Optical emission spectroscopy control of gas flow in processing chambers

Patent metadata

Field	Value
Publication number	US-11868147-B2
Application number	US-202117198619-A
Country	US
Kind code	B2
Filing date	Mar 11, 2021
Priority date	Mar 11, 2021
Publication date	Jan 9, 2024
Grant date	Jan 9, 2024

Abstract

A system may be configured to monitor an amount of a gas species in a processing chamber using Optical Emission Spectrometry. The gas measurement may be provided as feedback to a control process that generates a target setpoint for a gas flow controller into the process chamber. This real-time process may increase/decrease the flow rate of the gas in order to maintain a process deposition mode within a transition region between primarily metallic deposition and primarily compound deposition.

First claim

What is claimed is:

1. A method of controlling gas levels in chambers using optical measurements, the method comprising:
capturing a baseline set of measurements indicative of an amount of a gas species in a Physical Vapor Deposition (PVD) chamber over time as a magnet oscillates in the PVD chamber to position a plasma in the PVD chamber;
receiving, from an Optical Emission Spectrometer (OES), a measurement that is indicative of an amount of the gas species in the PVD chamber while performing a current process on a semiconductor substrate in the PVD chamber;
using the baseline set of measurements to normalize the measurement that is indicative of the amount of the gas species in the PVD chamber to minimize an effect of the magnet;
providing the measurement as a feedback input to a control process that is configured to maintain a predetermined target amount of the gas species in the PVD chamber;
generating a setpoint from the control process for a gas flow controller that controls an amount of the gas species that flows into the PVD chamber while performing the current process on the semiconductor substrate; and
causing the gas flow controller to provide the gas species to the PVD chamber using the setpoint from the control process.

2. The method of claim 1 , further comprising:
selecting a wavelength associated with the gas species in an output from the OES; and
determining a count level for the wavelength associated with the gas species as the measurement that is indicative of the amount of the gas species in the PVD chamber.

3. The method of claim 2 , wherein selecting the wavelength associated with the gas species comprises selecting a wavelength with a highest count level from a plurality of wavelengths associated with the gas species.

4. The method of claim 1 , wherein the baseline set of measurements is captured during a previous process performed in the PVD chamber and used during the current process on the semiconductor substrate in the PVD chamber.

5. The method of claim 1 wherein normalizing the measurement comprises aligning the measurement with the baseline set of measurements in time based on an oscillation period of the magnet.

6. The method of claim 5 , wherein normalizing the measurement comprises dividing the measurement by a value from the baseline set of measurements from a corresponding time in the oscillation period of the magnet.

7. The method of claim 1 , further comprising:
accessing a stored set of parameters for the control process, wherein parameters in the stored set of parameters correspond to different predetermined target amounts of the gas species; and
selecting a parameter for the control process from the stored set of parameters based on the predetermined target amount of the gas species for the current process on the semiconductor substrate in the PVD chamber.

8. The method of claim 1 , wherein the predetermined target amount of the gas species in the PVD chamber corresponds to a transition region that deposits a sub-stoichiometric film on the semiconductor substrate, and the transition region falls between a metallic deposition mode and a compound deposition mode.

9. A non-transitory computer-readable medium comprising instructions that, when executed by one or more processors, cause the one or more processors to perform operations comprising:
receiving, from an Optical Emission Spectrometer (OES), a measurement that is indicative of an amount of a gas species in a Physical Vapor Deposition (PVD) chamber while performing a current process on a semiconductor substrate in the PVD chamber;
accessing a stored set of parameters for a control process, wherein parameters in the stored set of parameters correspond to different predetermined target amounts of the gas species;
selecting a parameter for the control process from the stored set of parameters based on the predetermined target amount of the gas species for the current process on the semiconductor substrate in the PVD chamber;
providing the measurement as a feedback input and the parameter to the control process that is configured to maintain a predetermined target amount of the gas species in the PVD chamber;
generating a setpoint from the control process for a gas flow controller that controls an amount of the gas species that flows into the PVD chamber while performing the current process on the semiconductor substrate; and
causing the gas flow controller to provide the gas species to the PVD chamber using the setpoint from the control process.

10. The non-transitory computer-readable medium of claim 9 , wherein the control process comprises a proportional-integral-derivative (PID) controller.

11. The non-transitory computer-readable medium of claim 10 , wherein the parameter for the control process comprises a gain factor for a proportional term in the PID controller.

12. The non-transitory computer-readable medium of claim 9 , wherein the OES is positioned to view a location where a plasma forms in the PVD chamber.

13. The non-transitory computer-readable medium of claim 9 , wherein the operations further comprise:
capturing a baseline set of measurements indicative of the amount of the gas species in the PVD chamber over time as a magnet oscillates in the PVD chamber to position a plasma in the PVD chamber; and
using the baseline set of measurements to normalize the measurement that is indicative of the amount of the gas species in the PVD chamber to minimize an effect of the magnet.

14. The non-transitory computer-readable medium of claim 9 , wherein the predetermined target amount of the gas species in the PVD chamber corresponds to a transition region that deposits a sub-stoichiometric film on the semiconductor substrate, and the transition region falls between a metallic deposition mode and a compound deposition mode.

15. A system comprising:
one or more processors; and
one or more memory devices comprising instructions that, when executed by the one or more processors, cause the one or more processors to perform operations comprising:
receiving, from an Optical Emission Spectrometer (OES), a measurement that is indicative of an amount of a gas species in a Physical Vapor Deposition (PVD) chamber while performing a current process on a semiconductor substrate in the PVD chamber;
providing the measurement as a feedback input to a control process that is configured to maintain a predetermined target amount of the gas species in the PVD chamber, wherein the predetermined target amount of the gas species in the PVD chamber corresponds to a transition region that deposits a sub-stoichiometric film on the semiconductor substrate, and the transition region falls between a metallic deposition mode and a compound deposition mode;
generating a setpoint from the control process for a gas flow controller that controls an amount of the gas species that flows into the PVD chamber while performing the current process on the semiconductor substrate; and
causing the gas flow controller to provide the gas species to the PVD chamber using the setpoint from the control process.

16. The system of claim 15 , wherein the gas species comprises nitrogen.

17. The system of claim 16 , wherein the current process comprises depositing titanium nitride on the semiconductor substrate to form one or more interconnects on the semiconductor substrate.

18. The system of claim 15 , wherein the operations further comprise:
capturing a baseline set of measurements indicative of the amount of the gas species in the PVD chamber over time as a magnet oscillates in the PVD ch

Assignees

• Applied Materials Inc

Inventors

• Digiacomo Philip
• Garg Sunil Kumar
• Kiely Paul G
• Miller Keith A
• Agrawal Rajat

Classifications

• G05D11/138 Primary

  by sensing the concentration of the mixture, e.g. measuring pH value · CPC title

• G01N21/67

  using electric arcs or discharges · CPC title

• G05B15/02

  electric · CPC title

• G05D21/02 Primary

  characterised by the use of electric means · CPC title

• G01N21/68

  using high frequency electric fields · CPC title