Methods for forming alignment marks

Patent metadata

Field	Value
Publication number	US-11899376-B1
Application number	US-202217900124-A
Country	US
Kind code	B1
Filing date	Aug 31, 2022
Priority date	Aug 31, 2022
Publication date	Feb 13, 2024
Grant date	Feb 13, 2024

Abstract

A method for forming alignment marks leverages pad density and critical dimensions (CDs). In some embodiments, the method includes forming first and second alignment marks on a first substrate and a second substrate where the alignment marks have a width within 5% of the associated CD of copper pads on the respective substrates and forming a first and second dummy patterns around the first and second alignment marks. The first and second dummy patterns have dummy pattern densities within 5% of the respective copper pad density of the first and second substrates and CDs within 5% of the respective copper pad CDs. In some embodiments, alignment marks with physical dielectric material protrusions and recesses on opposite substrate surfaces may further enhance bonding.

First claim

The invention claimed is:

1. A method for forming alignment marks, comprising:
forming a first alignment mark on a first substrate, wherein the first alignment mark has a first width within 5% of a first critical dimension (CD) of copper pads on the first substrate;
forming a first dummy pattern of first dummy copper pads on the first substrate around the first alignment mark, wherein the first dummy pattern has a first dummy pattern density within 5% of a first copper pad density of the first substrate and the first dummy copper pads have a first dummy copper pad CD within 5% of the first CD of copper pads on the first substrate;
forming a second alignment mark on a second substrate, wherein the second alignment mark has a second width within 5% of a second critical dimension (CD) of copper pads on the second substrate; and
forming a second dummy pattern of second dummy copper pads on the second substrate around the second alignment mark, wherein the second dummy pattern has a second dummy pattern density within 5% of a second copper pad density of the second substrate and the second dummy copper pads have a second dummy copper pad CD within 5% of the second CD of copper pads on the second substrate,
wherein the second alignment mark nests within the first alignment mark from a top-down viewpoint without any boundary overlay when the second substrate overlays or underlays the first substrate resulting in a predetermined alignment of the first substrate and the second substrate.

2. The method of claim 1 , wherein the first alignment mark is an L-shape and the second alignment mark is a cross shape.

3. The method of claim 1 , wherein the first alignment mark is a first circle and the second alignment mark is a second circle of a different diameter than the first circle.

4. The method of claim 1 , wherein the first alignment mark is composed of duplicate portions that are offset in both an X-direction and a Y-direction from each other with spacing therebetween.

5. The method of claim 1 , wherein the first alignment mark has a recess and the second alignment mark has a protrusion and wherein a depth of the recess is greater than a height of the protrusion.

6. The method of claim 1 used to form lithography alignment marks, inspection alignment marks, or bonding alignment marks.

7. The method of claim 1 , wherein the first CD of copper pads on the first substrate is different than the second CD of copper pads on the second substrate.

8. The method of claim 1 , wherein the second alignment mark when positioned within the first alignment mark from the top-down viewpoint is spaced away from the first alignment mark by approximately 5 microns to approximately 10 microns to allow for alignment shift.

9. The method of claim 1 , wherein the first alignment mark and first dummy pattern reduce chemical mechanical polishing (CMP) erosion in an area of the first substrate containing the first alignment mark and the first dummy pattern by approximately 20%.

10. A method for forming alignment marks, comprising:
forming a first alignment mark on a first substrate, wherein the first alignment mark has a first width within 5% of a first critical dimension (CD) of copper pads on the first substrate;
forming a first dummy pattern of first dummy copper pads on the first substrate around the first alignment mark, wherein the first dummy pattern has a first dummy pattern density within 5% of a first copper pad density of the first substrate and the first dummy copper pads have a first dummy copper pad CD within 5% of the first CD of copper pads on the first substrate;
forming a second alignment mark on a second substrate, wherein the second alignment mark has a second width within 5% of a second critical dimension (CD) of copper pads on the second substrate; and
forming a second dummy pattern of second dummy copper pads on the second substrate around the second alignment mark, wherein the second dummy pattern has a second dummy pattern density within 5% of a second copper pad density of the second substrate and the second dummy copper pads have a second dummy copper pad CD within 5% of the second CD of copper pads on the second substrate,
wherein the first CD of copper pads on the first substrate is different than the second CD of copper pads on the second substrate,
wherein the second alignment mark nests within the first alignment mark from a top-down view point without any boundary overlay when the second substrate overlays or underlays the first substrate resulting in a predetermined alignment of the first substrate and the second substrate, and
wherein the second alignment mark when positioned within the first alignment mark from a top-down viewpoint is spaced away from the first alignment mark by approximately 5 microns to approximately 10 microns to allow for alignment shift.

11. The method of claim 10 , wherein the first alignment mark is an L-shape and the second alignment mark is a cross shape.

12. The method of claim 10 , wherein the first alignment mark is a first circle and the second alignment mark is a second circle of a different diameter than the first circle.

13. The method of claim 10 , wherein the first alignment mark is composed of duplicate portions that are offset in both an X-direction and a Y-direction from each other with spacing therebetween.

14. The method of claim 10 , wherein the first alignment mark or the second alignment mark is composed of a plurality of concentric circles.

15. The method of claim 10 used to form lithography alignment marks, inspection alignment marks, or bonding alignment marks.

16. The method of claim 10 , wherein the first alignment mark and first dummy pattern reduce chemical mechanical polishing (CMP) erosion in an area of the first substrate containing the first alignment mark and the first dummy pattern by approximately 20%.

17. A non-transitory, computer readable medium having instructions stored thereon that, when executed, cause a method for forming alignment marks to be performed, the method comprising:
forming a first alignment mark on a first substrate, wherein the first alignment mark has a first width within 5% of a first critical dimension (CD) of copper pads on the first substrate;
forming a first dummy pattern of first dummy copper pads on the first substrate around the first alignment mark, wherein the first dummy pattern has a first dummy pattern density within 5% of a first copper pad density of the first substrate and the first dummy copper pads have a first dummy copper pad CD within 5% of the first CD of copper pads on the first substrate;
forming a second alignment mark on a second substrate, wherein the second alignment mark has a second width within 5% of a second critical dimension (CD) of copper pads on the second substrate; and
forming a second dummy pattern of second dummy copper pads on the second substrate around the second alignment mark, wherein the second dummy pattern has a second dummy pattern density within 5% of a second copper pad density of the second substrate and the second dummy copper pads have a second dummy copper pad CD within 5% of the second CD of copper pads on the second substrate,
wherein the second alignment mark nests within the first alignment mark from a top-down viewpoint without any boundary overlay when the second substrate overlays or underlays the first substrate resulting in a predetermined alignment of the first substrate and the second substrate.

18. The non-transitory, computer readable medium of claim 17 , wherein the first alignment mark is an L-shape and

Assignees

• Applied Materials Inc

Inventors

• Lianto Prayudi
• Jiang Liu
• Bernt Marvin Louis
• Bazizi El Mehdi
• See Guan Huei

Classifications

• H10W46/607

  Located on parts of packages, e.g. on encapsulations or on package substrates · CPC title

• H10W46/301

  for alignment · CPC title

• H10W46/00 Primary

  Marks applied to devices, e.g. for alignment or identification · CPC title

• G03F9/7088

  Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection · CPC title

• G03F7/70683

  Mark designs · CPC title