Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systems

Patent metadata

Field	Value
Publication number	US-11899198-B2
Application number	US-202217750751-A
Country	US
Kind code	B2
Filing date	May 23, 2022
Priority date	May 23, 2022
Publication date	Feb 13, 2024
Grant date	Feb 13, 2024

Abstract

A digital lithography system may adjust a wavelength of the light source to compensate for tilt errors in micromirrors while maintaining a perpendicular direction for the reflected light. Adjacent pixels may have a phase shift that is determined by an optical path difference between their respective light beams. This phase shift may be preselected to be any value by generating a corresponding wavelength at the light source based on the optical path difference. To generate a specific wavelength corresponding to the desired phase shift, the light source may produce multiple light components that have wavelengths that bracket the wavelength of the selected phase shift. The intensities of these components may then be controlled individually to produce an effect that approximates the selected phase shift on the substrate.

First claim

What is claimed is:

1. A digital lithography system comprising:
a first spatial light modulator pixel configured to direct a first light beam onto a substrate during a digital lithography process;
a second spatial light modulator pixel configured to direct a second light beam onto the substrate during the digital lithography process;
a light source configured to generate the first light beam, wherein the first light beam comprises a plurality of components comprising:
a first component having a first wavelength that generates a first phase shift that is greater than a preselected phase shift; and
a second component having a second wavelength that generates a second phase shift that is less than the preselected phase shift; and

a controller configured to control intensities of the plurality of components to generate an effect on the substrate that approximates the preselected phase shift.

2. The system of claim 1 , wherein the second spatial light modulator pixel is adjacent to the first spatial light modulator pixel in an array of spatial light modulator pixels in a digital micromirror device.

3. The system of claim 1 , wherein the first spatial light modulator pixel comprises a micromirror that adjusts between an on position that reflects light onto the substrate and an off position that reflects light away from the substrate.

4. The system of claim 1 , wherein the light source is also configured to generate the second light beam, such that the first light beam and the second light beam originate from the light source.

5. The system of claim 1 , wherein the second light beam is generated from a different light source, and the controller is further configured to control intensities of components in the second light beam to correct for a tilt error in the second spatial light modulator pixel that is different from a tilt error in the first spatial light modulator pixel.

6. The system of claim 1 , wherein the light source comprises a plurality of groups of laser diodes, wherein a first subset of the plurality of groups of laser diodes is configured to output approximately the first wavelength, and a second subset of the plurality of groups of laser diodes is configured to output approximately the second wavelength.

7. The system of claim 1 , wherein the light source comprises a homogenizing rod that mixes the first component together with the second component to generate a uniform first light beam.

8. The system of claim 1 , wherein the plurality of components comprises a plurality of additional components in addition to the first component and the second component.

9. A method of adjusting a phase shift between pixels in digital lithography systems, the method comprising:
projecting a first light beam onto a first spatial light modulator pixel, wherein the first spatial light modulator pixel directs the first light beam onto a substrate during a digital lithography process, wherein the first light beam comprises a plurality of components comprising:
a first component having a first wavelength that generates a first phase shift that is greater than a preselected phase shift; and
a second component having a second wavelength that generates a second phase shift that is less than the preselected phase shift;

projecting a second light beam onto a second spatial light modulator pixel, wherein the second spatial light modulator pixel directs the second light beam onto the substrate during the digital lithography process; and
controlling intensities of the plurality of components to generate an effect on the substrate that approximates the preselected phase shift.

10. The method of claim 9 , wherein the first wavelength generates a first phase shift that is approximately 20° greater than the preselected phase shift.

11. The method of claim 9 , wherein the second wavelength generates a second phase shift that is approximately 10° less than the preselected phase shift.

12. The method of claim 9 , wherein the preselected phase shift is selectable to be any phase shift between 0° and 359°.

13. The method of claim 9 , wherein controlling the intensities of the plurality of components comprises calculating weights for each of the plurality of components in a linear combination of the deviations between the first phase shift and the second phase shift from the preselected phase shift such that the linear combination is approximately zero.

14. The method of claim 13 , wherein the weights in the linear combination correspond to the intensities of the plurality of components.

15. The method of claim 9 , wherein approximating the preselected phase shift generates a pattern of light intensity on the substrate that approximates a pattern of light intensity that would be present on the substrate using a single wavelength corresponding to the preselected phase shift.

16. The method of claim 9 , wherein the first phase shift is calculated from the first wavelength and an optical path difference between the first light beam on the second light beam.

17. The method of claim 9 , wherein the second spatial light modulator pixel is adjacent to the first spatial light modulator pixel in an array of spatial light modulator pixels in a digital micromirror device, and the second light beam also comprises the first component and the second component.

18. A method of adjusting or selecting a phase shift between pixels in digital lithography systems, the method comprising:
projecting a first light beam onto a first spatial light modulator pixel, wherein the first spatial light modulator pixel directs the first light beam onto a substrate during a digital lithography process;
projecting a second light beam onto a second spatial light modulator pixel, wherein the second spatial light modulator pixel directs the second light beam onto the substrate during the digital lithography process, and the second spatial light modulator pixel is adjacent to the first spatial light modulator pixel in an array of spatial light modulator pixels; and
controlling a wavelength of the first light beam and/or a wavelength of the second light beam based on an optical path difference between the first light beam and the second light beam to produce a preselected phase shift between the first light beam and the second light beam on the substrate.

19. The method of claim 18 , wherein controlling the wavelength of the first light beam comprises switching between different laser diodes that generate light having different wavelengths.

20. The method of claim 18 , wherein controlling the wavelength of the first light beam comprises changing the wavelength of the first light beam by controlling a temperature of a light source, mechanically altering a cavity of the light source, or electro-acoustically altering the cavity of the light source.

Assignees

• Applied Materials Inc

Inventors

• Laidig Thomas L
• Bencher Christopher
• Jeong Hwan J
• Hollerbach Uwe

Classifications

• G02B26/0833 Primary

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G03F7/2057

  using an addressed light valve, e.g. a liquid crystal device · CPC title

• G03F7/70575

  Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength · CPC title

• G03F7/70291 Primary

  Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices · CPC title

• G02B27/30

  Collimators · CPC title