Polishing apparatus

Patent metadata

Field	Value
Publication number	US-11858088-B2
Application number	US-202217655811-A
Country	US
Kind code	B2
Filing date	Mar 22, 2022
Priority date	Mar 29, 2021
Publication date	Jan 2, 2024
Grant date	Jan 2, 2024

Abstract

A polishing apparatus includes a chuck table, a rotation mechanism that rotates the chuck table around a predetermined rotation axis, a polishing unit that has a spindle and in which a polishing pad for polishing the wafer sucked and held by the holding surface is mounted on a lower end part of the spindle, a slurry supply unit, and a cleaning unit that cleans the holding surface. The cleaning unit has a cleaning abrasive stone for removing the slurry that adheres to the holding surface through getting contact with the holding surface and a positioning unit that positions the cleaning abrasive stone to a cleaning position at which the cleaning abrasive stone gets contact with the holding surface and an evacuation position at which the cleaning abrasive stone is separate from the holding surface. Hardness of the cleaning abrasive stone is lower than the hardness of the holding surface.

First claim

What is claimed is:

1. A polishing apparatus comprising:
a chuck table having a holding surface capable of sucking and holding a wafer;
a rotation mechanism that rotates the chuck table around a predetermined rotation axis;
a polishing unit that has a spindle and in which a polishing pad for polishing the wafer sucked and held by the holding surface is mounted on a lower end part of the spindle;
a slurry supply unit that supplies slurry to at least one of the wafer sucked and held by the holding surface and the polishing pad; and
a cleaning unit that cleans the holding surface, wherein:
the cleaning unit has:
a cleaning abrasive stone configured to contact the holding surface and remove slurry that has adhered to the holding surface,
a positioning unit that positions the cleaning abrasive stone to a cleaning position at which the cleaning abrasive stone contacts the holding surface and an evacuation position at which the cleaning abrasive stone is separate from the holding surface, wherein the positioning unit includes an elastic component, and

a cleaning abrasive stone holder secured to the positioning unit, when the cleaning abrasive stone is held in place within the cleaning abrasive stone holder by at least one fastener which secures first and second plates disposed on opposite sides of the cleaning abrasive stone,

hardness of the cleaning abrasive stone is lower than hardness of the holding surface,
the elastic component comprises a compression spring,
the cleaning abrasive stone remains stationary in a X-Y plane when the cleaning unit is removing the slurry that has adhered to the holding surface, and
the X-Y plane is vertical to a Z-axis direction where the spindle is disposed along the Z-axis direction.

2. The polishing apparatus according to claim 1 , wherein:
the elastic component is configured for pressing the cleaning abrasive stone against the holding surface.

3. The polishing apparatus according to claim 1 , wherein:
the positioning unit positions the cleaning abrasive stone to the cleaning position and brings the cleaning abrasive stone into contact with part of an outer circumferential part of the holding surface at a time of cleaning of the holding surface.

4. The polishing apparatus according to claim 1 , wherein:
the holding surface is composed of ceramic, and
the hardness of the cleaning abrasive stone is equal to or lower than 680 HV in Vickers hardness.

5. The polishing apparatus according to claim 1 , wherein:
the cleaning abrasive stone is a polyvinyl alcohol abrasive stone having abrasive grains and a binder that fixes the abrasive grains.

6. The polishing apparatus according to claim 5 , wherein:
the cleaning abrasive stone includes abrasive grains made of cerium oxide.

7. The polishing apparatus according to claim 1 , wherein the cleaning abrasive stone has a rectangular parallelepiped shape.

8. The polishing apparatus according to claim 1 , wherein the cleaning abrasive stone holder further comprises:
a bracket secured to the positioning unit;
an upper plate having a through-hole fixed to the bracket; and
a shaft with an enlarged head disposed within the through-hole, wherein the elastic component is disposed around an outer circumferential part of the shaft.

Assignees

• Disco Corp

Inventors

• Moriya Toshiyuki
• Suzuki Takamasa
• Inoue Yuki
• Han Jai Kwang

Classifications

• H10P72/0428

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• B24B37/107 Primary

  in a rotary movement only, about an axis being stationary during lapping · CPC title

• B24B37/30

  for single side lapping of plane surfaces · CPC title

• B24B53/017

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B57/02 Primary

  for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents · CPC title