Substrate handling device with adjustable joints

Patent metadata

Field	Value
Publication number	US-11837494-B2
Application number	US-202217961882-A
Country	US
Kind code	B2
Filing date	Oct 7, 2022
Priority date	Mar 11, 2020
Publication date	Dec 5, 2023
Grant date	Dec 5, 2023

Abstract

An adjustable joint for insertion into a linkage of a substrate handler utilized for substrate processing. The adjustable joint allows for adjusting the pitch and roll of an attached link. Such adjustment may permit aligning a pickup surface of an end effector to a desired plane. Once adjusted, the joint may be fixed to maintain the desired orientation of the attached link. The adjustable joint allows for correcting deflection of a pickup surface of an end effector relative to a desired pickup plane due to, for example, drooping caused by high temperature usage, mechanical tolerances and/or installation errors.

First claim

We claim:

1. A substrate handling device, comprising:
an adjustable joint comprising a first body and a second body, wherein the first body and the second body are rigidly connectable at a selected contact angle to adjust a pitch of the second body,
wherein the first body comprises an adjustment surface and the second body comprises a contact surface, wherein the adjustment surface is disposed against the contact surface when the first body and the second body are rigidly connected, and wherein the adjustment surface is unitary and comprises first and second planar surfaces that are abutting, with the first planar surface being angled away from the second planar surface, whereby the first and second planar surfaces are non-planar,
wherein the first body further comprises:
at least a first adjustment aperture extending through the first planar surface, the first adjustment aperture being internally threaded; and
a first set screw disposed in the first adjustment aperture, and

wherein the first set screw is configured for advancement and retraction through the first adjustment aperture to selectively dispose a tip of the first set screw above or below the first planar surface and in contact with the contact surface to achieve a desired pitch of the second body.

2. The device of claim 1 , further comprising a link extending between a proximal end and a distal end, wherein the second body is coupled to the proximal end of the link, and wherein the tip of the first set screw is disposed above or below the first planar surface and in contact with the contact surface to achieve a desired pitch of the link.

3. The device of claim 2 , further comprising a rotary joint coupled to the first body, wherein the link is configured to rotate about the rotary joint.

4. The device of claim 3 , wherein the link comprises a generally parallel pair of links, wherein the rotary joint comprises first and second rotary joints and the adjustable joint comprises first and second adjustable joints.

5. The device of claim 3 , wherein the rotary joint comprises at least a first gear for translating motion from the link, which is a second link, to a first link coupled to the second link.

6. The device of claim 2 , further comprising an end effector coupled to the distal end of the link.

7. The device of claim 1 , further comprising a link extending between a proximal end and a distal end, wherein the proximal end comprises the second body, and wherein the tip of the first set screw is disposed above or below the first planar surface and in contact with the contact surface to achieve a desired pitch of the link.

8. The device of claim 7 , further comprising an end effector coupled to the distal end of the link.

9. A substrate handling device, comprising:
an adjustable joint comprising a first body and a second body, wherein the first body and the second body are rigidly connectable at a selected contact angle to adjust a roll of the second body along an axis,
wherein the first body comprises an adjustment surface and the second body comprises a contact surface, wherein the adjustment surface is disposed against the contact surface when the first body and the second body are rigidly connected,
wherein the first body further comprises:
a first adjustment aperture extending through the adjustment surface on a first side of the axis, the first adjustment aperture being internally threaded;
a first set screw disposed in the first adjustment aperture;
a second adjustment aperture extending through the adjustment surface on a second side of the axis, the second adjustment aperture being internally threaded; and
a second set screw disposed in the second adjustment aperture, and

wherein the first set screw and the second set screw are configured for advancement and retraction to dispose a first tip of the first set screw and a second tip of the second set screw above or below the adjustment surface and in contact with the contact surface to achieve a desired roll of the second body, wherein in response to the first tip and the second tip being advanced equally above or below the adjustment surface, the second body is substantially level, and wherein in response to the first tip and the second tip being advanced unequally above or below the adjustment surface, the second body is rolled to one side to achieve the desired roll;
a link comprising and extending between a proximal end and a distal end, wherein the second body is coupled to the proximal end of the link; and
an end effector coupled to the distal end of the link,
wherein the first tip of the first set screw and the second tip of the second set screw are disposed above or below the adjustment surface and in contact with the contact surface to achieve the desired roll of the link along the axis, wherein the axis spans between the proximal end and the distal end of the link.

10. The device of claim 9 , wherein the proximal end of the link comprises the second body.

11. The device of claim 9 , further comprising a rotary joint coupled to the first body, wherein the link is configured to rotate about the rotary joint.

12. The device of claim 11 , wherein the link comprises a generally parallel pair of links, wherein the rotary joint comprises first and second rotary joints and the adjustable joint comprises first and second adjustable joints.

13. The device of claim 11 , wherein the rotary joint comprises at least a first gear for translating motion from the link, which is a second link, to a first link coupled to the second link.

Assignees

• Asm Ip Holding Bv

Inventors

• Kim Kihyun
• Kim Sam
• Naik Rutvij

Classifications

• H10P72/7602 Primary

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3302 Primary

  Mechanical parts of transfer devices · CPC title

• H01L21/68707 Primary

  Electricity · mapped topic

• B65G47/90

  Devices for picking-up and depositing articles or materials · CPC title

• C23C16/54 Primary

  Apparatus specially adapted for continuous coating · CPC title