SiPM with cells of different sizes including at least one large-area cell is substantially centered along a substrate with respect to the optical axis of an aperture array

Patent metadata

Field	Value
Publication number	US-11874402-B2
Application number	US-202217661687-A
Country	US
Kind code	B2
Filing date	May 2, 2022
Priority date	Dec 9, 2019
Publication date	Jan 16, 2024
Grant date	Jan 16, 2024

Abstract

The present disclosure relates to devices, light detection and ranging (lidar) systems, and vehicles involving solid-state, single photon detectors. An example device includes a substrate defining a primary plane and a plurality of photodetector cells disposed along the primary plane. The plurality of photodetector cells includes at least one large-area cell and at least one small-area cell. The large-area cell has a first area and the small-area cell has a second area and the first area is greater than the second area. The device also includes read out circuitry coupled to the plurality of photodetector cells. The read out circuitry is configured to provide an output signal based on incident light detected by the plurality of photodetector cells.

First claim

What is claimed is:

1. A device comprising:
a substrate defining a primary plane;
an aperture array comprising an at least one aperture defining an optical axis;
a plurality of photodetector cells disposed along the primary plane, wherein the plurality of photodetector cells comprises at least one large-area cell and at least one small-area cell, wherein the large-area cell has a first area and the small-area cell has a second area, and wherein the at least one large-area cell is substantially centered along the substrate with respect to the optical axis; and
read out circuitry coupled to the plurality of photodetector cells, wherein the read out circuitry is configured to provide an output signal based on incident light detected by the plurality of photodetector cells.

2. The device of claim 1 , wherein each photodetector cell of the plurality of photodetector cells comprises a single-photon avalanche diode (SPAD).

3. The device of claim 2 , wherein each SPAD is operated in a Geiger mode of operation.

4. The device of claim 2 , wherein the read out circuitry comprises a respective quenching circuit for each SP AD, wherein the respective quenching circuit comprises a quenching resistor.

5. The device of claim 1 , wherein a combination of the plurality of photodetector cells and the read out circuitry defines at least one solid-state, multi-element, single photon detector.

6. The device of claim 1 , wherein a combination of the plurality of photodetector cells and the read out circuitry defines at least one silicon photomultiplier (SiPM).

7. The device of claim 1 , wherein the plurality of photodetector cells are electrically coupled in a parallel arrangement.

8. The device of claim 1 , wherein the first area is based on a first edge length or first diameter between 15 microns and 50 microns, and wherein the second area is based on a second edge length or second diameter between 2 microns and 15 microns.

9. The device of claim 1 , wherein the plurality of photodetector cells is configured to be illuminated by incident light that passes through a backside surface of the substrate.

10. The device of claim 1 , wherein the plurality of photodetector cells are disposed according to at least one of a square array or a hexagonal array.

11. The device of claim 1 , wherein the read out circuitry comprises: at least one amplifier coupled to the large-area cell; and at least one amplifier coupled to the small-area cell.

12. The device of claim 1 , wherein the read out circuitry comprises:
at least one analog to digital converter (ADC) coupled to the large-area cell; and
at least one ADC coupled to the small-area cell, wherein the ADC coupled to the large area cell is a first 12-bit ADC and the ADC coupled to the large area cell is a second 12-bit ADC, and wherein the read out circuitry is configured to combine an output of the first 12-bit ADC and an output of the second 12-bit ADC to form the output signal, wherein the output signal comprises a 16-bit representation of the light received by the photodetector cells.

13. The device of claim 1 , further comprising:
at least one microlens disposed over a photodetector cell or a group of photodetector cells of the plurality of photodetector cells.

14. The device of claim 1 , wherein a position of the at least one large-area cell and the at least one small-area cell is selected based on a predetermined beam intensity profile of the incident light.

15. A light detection and ranging (lidar) system comprising:
at least one light-emitter device; and
a receiver subsystem, wherein the receiver subsystem comprises:
a substrate defining a primary plane;
an aperture array comprising an at least one aperture defining an optical axis;
a plurality of photodetector cells, wherein the plurality of photodetector cells comprises at least one large-area cell and at least one small-area cell, wherein the large-area cell has a first area and the small-area cell has a second area, and wherein the at least one large-area cell is substantially centered along the substrate with respect to the optical axis; and
read out circuitry coupled to the plurality of photodetector cells, wherein the read out circuitry is configured to provide an output signal based on incident light detected by the plurality of photodetector cells.

16. The lidar system of claim 15 wherein the aperture array further comprises a plurality of apertures, wherein the respective photodetector cells and the aperture array are aligned so as to define a plurality of receiver channels, wherein each receiver channel comprises a respective group of photodetector cells optically coupled to a respective aperture of the plurality of apertures.

17. The lidar of claim 15 , wherein the read out circuitry comprises:
at least one analog to digital converter (ADC) coupled to the large-area cell; and
at least one ADC coupled to the small-area cell, wherein the ADC coupled to the large area cell is a first 12-bit ADC and the ADC coupled to the small-area cell is a second 12-bit ADC, and wherein the read out circuitry is configured to combine an output of the first 12-bit ADC and an output of the second 12-bit ADC to form the output signal, wherein the output signal comprises a 16-bit representation of the light received by the photodetector.

18. A vehicle, comprising:
at least one light detection and ranging (lidar) system comprising:
at least one light-emitter device; and
a receiver subsystem, wherein the receiver subsystem comprises:
a substrate defining a primary plane;
an aperture array comprising an at least one aperture defining an optical axis;
a plurality of photodetector cells, wherein the plurality of photodetector cells comprises at least one large-area cell and at least one small-area cell, wherein the large-area cell has a first area and the small-area cell has a second area, and wherein the at least one large-area cell is substantially centered along the substrate with respect to the optical axis; and
read out circuitry coupled to the plurality of photodetector cells, wherein the read out circuitry is configured to provide an output signal based on incident light detected by the plurality of photodetector cells.

19. The vehicle of claim 18 , wherein the read out circuitry comprises:
at least one first 12-bit analog to digital converter (ADC) coupled to the large-area cell; and
at least one second 12-bit ADC coupled to the small-area cell.

20. The vehicle of claim 19 , wherein the read out circuitry is configured to combine an output of the first 12-bit ADC and an output of the second 12-bit ADC to form the output signal, wherein the output signal comprises a 16-bit representation of the light received by the photodetector.

Assignees

• Waymo Llc

Inventors

• Onal Caner
• Dharia Nirav

Classifications

• H10F77/413

  directly associated or integrated with the devices, e.g. back reflectors (directly associated or integrated with photovoltaic cells H10F77/42) · CPC title

• H10F39/107

  having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays · CPC title

• H10F30/225 Primary

  the potential barrier working in avalanche mode, e.g. avalanche photodiodes · CPC title

• G01S7/4863 Primary

  Detector arrays, e.g. charge-transfer gates · CPC title

• H01L27/1446

  Electricity · mapped topic