devices,
wherein the devices comprise corresponding regions of the semiconductor layer and include first devices and second devices different from the first devices,
wherein the corresponding regions of the semiconductor layer of the first devices are devoid of any of the randomly patterned dopant implant regions extending vertically therethrough and the first devices have performance parameter values within a predetermined range,
wherein the corresponding regions of the semiconductor layer of the second devices each have at least a portion of at least one randomly patterned dopant implant region extending vertically therethrough with junctions between the randomly patterned dopant implant regions and the second devices causing the second devices to have performance parameter values outside the predetermined range, and
wherein the first devices and the second devices are randomly distributed across the array.

13. The method of claim 12 , wherein the forming of the randomly patterned dopant implant regions includes randomly depositing particles of a masking material above a surface of the semiconductor layer so that, following the randomly depositing of the particles, the semiconductor layer has masked portions t

Assignees

• Globalfoundries Us Inc

Inventors

• Holt Judson R
• Frougier Julien
• Sporer Ryan W
• Mulfinger George R
• Jaeger Daniel

Classifications

• H10P14/6306

  of the semiconductor materials · CPC title

• H10W42/405

  using active circuits · CPC title

• H10D84/83

  of only insulated-gate FETs [IGFET] · CPC title

• H10D84/038

  using silicon technology, e.g. SiGe · CPC title

• H10D84/0128

  Manufacturing their channels · CPC title