Electrostatic chuck and semiconductor manufacturing apparatus

Patent metadata

Field	Value
Publication number	US-11830755-B2
Application number	US-202217693623-A
Country	US
Kind code	B2
Filing date	Mar 14, 2022
Priority date	Mar 24, 2021
Publication date	Nov 28, 2023
Grant date	Nov 28, 2023

Abstract

An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The ceramic dielectric substrate includes a first major surface, a second major surface, a groove part, and a plurality of cooling gas holes. The groove part includes first and second circumferential grooves, and first and second radial-direction grooves. The plurality of cooling gas holes includes first and second holes. The first hole overlaps the first radial-direction groove. The second hole overlaps the second radial-direction groove. The base plate includes a gas inlet path that supplies the cooling gas to the first and second holes. The first circumferential groove includes first and second end portions. The second circumferential groove includes third and fourth end portions. The third end portion and the fourth end portion do not overlap the first end portion in the radial direction.

First claim

What is claimed is:

1. An electrostatic chuck, comprising:
a ceramic dielectric substrate that is circular when viewed in plan; and
a base plate supporting the ceramic dielectric substrate,
the ceramic dielectric substrate including
a first major surface configured to have a processing object placed thereon,
a second major surface at a side opposite to the first major surface,
a groove part recessed from the first major surface toward the second major surface, and
a plurality of cooling gas holes extending between the groove part and the second major surface and configured to pass cooling gas there through,

the groove part including
a first circumferential groove extending in a circumferential direction,
a second circumferential groove extending in the circumferential direction, at least a portion of the second circumferential groove being next to the first circumferential groove in a radial direction,
a third circumferential groove extending in the circumferential direction, at least a portion of the third circumferential groove being next to the second circumferential groove in a radial direction,
a first radial-direction groove extending in the radial direction and intersecting the first circumferential groove, and
a second radial-direction groove extending in the radial direction and intersecting the second circumferential groove,

the plurality of cooling gas holes including
a first hole overlapping the first radial-direction groove when viewed in plan, and
a second hole overlapping the second radial-direction groove when viewed in plan,

the base plate including a gas inlet path through which the cooling gas is supplied to the first and second holes,
the first circumferential groove including
a first end portion positioned at one end side thereof in the circumferential direction, and
a second end portion positioned at an other end side thereof in the circumferential direction,

the second circumferential groove including
a third end portion positioned at the one end side thereof in the circumferential direction, and
a fourth end portion positioned at the other end side thereof in the circumferential direction,

the third circumferential groove including
a fifth end portion positioned at the one end side thereof in the circumferential direction, and
a sixth end portion positioned at the other end side thereof in the circumferential direction,

the third end portion and the fourth end portion do not overlap the first end portion in the radial direction,
the fifth end portion and the sixth end portion do not overlap the third end portion in the radial direction.

2. The chuck according to claim 1 , wherein
a distance to the first hole from an intersection between the first radial-direction groove and the first circumferential groove is equal to a distance to the second hole from an intersection between the second radial-direction groove and the second circumferential groove.

3. The chuck according to claim 1 , wherein
the third end portion and the fourth end portion do not overlap the second end portion in the radial direction.

4. The chuck according to claim 1 , wherein
the first circumferential groove includes a central region that includes a center of the first circumferential groove in the circumferential direction, and
the third end portion overlaps the central region in the radial direction.

5. The chuck according to claim 4 , wherein
the third end portion is positioned closer to the second end portion in the circumferential direction than to the first end portion in the circumferential direction.

6. The chuck according to claim 5 , wherein
the fourth end portion does not overlap the first circumferential groove in the radial direction.

7. The chuck according to claim 1 , further comprising:
a heater which heats the ceramic dielectric substrate.

8. A semiconductor manufacturing apparatus, comprising:
the chuck according to claim 1 ; and
a gas supplier which supplies the cooling gas to the first and second holes via the gas inlet path.

9. An electrostatic chuck, comprising:
a ceramic dielectric substrate that is circular when viewed in plan; and
a base plate supporting the ceramic dielectric substrate,
the ceramic dielectric substrate including

a first major surface configured to have a processing object placed thereon,
a second major surface at a side opposite to the first major surface,
a groove part recessed from the first major surface toward the second major surface, and
a plurality of cooling gas holes extending between the groove part and the second major surface and configured to pass cooling gas there through,
the groove part including
a first circumferential groove extending in a circumferential direction,
a second circumferential groove extending in the circumferential direction, at least a portion of the second circumferential groove being next to the first circumferential groove in a radial direction,
a third circumferential groove extending in the circumferential direction, at least a portion of the third circumferential groove being next to the second circumferential groove in a radial direction,
a first radial-direction groove extending in the radial direction and intersecting the first circumferential groove, and
a second radial-direction groove extending in the radial direction and intersecting the second circumferential groove,

the plurality of cooling gas holes including
a first hole overlapping the first circumferential groove when viewed in plan, and
a second hole overlapping the second circumferential groove when viewed in plan,

the base plate including a gas inlet path through which the cooling gas is supplied to the first and second holes,
the first circumferential groove including
a first end portion positioned at one end side thereof in the circumferential direction, and
a second end portion positioned at an other end side thereof in the circumferential direction,

the second circumferential groove including
a third end portion positioned at the one end side thereof in the circumferential direction, and
a fourth end portion positioned at the other end side thereof in the circumferential direction,

the third circumferential groove including
a fifth end portion positioned at the one end side thereof in the circumferential direction, and
a sixth end portion positioned at the other end side thereof in the circumferential direction,

the third end portion and the fourth end portion do not overlap the first end portion in the radial direction,
the fifth end portion and the sixth end portion do not overlap the third end portion in the radial direction.

10. The chuck according to claim 9 , wherein
a distance to the first hole from an intersection between the first radial-direction groove and the first circumferential groove is equal to a distance to the second hole from an intersection between the second radial-direction groove and the second circumferential groove.

11. The chuck according to claim 9 , wherein
the third end portion and the fourth end portion do not overlap the second end portion in the radial direction.

12. The chuck according to claim 9 , wherein
the first circumferential groove includes a central region that includes a center of the first circumferential groove in the circumferential direction, and
the third end portion overlaps the central region in the radial direction.

13. The chuck according to claim 12 , wherein
the third end portion is positioned closer to the second end portion in the circumferential direction than to the first end portion in the circumferential direction.

Assignees

• Toto Ltd

Inventors

• Ono Akihito
• Uefuji Jumpei
• Umetsu tomoki
• Hayakawa Tatsuya

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/0421

  for drying etching · CPC title

• H01L21/6833 Primary

  Electricity · mapped topic